Abstract

Color centers in diamond have garnered significant attention for applications in integrated quantum photonics. The availability of thin (∼ hundred of nanometers) diamond membranes is paramount to achieve this goal. In this paper, we describe in detail a robust, reproducible and cost effective fabrication method that enables engineering high quality thin diamond membranes with uniform distribution of germanium vacancies employing microwave plasma chemical vapor deposition. We use a combination of different germanium precursors for homogeneous doping of the membranes to increase the probability of germanium incorporation into the diamond lattice. Our fabrication methodology can be further extended to implementation of other color centers in thin diamond membranes and be used for engineering quantum photonic devices.

© 2019 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

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  1. R. S. Balmer, J. R. Brandon, S. L. Clewes, H. K. Dhillon, J. M. Dodson, I. Friel, P. N. Inglis, T. D. Madgwick, M. L. Markham, T. P. Mollart, N. Perkins, G. A. Scarsbrook, D. J. Twitchen, A. J. Whitehead, J. J. Wilman, and S. M. Woollard, “Chemical vapour deposition synthetic diamond: materials, technology and applications,” J. Phys.: Condens. Matter 21(36), 364221 (2009).
    [Crossref]
  2. S. Wehner, D. Elkouss, and R. Hanson, “Quantum internet: A vision for the road ahead,” Science 362(6412), eaam9288 (2018).
    [Crossref]
  3. D. D. Awschalom, R. Hanson, J. Wrachtrup, and B. B. Zhou, “Quantum technologies with optically interfaced solid-state spins,” Nat. Photonics 12(9), 516–527 (2018).
    [Crossref]
  4. M. Atatüre, D. Englund, N. Vamivakas, S.-Y. Lee, and J. Wrachtrup, “Material platforms for spin-based photonic quantum technologies,” Nat. Rev. Mater. 3(5), 38–51 (2018).
    [Crossref]
  5. I. Aharonovich and E. Neu, “Diamond Nanophotonics,” Adv. Opt. Mater. 2(10), 911–928 (2014).
    [Crossref]
  6. C. Bradac, W. B. Gao, J. Forneris, M. E. Trusheim, and I. Aharonovich, “Quantum Nanophotonics with Group IV defects in Diamond”, https://arxiv.org/abs/1906.10992 , (2019).
  7. T. Schröder, S. L. Mouradian, J. Zheng, M. E. Trusheim, M. Walsh, E. H. Chen, L. Li, I. Bayn, and D. Englund, “Quantum nanophotonics in diamond [Invited],” J. Opt. Soc. Am. B 33(4), B65–B83 (2016).
    [Crossref]
  8. F. Lenzini, N. Gruhler, N. Walter, and W. H. P. Pernice, “Diamond as a Platform for Integrated Quantum Photonics,” Adv. Quantum Technol. 1(3), 1800061 (2018).
    [Crossref]
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    [Crossref]
  10. A. H. Piracha, P. Rath, K. Ganesan, S. Kühn, W. H. P. Pernice, and S. Prawer, “Scalable Fabrication of Integrated Nanophotonic Circuits on Arrays of Thin Single Crystal Diamond Membrane Windows,” Nano Lett. 16(5), 3341–3347 (2016).
    [Crossref]
  11. A. H. Piracha, K. Ganesan, D. W. M. Lau, A. Stacey, L. P. McGuinness, S. Tomljenovic-Hanic, and S. Prawer, “Scalable fabrication of high-quality, ultra-thin single crystal diamond membrane windows,” Nanoscale 8(12), 6860–6865 (2016).
    [Crossref]
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    [Crossref]
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    [Crossref]
  14. A. Magyar, J. C. Lee, A. M. Limarga, I. Aharonovich, F. Rol, D. R. Clarke, M. B. Huang, and E. L. Hu, “Fabrication of Thin, Luminescent, Single-crystal Diamond Membranes,” Appl. Phys. Lett. 99(8), 081913 (2011).
    [Crossref]
  15. S. Häußler, J. Benedikter, K. Bray, B. Regan, A. Dietrich, J. Twamley, I. Aharonovich, D. Hunger, and A. Kubanek, “Diamond photonics platform based on silicon vacancy centers in a single-crystal diamond membrane and a fiber cavity,” Phys. Rev. B 99(16), 165310 (2019).
    [Crossref]
  16. K. Bray, B. Regan, A. Trycz, R. Previdi, G. Seniutinas, K. Ganesan, M. Kianinia, S. Kim, and I. Aharonovich, “Single Crystal Diamond Membranes and Photonic Resonators Containing Germanium Vacancy Color Centers,” ACS Photonics 5(12), 4817–4822 (2018).
    [Crossref]
  17. K. Bray, H. Kato, R. Previdi, R. Sandstrom, K. Ganesan, M. Ogura, T. Makino, S. Yamasaki, A. P. Magyar, M. Toth, and I. Aharonovich, “Single crystal diamond membranes for nanoelectronics,” Nanoscale 10(8), 4028–4035 (2018).
    [Crossref]
  18. M. J. Crane, A. Petrone, R. A. Beck, M. B. Lim, X. Zhou, X. Li, R. M. Stroud, and P. J. Pauzauskie, “High-pressure, high-temperature molecular doping of nanodiamond,” Sci. Adv. 5(5), eaau6073 (2019).
    [Crossref]
  19. E. A. Ekimov, M. V. Kondrin, V. S. Krivobok, A. A. Khomich, I. I. Vlasov, R. A. Khmelnitskiy, T. Iwasaki, and M. Hatano, “Effect of Si, Ge and Sn dopant elements on structure and photoluminescence of nano- and microdiamonds synthesized from organic compounds,” Diamond Relat. Mater. 93, 75–83 (2019).
    [Crossref]
  20. S. Ditalia Tchernij, T. Lühmann, T. Herzig, J. Küpper, A. Damin, S. Santonocito, M. Signorile, P. Traina, E. Moreva, F. Celegato, S. Pezzagna, I. P. Degiovanni, P. Olivero, M. Jakšić, J. Meijer, P. M. Genovese, and J. Forneris, “Single-Photon Emitters in Lead-Implanted Single-Crystal Diamond,” ACS Photonics 5(12), 4864–4871 (2018).
    [Crossref]
  21. A. E. Rugar, C. Dory, S. Sun, and J. Vučković, “Characterization of optical and spin properties of single tin-vacancy centers in diamond nanopillars,” Phys. Rev. B 99(20), 205417 (2019).
    [Crossref]
  22. M. E. Trusheim, B. Pingault, N. H. Wan, M. Gundogan, L. de Santis, K. C. Chen, M. Walsh, J. Rose, J. N. Becker, B. Lienhard, E. Bersin, G. Malladi, D. Lyzwa, H. Bakhru, I. Walmsley, M. Atature, and D. Englund, “Transform-limited photons from a tin-vacancy spin in diamond”, https://arxiv.org/abs/1811.07777 , (2019).
  23. T. Iwasaki, F. Ishibashi, Y. Miyamoto, Y. Doi, S. Kobayashi, T. Miyazaki, K. Tahara, K. D. Jahnke, L. J. Rogers, B. Naydenov, F. Jelezko, S. Yamasaki, S. Nagamachi, T. Inubushi, N. Mizuochi, and M. Hatano, “Germanium-Vacancy Single Color Centers in Diamond,” Sci. Rep. 5(1), 12882 (2015).
    [Crossref]
  24. T. Iwasaki, Y. Miyamoto, T. Taniguchi, P. Siyushev, M. H. Metsch, F. Jelezko, and M. Hatano, “Tin-Vacancy Quantum Emitters in Diamond,” Phys. Rev. Lett. 119(25), 253601 (2017).
    [Crossref]
  25. V. Sedov, A. Martyanov, S. Savin, A. Bolshakov, E. Bushuev, A. Khomich, O. Kudryavtsev, V. Krivobok, S. Nikolaev, and V. Ralchenko, “Growth of polycrystalline and single-crystal CVD diamonds with bright photoluminescence of Ge-V color centers using germane GeH4 as the dopant source,” Diamond Relat. Mater. 90, 47–53 (2018).
    [Crossref]

2019 (5)

S. M. Eaton, J. P. Hadden, V. Bharadwaj, J. Forneris, F. Picollo, F. Bosia, B. Sotillo, A. N. Giakoumaki, O. Jedrkiewicz, A. Chiappini, M. Ferrari, R. Osellame, P. E. Barclay, P. Olivero, and R. Ramponi, “Quantum Micro–Nano Devices Fabricated in Diamond by Femtosecond Laser and Ion Irradiation (Adv. Quantum Technol. 5-6/2019),” Adv. Quantum Technol. 2(5-6), 1970033 (2019).
[Crossref]

S. Häußler, J. Benedikter, K. Bray, B. Regan, A. Dietrich, J. Twamley, I. Aharonovich, D. Hunger, and A. Kubanek, “Diamond photonics platform based on silicon vacancy centers in a single-crystal diamond membrane and a fiber cavity,” Phys. Rev. B 99(16), 165310 (2019).
[Crossref]

M. J. Crane, A. Petrone, R. A. Beck, M. B. Lim, X. Zhou, X. Li, R. M. Stroud, and P. J. Pauzauskie, “High-pressure, high-temperature molecular doping of nanodiamond,” Sci. Adv. 5(5), eaau6073 (2019).
[Crossref]

E. A. Ekimov, M. V. Kondrin, V. S. Krivobok, A. A. Khomich, I. I. Vlasov, R. A. Khmelnitskiy, T. Iwasaki, and M. Hatano, “Effect of Si, Ge and Sn dopant elements on structure and photoluminescence of nano- and microdiamonds synthesized from organic compounds,” Diamond Relat. Mater. 93, 75–83 (2019).
[Crossref]

A. E. Rugar, C. Dory, S. Sun, and J. Vučković, “Characterization of optical and spin properties of single tin-vacancy centers in diamond nanopillars,” Phys. Rev. B 99(20), 205417 (2019).
[Crossref]

2018 (8)

S. Ditalia Tchernij, T. Lühmann, T. Herzig, J. Küpper, A. Damin, S. Santonocito, M. Signorile, P. Traina, E. Moreva, F. Celegato, S. Pezzagna, I. P. Degiovanni, P. Olivero, M. Jakšić, J. Meijer, P. M. Genovese, and J. Forneris, “Single-Photon Emitters in Lead-Implanted Single-Crystal Diamond,” ACS Photonics 5(12), 4864–4871 (2018).
[Crossref]

K. Bray, B. Regan, A. Trycz, R. Previdi, G. Seniutinas, K. Ganesan, M. Kianinia, S. Kim, and I. Aharonovich, “Single Crystal Diamond Membranes and Photonic Resonators Containing Germanium Vacancy Color Centers,” ACS Photonics 5(12), 4817–4822 (2018).
[Crossref]

K. Bray, H. Kato, R. Previdi, R. Sandstrom, K. Ganesan, M. Ogura, T. Makino, S. Yamasaki, A. P. Magyar, M. Toth, and I. Aharonovich, “Single crystal diamond membranes for nanoelectronics,” Nanoscale 10(8), 4028–4035 (2018).
[Crossref]

S. Wehner, D. Elkouss, and R. Hanson, “Quantum internet: A vision for the road ahead,” Science 362(6412), eaam9288 (2018).
[Crossref]

D. D. Awschalom, R. Hanson, J. Wrachtrup, and B. B. Zhou, “Quantum technologies with optically interfaced solid-state spins,” Nat. Photonics 12(9), 516–527 (2018).
[Crossref]

M. Atatüre, D. Englund, N. Vamivakas, S.-Y. Lee, and J. Wrachtrup, “Material platforms for spin-based photonic quantum technologies,” Nat. Rev. Mater. 3(5), 38–51 (2018).
[Crossref]

F. Lenzini, N. Gruhler, N. Walter, and W. H. P. Pernice, “Diamond as a Platform for Integrated Quantum Photonics,” Adv. Quantum Technol. 1(3), 1800061 (2018).
[Crossref]

V. Sedov, A. Martyanov, S. Savin, A. Bolshakov, E. Bushuev, A. Khomich, O. Kudryavtsev, V. Krivobok, S. Nikolaev, and V. Ralchenko, “Growth of polycrystalline and single-crystal CVD diamonds with bright photoluminescence of Ge-V color centers using germane GeH4 as the dopant source,” Diamond Relat. Mater. 90, 47–53 (2018).
[Crossref]

2017 (1)

T. Iwasaki, Y. Miyamoto, T. Taniguchi, P. Siyushev, M. H. Metsch, F. Jelezko, and M. Hatano, “Tin-Vacancy Quantum Emitters in Diamond,” Phys. Rev. Lett. 119(25), 253601 (2017).
[Crossref]

2016 (3)

A. H. Piracha, P. Rath, K. Ganesan, S. Kühn, W. H. P. Pernice, and S. Prawer, “Scalable Fabrication of Integrated Nanophotonic Circuits on Arrays of Thin Single Crystal Diamond Membrane Windows,” Nano Lett. 16(5), 3341–3347 (2016).
[Crossref]

A. H. Piracha, K. Ganesan, D. W. M. Lau, A. Stacey, L. P. McGuinness, S. Tomljenovic-Hanic, and S. Prawer, “Scalable fabrication of high-quality, ultra-thin single crystal diamond membrane windows,” Nanoscale 8(12), 6860–6865 (2016).
[Crossref]

T. Schröder, S. L. Mouradian, J. Zheng, M. E. Trusheim, M. Walsh, E. H. Chen, L. Li, I. Bayn, and D. Englund, “Quantum nanophotonics in diamond [Invited],” J. Opt. Soc. Am. B 33(4), B65–B83 (2016).
[Crossref]

2015 (1)

T. Iwasaki, F. Ishibashi, Y. Miyamoto, Y. Doi, S. Kobayashi, T. Miyazaki, K. Tahara, K. D. Jahnke, L. J. Rogers, B. Naydenov, F. Jelezko, S. Yamasaki, S. Nagamachi, T. Inubushi, N. Mizuochi, and M. Hatano, “Germanium-Vacancy Single Color Centers in Diamond,” Sci. Rep. 5(1), 12882 (2015).
[Crossref]

2014 (1)

I. Aharonovich and E. Neu, “Diamond Nanophotonics,” Adv. Opt. Mater. 2(10), 911–928 (2014).
[Crossref]

2012 (2)

J. C. Lee, I. Aharonovich, A. P. Magyar, F. Rol, and E. L. Hu, “Coupling of silicon-vacancy centers to a single crystal diamond cavity,” Opt. Express 20(8), 8891–8897 (2012).
[Crossref]

I. Aharonovich, J. C. Lee, A. P. Magyar, B. B. Buckley, C. G. Yale, D. D. Awschalom, and E. L. Hu, “Homoepitaxial Growth of Single Crystal Diamond Membranes for Quantum Information Processing,” Adv. Mater. 24(10), OP54–OP59 (2012).
[Crossref]

2011 (1)

A. Magyar, J. C. Lee, A. M. Limarga, I. Aharonovich, F. Rol, D. R. Clarke, M. B. Huang, and E. L. Hu, “Fabrication of Thin, Luminescent, Single-crystal Diamond Membranes,” Appl. Phys. Lett. 99(8), 081913 (2011).
[Crossref]

2009 (1)

R. S. Balmer, J. R. Brandon, S. L. Clewes, H. K. Dhillon, J. M. Dodson, I. Friel, P. N. Inglis, T. D. Madgwick, M. L. Markham, T. P. Mollart, N. Perkins, G. A. Scarsbrook, D. J. Twitchen, A. J. Whitehead, J. J. Wilman, and S. M. Woollard, “Chemical vapour deposition synthetic diamond: materials, technology and applications,” J. Phys.: Condens. Matter 21(36), 364221 (2009).
[Crossref]

Aharonovich, I.

S. Häußler, J. Benedikter, K. Bray, B. Regan, A. Dietrich, J. Twamley, I. Aharonovich, D. Hunger, and A. Kubanek, “Diamond photonics platform based on silicon vacancy centers in a single-crystal diamond membrane and a fiber cavity,” Phys. Rev. B 99(16), 165310 (2019).
[Crossref]

K. Bray, B. Regan, A. Trycz, R. Previdi, G. Seniutinas, K. Ganesan, M. Kianinia, S. Kim, and I. Aharonovich, “Single Crystal Diamond Membranes and Photonic Resonators Containing Germanium Vacancy Color Centers,” ACS Photonics 5(12), 4817–4822 (2018).
[Crossref]

K. Bray, H. Kato, R. Previdi, R. Sandstrom, K. Ganesan, M. Ogura, T. Makino, S. Yamasaki, A. P. Magyar, M. Toth, and I. Aharonovich, “Single crystal diamond membranes for nanoelectronics,” Nanoscale 10(8), 4028–4035 (2018).
[Crossref]

I. Aharonovich and E. Neu, “Diamond Nanophotonics,” Adv. Opt. Mater. 2(10), 911–928 (2014).
[Crossref]

J. C. Lee, I. Aharonovich, A. P. Magyar, F. Rol, and E. L. Hu, “Coupling of silicon-vacancy centers to a single crystal diamond cavity,” Opt. Express 20(8), 8891–8897 (2012).
[Crossref]

I. Aharonovich, J. C. Lee, A. P. Magyar, B. B. Buckley, C. G. Yale, D. D. Awschalom, and E. L. Hu, “Homoepitaxial Growth of Single Crystal Diamond Membranes for Quantum Information Processing,” Adv. Mater. 24(10), OP54–OP59 (2012).
[Crossref]

A. Magyar, J. C. Lee, A. M. Limarga, I. Aharonovich, F. Rol, D. R. Clarke, M. B. Huang, and E. L. Hu, “Fabrication of Thin, Luminescent, Single-crystal Diamond Membranes,” Appl. Phys. Lett. 99(8), 081913 (2011).
[Crossref]

C. Bradac, W. B. Gao, J. Forneris, M. E. Trusheim, and I. Aharonovich, “Quantum Nanophotonics with Group IV defects in Diamond”, https://arxiv.org/abs/1906.10992 , (2019).

Atature, M.

M. E. Trusheim, B. Pingault, N. H. Wan, M. Gundogan, L. de Santis, K. C. Chen, M. Walsh, J. Rose, J. N. Becker, B. Lienhard, E. Bersin, G. Malladi, D. Lyzwa, H. Bakhru, I. Walmsley, M. Atature, and D. Englund, “Transform-limited photons from a tin-vacancy spin in diamond”, https://arxiv.org/abs/1811.07777 , (2019).

Atatüre, M.

M. Atatüre, D. Englund, N. Vamivakas, S.-Y. Lee, and J. Wrachtrup, “Material platforms for spin-based photonic quantum technologies,” Nat. Rev. Mater. 3(5), 38–51 (2018).
[Crossref]

Awschalom, D. D.

D. D. Awschalom, R. Hanson, J. Wrachtrup, and B. B. Zhou, “Quantum technologies with optically interfaced solid-state spins,” Nat. Photonics 12(9), 516–527 (2018).
[Crossref]

I. Aharonovich, J. C. Lee, A. P. Magyar, B. B. Buckley, C. G. Yale, D. D. Awschalom, and E. L. Hu, “Homoepitaxial Growth of Single Crystal Diamond Membranes for Quantum Information Processing,” Adv. Mater. 24(10), OP54–OP59 (2012).
[Crossref]

Bakhru, H.

M. E. Trusheim, B. Pingault, N. H. Wan, M. Gundogan, L. de Santis, K. C. Chen, M. Walsh, J. Rose, J. N. Becker, B. Lienhard, E. Bersin, G. Malladi, D. Lyzwa, H. Bakhru, I. Walmsley, M. Atature, and D. Englund, “Transform-limited photons from a tin-vacancy spin in diamond”, https://arxiv.org/abs/1811.07777 , (2019).

Balmer, R. S.

R. S. Balmer, J. R. Brandon, S. L. Clewes, H. K. Dhillon, J. M. Dodson, I. Friel, P. N. Inglis, T. D. Madgwick, M. L. Markham, T. P. Mollart, N. Perkins, G. A. Scarsbrook, D. J. Twitchen, A. J. Whitehead, J. J. Wilman, and S. M. Woollard, “Chemical vapour deposition synthetic diamond: materials, technology and applications,” J. Phys.: Condens. Matter 21(36), 364221 (2009).
[Crossref]

Barclay, P. E.

S. M. Eaton, J. P. Hadden, V. Bharadwaj, J. Forneris, F. Picollo, F. Bosia, B. Sotillo, A. N. Giakoumaki, O. Jedrkiewicz, A. Chiappini, M. Ferrari, R. Osellame, P. E. Barclay, P. Olivero, and R. Ramponi, “Quantum Micro–Nano Devices Fabricated in Diamond by Femtosecond Laser and Ion Irradiation (Adv. Quantum Technol. 5-6/2019),” Adv. Quantum Technol. 2(5-6), 1970033 (2019).
[Crossref]

Bayn, I.

Beck, R. A.

M. J. Crane, A. Petrone, R. A. Beck, M. B. Lim, X. Zhou, X. Li, R. M. Stroud, and P. J. Pauzauskie, “High-pressure, high-temperature molecular doping of nanodiamond,” Sci. Adv. 5(5), eaau6073 (2019).
[Crossref]

Becker, J. N.

M. E. Trusheim, B. Pingault, N. H. Wan, M. Gundogan, L. de Santis, K. C. Chen, M. Walsh, J. Rose, J. N. Becker, B. Lienhard, E. Bersin, G. Malladi, D. Lyzwa, H. Bakhru, I. Walmsley, M. Atature, and D. Englund, “Transform-limited photons from a tin-vacancy spin in diamond”, https://arxiv.org/abs/1811.07777 , (2019).

Benedikter, J.

S. Häußler, J. Benedikter, K. Bray, B. Regan, A. Dietrich, J. Twamley, I. Aharonovich, D. Hunger, and A. Kubanek, “Diamond photonics platform based on silicon vacancy centers in a single-crystal diamond membrane and a fiber cavity,” Phys. Rev. B 99(16), 165310 (2019).
[Crossref]

Bersin, E.

M. E. Trusheim, B. Pingault, N. H. Wan, M. Gundogan, L. de Santis, K. C. Chen, M. Walsh, J. Rose, J. N. Becker, B. Lienhard, E. Bersin, G. Malladi, D. Lyzwa, H. Bakhru, I. Walmsley, M. Atature, and D. Englund, “Transform-limited photons from a tin-vacancy spin in diamond”, https://arxiv.org/abs/1811.07777 , (2019).

Bharadwaj, V.

S. M. Eaton, J. P. Hadden, V. Bharadwaj, J. Forneris, F. Picollo, F. Bosia, B. Sotillo, A. N. Giakoumaki, O. Jedrkiewicz, A. Chiappini, M. Ferrari, R. Osellame, P. E. Barclay, P. Olivero, and R. Ramponi, “Quantum Micro–Nano Devices Fabricated in Diamond by Femtosecond Laser and Ion Irradiation (Adv. Quantum Technol. 5-6/2019),” Adv. Quantum Technol. 2(5-6), 1970033 (2019).
[Crossref]

Bolshakov, A.

V. Sedov, A. Martyanov, S. Savin, A. Bolshakov, E. Bushuev, A. Khomich, O. Kudryavtsev, V. Krivobok, S. Nikolaev, and V. Ralchenko, “Growth of polycrystalline and single-crystal CVD diamonds with bright photoluminescence of Ge-V color centers using germane GeH4 as the dopant source,” Diamond Relat. Mater. 90, 47–53 (2018).
[Crossref]

Bosia, F.

S. M. Eaton, J. P. Hadden, V. Bharadwaj, J. Forneris, F. Picollo, F. Bosia, B. Sotillo, A. N. Giakoumaki, O. Jedrkiewicz, A. Chiappini, M. Ferrari, R. Osellame, P. E. Barclay, P. Olivero, and R. Ramponi, “Quantum Micro–Nano Devices Fabricated in Diamond by Femtosecond Laser and Ion Irradiation (Adv. Quantum Technol. 5-6/2019),” Adv. Quantum Technol. 2(5-6), 1970033 (2019).
[Crossref]

Bradac, C.

C. Bradac, W. B. Gao, J. Forneris, M. E. Trusheim, and I. Aharonovich, “Quantum Nanophotonics with Group IV defects in Diamond”, https://arxiv.org/abs/1906.10992 , (2019).

Brandon, J. R.

R. S. Balmer, J. R. Brandon, S. L. Clewes, H. K. Dhillon, J. M. Dodson, I. Friel, P. N. Inglis, T. D. Madgwick, M. L. Markham, T. P. Mollart, N. Perkins, G. A. Scarsbrook, D. J. Twitchen, A. J. Whitehead, J. J. Wilman, and S. M. Woollard, “Chemical vapour deposition synthetic diamond: materials, technology and applications,” J. Phys.: Condens. Matter 21(36), 364221 (2009).
[Crossref]

Bray, K.

S. Häußler, J. Benedikter, K. Bray, B. Regan, A. Dietrich, J. Twamley, I. Aharonovich, D. Hunger, and A. Kubanek, “Diamond photonics platform based on silicon vacancy centers in a single-crystal diamond membrane and a fiber cavity,” Phys. Rev. B 99(16), 165310 (2019).
[Crossref]

K. Bray, B. Regan, A. Trycz, R. Previdi, G. Seniutinas, K. Ganesan, M. Kianinia, S. Kim, and I. Aharonovich, “Single Crystal Diamond Membranes and Photonic Resonators Containing Germanium Vacancy Color Centers,” ACS Photonics 5(12), 4817–4822 (2018).
[Crossref]

K. Bray, H. Kato, R. Previdi, R. Sandstrom, K. Ganesan, M. Ogura, T. Makino, S. Yamasaki, A. P. Magyar, M. Toth, and I. Aharonovich, “Single crystal diamond membranes for nanoelectronics,” Nanoscale 10(8), 4028–4035 (2018).
[Crossref]

Buckley, B. B.

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Kim, S.

K. Bray, B. Regan, A. Trycz, R. Previdi, G. Seniutinas, K. Ganesan, M. Kianinia, S. Kim, and I. Aharonovich, “Single Crystal Diamond Membranes and Photonic Resonators Containing Germanium Vacancy Color Centers,” ACS Photonics 5(12), 4817–4822 (2018).
[Crossref]

Kobayashi, S.

T. Iwasaki, F. Ishibashi, Y. Miyamoto, Y. Doi, S. Kobayashi, T. Miyazaki, K. Tahara, K. D. Jahnke, L. J. Rogers, B. Naydenov, F. Jelezko, S. Yamasaki, S. Nagamachi, T. Inubushi, N. Mizuochi, and M. Hatano, “Germanium-Vacancy Single Color Centers in Diamond,” Sci. Rep. 5(1), 12882 (2015).
[Crossref]

Kondrin, M. V.

E. A. Ekimov, M. V. Kondrin, V. S. Krivobok, A. A. Khomich, I. I. Vlasov, R. A. Khmelnitskiy, T. Iwasaki, and M. Hatano, “Effect of Si, Ge and Sn dopant elements on structure and photoluminescence of nano- and microdiamonds synthesized from organic compounds,” Diamond Relat. Mater. 93, 75–83 (2019).
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Krivobok, V.

V. Sedov, A. Martyanov, S. Savin, A. Bolshakov, E. Bushuev, A. Khomich, O. Kudryavtsev, V. Krivobok, S. Nikolaev, and V. Ralchenko, “Growth of polycrystalline and single-crystal CVD diamonds with bright photoluminescence of Ge-V color centers using germane GeH4 as the dopant source,” Diamond Relat. Mater. 90, 47–53 (2018).
[Crossref]

Krivobok, V. S.

E. A. Ekimov, M. V. Kondrin, V. S. Krivobok, A. A. Khomich, I. I. Vlasov, R. A. Khmelnitskiy, T. Iwasaki, and M. Hatano, “Effect of Si, Ge and Sn dopant elements on structure and photoluminescence of nano- and microdiamonds synthesized from organic compounds,” Diamond Relat. Mater. 93, 75–83 (2019).
[Crossref]

Kubanek, A.

S. Häußler, J. Benedikter, K. Bray, B. Regan, A. Dietrich, J. Twamley, I. Aharonovich, D. Hunger, and A. Kubanek, “Diamond photonics platform based on silicon vacancy centers in a single-crystal diamond membrane and a fiber cavity,” Phys. Rev. B 99(16), 165310 (2019).
[Crossref]

Kudryavtsev, O.

V. Sedov, A. Martyanov, S. Savin, A. Bolshakov, E. Bushuev, A. Khomich, O. Kudryavtsev, V. Krivobok, S. Nikolaev, and V. Ralchenko, “Growth of polycrystalline and single-crystal CVD diamonds with bright photoluminescence of Ge-V color centers using germane GeH4 as the dopant source,” Diamond Relat. Mater. 90, 47–53 (2018).
[Crossref]

Kühn, S.

A. H. Piracha, P. Rath, K. Ganesan, S. Kühn, W. H. P. Pernice, and S. Prawer, “Scalable Fabrication of Integrated Nanophotonic Circuits on Arrays of Thin Single Crystal Diamond Membrane Windows,” Nano Lett. 16(5), 3341–3347 (2016).
[Crossref]

Küpper, J.

S. Ditalia Tchernij, T. Lühmann, T. Herzig, J. Küpper, A. Damin, S. Santonocito, M. Signorile, P. Traina, E. Moreva, F. Celegato, S. Pezzagna, I. P. Degiovanni, P. Olivero, M. Jakšić, J. Meijer, P. M. Genovese, and J. Forneris, “Single-Photon Emitters in Lead-Implanted Single-Crystal Diamond,” ACS Photonics 5(12), 4864–4871 (2018).
[Crossref]

Lau, D. W. M.

A. H. Piracha, K. Ganesan, D. W. M. Lau, A. Stacey, L. P. McGuinness, S. Tomljenovic-Hanic, and S. Prawer, “Scalable fabrication of high-quality, ultra-thin single crystal diamond membrane windows,” Nanoscale 8(12), 6860–6865 (2016).
[Crossref]

Lee, J. C.

J. C. Lee, I. Aharonovich, A. P. Magyar, F. Rol, and E. L. Hu, “Coupling of silicon-vacancy centers to a single crystal diamond cavity,” Opt. Express 20(8), 8891–8897 (2012).
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I. Aharonovich, J. C. Lee, A. P. Magyar, B. B. Buckley, C. G. Yale, D. D. Awschalom, and E. L. Hu, “Homoepitaxial Growth of Single Crystal Diamond Membranes for Quantum Information Processing,” Adv. Mater. 24(10), OP54–OP59 (2012).
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A. Magyar, J. C. Lee, A. M. Limarga, I. Aharonovich, F. Rol, D. R. Clarke, M. B. Huang, and E. L. Hu, “Fabrication of Thin, Luminescent, Single-crystal Diamond Membranes,” Appl. Phys. Lett. 99(8), 081913 (2011).
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Lee, S.-Y.

M. Atatüre, D. Englund, N. Vamivakas, S.-Y. Lee, and J. Wrachtrup, “Material platforms for spin-based photonic quantum technologies,” Nat. Rev. Mater. 3(5), 38–51 (2018).
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Lenzini, F.

F. Lenzini, N. Gruhler, N. Walter, and W. H. P. Pernice, “Diamond as a Platform for Integrated Quantum Photonics,” Adv. Quantum Technol. 1(3), 1800061 (2018).
[Crossref]

Li, L.

Li, X.

M. J. Crane, A. Petrone, R. A. Beck, M. B. Lim, X. Zhou, X. Li, R. M. Stroud, and P. J. Pauzauskie, “High-pressure, high-temperature molecular doping of nanodiamond,” Sci. Adv. 5(5), eaau6073 (2019).
[Crossref]

Lienhard, B.

M. E. Trusheim, B. Pingault, N. H. Wan, M. Gundogan, L. de Santis, K. C. Chen, M. Walsh, J. Rose, J. N. Becker, B. Lienhard, E. Bersin, G. Malladi, D. Lyzwa, H. Bakhru, I. Walmsley, M. Atature, and D. Englund, “Transform-limited photons from a tin-vacancy spin in diamond”, https://arxiv.org/abs/1811.07777 , (2019).

Lim, M. B.

M. J. Crane, A. Petrone, R. A. Beck, M. B. Lim, X. Zhou, X. Li, R. M. Stroud, and P. J. Pauzauskie, “High-pressure, high-temperature molecular doping of nanodiamond,” Sci. Adv. 5(5), eaau6073 (2019).
[Crossref]

Limarga, A. M.

A. Magyar, J. C. Lee, A. M. Limarga, I. Aharonovich, F. Rol, D. R. Clarke, M. B. Huang, and E. L. Hu, “Fabrication of Thin, Luminescent, Single-crystal Diamond Membranes,” Appl. Phys. Lett. 99(8), 081913 (2011).
[Crossref]

Lühmann, T.

S. Ditalia Tchernij, T. Lühmann, T. Herzig, J. Küpper, A. Damin, S. Santonocito, M. Signorile, P. Traina, E. Moreva, F. Celegato, S. Pezzagna, I. P. Degiovanni, P. Olivero, M. Jakšić, J. Meijer, P. M. Genovese, and J. Forneris, “Single-Photon Emitters in Lead-Implanted Single-Crystal Diamond,” ACS Photonics 5(12), 4864–4871 (2018).
[Crossref]

Lyzwa, D.

M. E. Trusheim, B. Pingault, N. H. Wan, M. Gundogan, L. de Santis, K. C. Chen, M. Walsh, J. Rose, J. N. Becker, B. Lienhard, E. Bersin, G. Malladi, D. Lyzwa, H. Bakhru, I. Walmsley, M. Atature, and D. Englund, “Transform-limited photons from a tin-vacancy spin in diamond”, https://arxiv.org/abs/1811.07777 , (2019).

Madgwick, T. D.

R. S. Balmer, J. R. Brandon, S. L. Clewes, H. K. Dhillon, J. M. Dodson, I. Friel, P. N. Inglis, T. D. Madgwick, M. L. Markham, T. P. Mollart, N. Perkins, G. A. Scarsbrook, D. J. Twitchen, A. J. Whitehead, J. J. Wilman, and S. M. Woollard, “Chemical vapour deposition synthetic diamond: materials, technology and applications,” J. Phys.: Condens. Matter 21(36), 364221 (2009).
[Crossref]

Magyar, A.

A. Magyar, J. C. Lee, A. M. Limarga, I. Aharonovich, F. Rol, D. R. Clarke, M. B. Huang, and E. L. Hu, “Fabrication of Thin, Luminescent, Single-crystal Diamond Membranes,” Appl. Phys. Lett. 99(8), 081913 (2011).
[Crossref]

Magyar, A. P.

K. Bray, H. Kato, R. Previdi, R. Sandstrom, K. Ganesan, M. Ogura, T. Makino, S. Yamasaki, A. P. Magyar, M. Toth, and I. Aharonovich, “Single crystal diamond membranes for nanoelectronics,” Nanoscale 10(8), 4028–4035 (2018).
[Crossref]

I. Aharonovich, J. C. Lee, A. P. Magyar, B. B. Buckley, C. G. Yale, D. D. Awschalom, and E. L. Hu, “Homoepitaxial Growth of Single Crystal Diamond Membranes for Quantum Information Processing,” Adv. Mater. 24(10), OP54–OP59 (2012).
[Crossref]

J. C. Lee, I. Aharonovich, A. P. Magyar, F. Rol, and E. L. Hu, “Coupling of silicon-vacancy centers to a single crystal diamond cavity,” Opt. Express 20(8), 8891–8897 (2012).
[Crossref]

Makino, T.

K. Bray, H. Kato, R. Previdi, R. Sandstrom, K. Ganesan, M. Ogura, T. Makino, S. Yamasaki, A. P. Magyar, M. Toth, and I. Aharonovich, “Single crystal diamond membranes for nanoelectronics,” Nanoscale 10(8), 4028–4035 (2018).
[Crossref]

Malladi, G.

M. E. Trusheim, B. Pingault, N. H. Wan, M. Gundogan, L. de Santis, K. C. Chen, M. Walsh, J. Rose, J. N. Becker, B. Lienhard, E. Bersin, G. Malladi, D. Lyzwa, H. Bakhru, I. Walmsley, M. Atature, and D. Englund, “Transform-limited photons from a tin-vacancy spin in diamond”, https://arxiv.org/abs/1811.07777 , (2019).

Markham, M. L.

R. S. Balmer, J. R. Brandon, S. L. Clewes, H. K. Dhillon, J. M. Dodson, I. Friel, P. N. Inglis, T. D. Madgwick, M. L. Markham, T. P. Mollart, N. Perkins, G. A. Scarsbrook, D. J. Twitchen, A. J. Whitehead, J. J. Wilman, and S. M. Woollard, “Chemical vapour deposition synthetic diamond: materials, technology and applications,” J. Phys.: Condens. Matter 21(36), 364221 (2009).
[Crossref]

Martyanov, A.

V. Sedov, A. Martyanov, S. Savin, A. Bolshakov, E. Bushuev, A. Khomich, O. Kudryavtsev, V. Krivobok, S. Nikolaev, and V. Ralchenko, “Growth of polycrystalline and single-crystal CVD diamonds with bright photoluminescence of Ge-V color centers using germane GeH4 as the dopant source,” Diamond Relat. Mater. 90, 47–53 (2018).
[Crossref]

McGuinness, L. P.

A. H. Piracha, K. Ganesan, D. W. M. Lau, A. Stacey, L. P. McGuinness, S. Tomljenovic-Hanic, and S. Prawer, “Scalable fabrication of high-quality, ultra-thin single crystal diamond membrane windows,” Nanoscale 8(12), 6860–6865 (2016).
[Crossref]

Meijer, J.

S. Ditalia Tchernij, T. Lühmann, T. Herzig, J. Küpper, A. Damin, S. Santonocito, M. Signorile, P. Traina, E. Moreva, F. Celegato, S. Pezzagna, I. P. Degiovanni, P. Olivero, M. Jakšić, J. Meijer, P. M. Genovese, and J. Forneris, “Single-Photon Emitters in Lead-Implanted Single-Crystal Diamond,” ACS Photonics 5(12), 4864–4871 (2018).
[Crossref]

Metsch, M. H.

T. Iwasaki, Y. Miyamoto, T. Taniguchi, P. Siyushev, M. H. Metsch, F. Jelezko, and M. Hatano, “Tin-Vacancy Quantum Emitters in Diamond,” Phys. Rev. Lett. 119(25), 253601 (2017).
[Crossref]

Miyamoto, Y.

T. Iwasaki, Y. Miyamoto, T. Taniguchi, P. Siyushev, M. H. Metsch, F. Jelezko, and M. Hatano, “Tin-Vacancy Quantum Emitters in Diamond,” Phys. Rev. Lett. 119(25), 253601 (2017).
[Crossref]

T. Iwasaki, F. Ishibashi, Y. Miyamoto, Y. Doi, S. Kobayashi, T. Miyazaki, K. Tahara, K. D. Jahnke, L. J. Rogers, B. Naydenov, F. Jelezko, S. Yamasaki, S. Nagamachi, T. Inubushi, N. Mizuochi, and M. Hatano, “Germanium-Vacancy Single Color Centers in Diamond,” Sci. Rep. 5(1), 12882 (2015).
[Crossref]

Miyazaki, T.

T. Iwasaki, F. Ishibashi, Y. Miyamoto, Y. Doi, S. Kobayashi, T. Miyazaki, K. Tahara, K. D. Jahnke, L. J. Rogers, B. Naydenov, F. Jelezko, S. Yamasaki, S. Nagamachi, T. Inubushi, N. Mizuochi, and M. Hatano, “Germanium-Vacancy Single Color Centers in Diamond,” Sci. Rep. 5(1), 12882 (2015).
[Crossref]

Mizuochi, N.

T. Iwasaki, F. Ishibashi, Y. Miyamoto, Y. Doi, S. Kobayashi, T. Miyazaki, K. Tahara, K. D. Jahnke, L. J. Rogers, B. Naydenov, F. Jelezko, S. Yamasaki, S. Nagamachi, T. Inubushi, N. Mizuochi, and M. Hatano, “Germanium-Vacancy Single Color Centers in Diamond,” Sci. Rep. 5(1), 12882 (2015).
[Crossref]

Mollart, T. P.

R. S. Balmer, J. R. Brandon, S. L. Clewes, H. K. Dhillon, J. M. Dodson, I. Friel, P. N. Inglis, T. D. Madgwick, M. L. Markham, T. P. Mollart, N. Perkins, G. A. Scarsbrook, D. J. Twitchen, A. J. Whitehead, J. J. Wilman, and S. M. Woollard, “Chemical vapour deposition synthetic diamond: materials, technology and applications,” J. Phys.: Condens. Matter 21(36), 364221 (2009).
[Crossref]

Moreva, E.

S. Ditalia Tchernij, T. Lühmann, T. Herzig, J. Küpper, A. Damin, S. Santonocito, M. Signorile, P. Traina, E. Moreva, F. Celegato, S. Pezzagna, I. P. Degiovanni, P. Olivero, M. Jakšić, J. Meijer, P. M. Genovese, and J. Forneris, “Single-Photon Emitters in Lead-Implanted Single-Crystal Diamond,” ACS Photonics 5(12), 4864–4871 (2018).
[Crossref]

Mouradian, S. L.

Nagamachi, S.

T. Iwasaki, F. Ishibashi, Y. Miyamoto, Y. Doi, S. Kobayashi, T. Miyazaki, K. Tahara, K. D. Jahnke, L. J. Rogers, B. Naydenov, F. Jelezko, S. Yamasaki, S. Nagamachi, T. Inubushi, N. Mizuochi, and M. Hatano, “Germanium-Vacancy Single Color Centers in Diamond,” Sci. Rep. 5(1), 12882 (2015).
[Crossref]

Naydenov, B.

T. Iwasaki, F. Ishibashi, Y. Miyamoto, Y. Doi, S. Kobayashi, T. Miyazaki, K. Tahara, K. D. Jahnke, L. J. Rogers, B. Naydenov, F. Jelezko, S. Yamasaki, S. Nagamachi, T. Inubushi, N. Mizuochi, and M. Hatano, “Germanium-Vacancy Single Color Centers in Diamond,” Sci. Rep. 5(1), 12882 (2015).
[Crossref]

Neu, E.

I. Aharonovich and E. Neu, “Diamond Nanophotonics,” Adv. Opt. Mater. 2(10), 911–928 (2014).
[Crossref]

Nikolaev, S.

V. Sedov, A. Martyanov, S. Savin, A. Bolshakov, E. Bushuev, A. Khomich, O. Kudryavtsev, V. Krivobok, S. Nikolaev, and V. Ralchenko, “Growth of polycrystalline and single-crystal CVD diamonds with bright photoluminescence of Ge-V color centers using germane GeH4 as the dopant source,” Diamond Relat. Mater. 90, 47–53 (2018).
[Crossref]

Ogura, M.

K. Bray, H. Kato, R. Previdi, R. Sandstrom, K. Ganesan, M. Ogura, T. Makino, S. Yamasaki, A. P. Magyar, M. Toth, and I. Aharonovich, “Single crystal diamond membranes for nanoelectronics,” Nanoscale 10(8), 4028–4035 (2018).
[Crossref]

Olivero, P.

S. M. Eaton, J. P. Hadden, V. Bharadwaj, J. Forneris, F. Picollo, F. Bosia, B. Sotillo, A. N. Giakoumaki, O. Jedrkiewicz, A. Chiappini, M. Ferrari, R. Osellame, P. E. Barclay, P. Olivero, and R. Ramponi, “Quantum Micro–Nano Devices Fabricated in Diamond by Femtosecond Laser and Ion Irradiation (Adv. Quantum Technol. 5-6/2019),” Adv. Quantum Technol. 2(5-6), 1970033 (2019).
[Crossref]

S. Ditalia Tchernij, T. Lühmann, T. Herzig, J. Küpper, A. Damin, S. Santonocito, M. Signorile, P. Traina, E. Moreva, F. Celegato, S. Pezzagna, I. P. Degiovanni, P. Olivero, M. Jakšić, J. Meijer, P. M. Genovese, and J. Forneris, “Single-Photon Emitters in Lead-Implanted Single-Crystal Diamond,” ACS Photonics 5(12), 4864–4871 (2018).
[Crossref]

Osellame, R.

S. M. Eaton, J. P. Hadden, V. Bharadwaj, J. Forneris, F. Picollo, F. Bosia, B. Sotillo, A. N. Giakoumaki, O. Jedrkiewicz, A. Chiappini, M. Ferrari, R. Osellame, P. E. Barclay, P. Olivero, and R. Ramponi, “Quantum Micro–Nano Devices Fabricated in Diamond by Femtosecond Laser and Ion Irradiation (Adv. Quantum Technol. 5-6/2019),” Adv. Quantum Technol. 2(5-6), 1970033 (2019).
[Crossref]

Pauzauskie, P. J.

M. J. Crane, A. Petrone, R. A. Beck, M. B. Lim, X. Zhou, X. Li, R. M. Stroud, and P. J. Pauzauskie, “High-pressure, high-temperature molecular doping of nanodiamond,” Sci. Adv. 5(5), eaau6073 (2019).
[Crossref]

Perkins, N.

R. S. Balmer, J. R. Brandon, S. L. Clewes, H. K. Dhillon, J. M. Dodson, I. Friel, P. N. Inglis, T. D. Madgwick, M. L. Markham, T. P. Mollart, N. Perkins, G. A. Scarsbrook, D. J. Twitchen, A. J. Whitehead, J. J. Wilman, and S. M. Woollard, “Chemical vapour deposition synthetic diamond: materials, technology and applications,” J. Phys.: Condens. Matter 21(36), 364221 (2009).
[Crossref]

Pernice, W. H. P.

F. Lenzini, N. Gruhler, N. Walter, and W. H. P. Pernice, “Diamond as a Platform for Integrated Quantum Photonics,” Adv. Quantum Technol. 1(3), 1800061 (2018).
[Crossref]

A. H. Piracha, P. Rath, K. Ganesan, S. Kühn, W. H. P. Pernice, and S. Prawer, “Scalable Fabrication of Integrated Nanophotonic Circuits on Arrays of Thin Single Crystal Diamond Membrane Windows,” Nano Lett. 16(5), 3341–3347 (2016).
[Crossref]

Petrone, A.

M. J. Crane, A. Petrone, R. A. Beck, M. B. Lim, X. Zhou, X. Li, R. M. Stroud, and P. J. Pauzauskie, “High-pressure, high-temperature molecular doping of nanodiamond,” Sci. Adv. 5(5), eaau6073 (2019).
[Crossref]

Pezzagna, S.

S. Ditalia Tchernij, T. Lühmann, T. Herzig, J. Küpper, A. Damin, S. Santonocito, M. Signorile, P. Traina, E. Moreva, F. Celegato, S. Pezzagna, I. P. Degiovanni, P. Olivero, M. Jakšić, J. Meijer, P. M. Genovese, and J. Forneris, “Single-Photon Emitters in Lead-Implanted Single-Crystal Diamond,” ACS Photonics 5(12), 4864–4871 (2018).
[Crossref]

Picollo, F.

S. M. Eaton, J. P. Hadden, V. Bharadwaj, J. Forneris, F. Picollo, F. Bosia, B. Sotillo, A. N. Giakoumaki, O. Jedrkiewicz, A. Chiappini, M. Ferrari, R. Osellame, P. E. Barclay, P. Olivero, and R. Ramponi, “Quantum Micro–Nano Devices Fabricated in Diamond by Femtosecond Laser and Ion Irradiation (Adv. Quantum Technol. 5-6/2019),” Adv. Quantum Technol. 2(5-6), 1970033 (2019).
[Crossref]

Pingault, B.

M. E. Trusheim, B. Pingault, N. H. Wan, M. Gundogan, L. de Santis, K. C. Chen, M. Walsh, J. Rose, J. N. Becker, B. Lienhard, E. Bersin, G. Malladi, D. Lyzwa, H. Bakhru, I. Walmsley, M. Atature, and D. Englund, “Transform-limited photons from a tin-vacancy spin in diamond”, https://arxiv.org/abs/1811.07777 , (2019).

Piracha, A. H.

A. H. Piracha, P. Rath, K. Ganesan, S. Kühn, W. H. P. Pernice, and S. Prawer, “Scalable Fabrication of Integrated Nanophotonic Circuits on Arrays of Thin Single Crystal Diamond Membrane Windows,” Nano Lett. 16(5), 3341–3347 (2016).
[Crossref]

A. H. Piracha, K. Ganesan, D. W. M. Lau, A. Stacey, L. P. McGuinness, S. Tomljenovic-Hanic, and S. Prawer, “Scalable fabrication of high-quality, ultra-thin single crystal diamond membrane windows,” Nanoscale 8(12), 6860–6865 (2016).
[Crossref]

Prawer, S.

A. H. Piracha, K. Ganesan, D. W. M. Lau, A. Stacey, L. P. McGuinness, S. Tomljenovic-Hanic, and S. Prawer, “Scalable fabrication of high-quality, ultra-thin single crystal diamond membrane windows,” Nanoscale 8(12), 6860–6865 (2016).
[Crossref]

A. H. Piracha, P. Rath, K. Ganesan, S. Kühn, W. H. P. Pernice, and S. Prawer, “Scalable Fabrication of Integrated Nanophotonic Circuits on Arrays of Thin Single Crystal Diamond Membrane Windows,” Nano Lett. 16(5), 3341–3347 (2016).
[Crossref]

Previdi, R.

K. Bray, B. Regan, A. Trycz, R. Previdi, G. Seniutinas, K. Ganesan, M. Kianinia, S. Kim, and I. Aharonovich, “Single Crystal Diamond Membranes and Photonic Resonators Containing Germanium Vacancy Color Centers,” ACS Photonics 5(12), 4817–4822 (2018).
[Crossref]

K. Bray, H. Kato, R. Previdi, R. Sandstrom, K. Ganesan, M. Ogura, T. Makino, S. Yamasaki, A. P. Magyar, M. Toth, and I. Aharonovich, “Single crystal diamond membranes for nanoelectronics,” Nanoscale 10(8), 4028–4035 (2018).
[Crossref]

Ralchenko, V.

V. Sedov, A. Martyanov, S. Savin, A. Bolshakov, E. Bushuev, A. Khomich, O. Kudryavtsev, V. Krivobok, S. Nikolaev, and V. Ralchenko, “Growth of polycrystalline and single-crystal CVD diamonds with bright photoluminescence of Ge-V color centers using germane GeH4 as the dopant source,” Diamond Relat. Mater. 90, 47–53 (2018).
[Crossref]

Ramponi, R.

S. M. Eaton, J. P. Hadden, V. Bharadwaj, J. Forneris, F. Picollo, F. Bosia, B. Sotillo, A. N. Giakoumaki, O. Jedrkiewicz, A. Chiappini, M. Ferrari, R. Osellame, P. E. Barclay, P. Olivero, and R. Ramponi, “Quantum Micro–Nano Devices Fabricated in Diamond by Femtosecond Laser and Ion Irradiation (Adv. Quantum Technol. 5-6/2019),” Adv. Quantum Technol. 2(5-6), 1970033 (2019).
[Crossref]

Rath, P.

A. H. Piracha, P. Rath, K. Ganesan, S. Kühn, W. H. P. Pernice, and S. Prawer, “Scalable Fabrication of Integrated Nanophotonic Circuits on Arrays of Thin Single Crystal Diamond Membrane Windows,” Nano Lett. 16(5), 3341–3347 (2016).
[Crossref]

Regan, B.

S. Häußler, J. Benedikter, K. Bray, B. Regan, A. Dietrich, J. Twamley, I. Aharonovich, D. Hunger, and A. Kubanek, “Diamond photonics platform based on silicon vacancy centers in a single-crystal diamond membrane and a fiber cavity,” Phys. Rev. B 99(16), 165310 (2019).
[Crossref]

K. Bray, B. Regan, A. Trycz, R. Previdi, G. Seniutinas, K. Ganesan, M. Kianinia, S. Kim, and I. Aharonovich, “Single Crystal Diamond Membranes and Photonic Resonators Containing Germanium Vacancy Color Centers,” ACS Photonics 5(12), 4817–4822 (2018).
[Crossref]

Rogers, L. J.

T. Iwasaki, F. Ishibashi, Y. Miyamoto, Y. Doi, S. Kobayashi, T. Miyazaki, K. Tahara, K. D. Jahnke, L. J. Rogers, B. Naydenov, F. Jelezko, S. Yamasaki, S. Nagamachi, T. Inubushi, N. Mizuochi, and M. Hatano, “Germanium-Vacancy Single Color Centers in Diamond,” Sci. Rep. 5(1), 12882 (2015).
[Crossref]

Rol, F.

J. C. Lee, I. Aharonovich, A. P. Magyar, F. Rol, and E. L. Hu, “Coupling of silicon-vacancy centers to a single crystal diamond cavity,” Opt. Express 20(8), 8891–8897 (2012).
[Crossref]

A. Magyar, J. C. Lee, A. M. Limarga, I. Aharonovich, F. Rol, D. R. Clarke, M. B. Huang, and E. L. Hu, “Fabrication of Thin, Luminescent, Single-crystal Diamond Membranes,” Appl. Phys. Lett. 99(8), 081913 (2011).
[Crossref]

Rose, J.

M. E. Trusheim, B. Pingault, N. H. Wan, M. Gundogan, L. de Santis, K. C. Chen, M. Walsh, J. Rose, J. N. Becker, B. Lienhard, E. Bersin, G. Malladi, D. Lyzwa, H. Bakhru, I. Walmsley, M. Atature, and D. Englund, “Transform-limited photons from a tin-vacancy spin in diamond”, https://arxiv.org/abs/1811.07777 , (2019).

Rugar, A. E.

A. E. Rugar, C. Dory, S. Sun, and J. Vučković, “Characterization of optical and spin properties of single tin-vacancy centers in diamond nanopillars,” Phys. Rev. B 99(20), 205417 (2019).
[Crossref]

Sandstrom, R.

K. Bray, H. Kato, R. Previdi, R. Sandstrom, K. Ganesan, M. Ogura, T. Makino, S. Yamasaki, A. P. Magyar, M. Toth, and I. Aharonovich, “Single crystal diamond membranes for nanoelectronics,” Nanoscale 10(8), 4028–4035 (2018).
[Crossref]

Santonocito, S.

S. Ditalia Tchernij, T. Lühmann, T. Herzig, J. Küpper, A. Damin, S. Santonocito, M. Signorile, P. Traina, E. Moreva, F. Celegato, S. Pezzagna, I. P. Degiovanni, P. Olivero, M. Jakšić, J. Meijer, P. M. Genovese, and J. Forneris, “Single-Photon Emitters in Lead-Implanted Single-Crystal Diamond,” ACS Photonics 5(12), 4864–4871 (2018).
[Crossref]

Savin, S.

V. Sedov, A. Martyanov, S. Savin, A. Bolshakov, E. Bushuev, A. Khomich, O. Kudryavtsev, V. Krivobok, S. Nikolaev, and V. Ralchenko, “Growth of polycrystalline and single-crystal CVD diamonds with bright photoluminescence of Ge-V color centers using germane GeH4 as the dopant source,” Diamond Relat. Mater. 90, 47–53 (2018).
[Crossref]

Scarsbrook, G. A.

R. S. Balmer, J. R. Brandon, S. L. Clewes, H. K. Dhillon, J. M. Dodson, I. Friel, P. N. Inglis, T. D. Madgwick, M. L. Markham, T. P. Mollart, N. Perkins, G. A. Scarsbrook, D. J. Twitchen, A. J. Whitehead, J. J. Wilman, and S. M. Woollard, “Chemical vapour deposition synthetic diamond: materials, technology and applications,” J. Phys.: Condens. Matter 21(36), 364221 (2009).
[Crossref]

Schröder, T.

Sedov, V.

V. Sedov, A. Martyanov, S. Savin, A. Bolshakov, E. Bushuev, A. Khomich, O. Kudryavtsev, V. Krivobok, S. Nikolaev, and V. Ralchenko, “Growth of polycrystalline and single-crystal CVD diamonds with bright photoluminescence of Ge-V color centers using germane GeH4 as the dopant source,” Diamond Relat. Mater. 90, 47–53 (2018).
[Crossref]

Seniutinas, G.

K. Bray, B. Regan, A. Trycz, R. Previdi, G. Seniutinas, K. Ganesan, M. Kianinia, S. Kim, and I. Aharonovich, “Single Crystal Diamond Membranes and Photonic Resonators Containing Germanium Vacancy Color Centers,” ACS Photonics 5(12), 4817–4822 (2018).
[Crossref]

Signorile, M.

S. Ditalia Tchernij, T. Lühmann, T. Herzig, J. Küpper, A. Damin, S. Santonocito, M. Signorile, P. Traina, E. Moreva, F. Celegato, S. Pezzagna, I. P. Degiovanni, P. Olivero, M. Jakšić, J. Meijer, P. M. Genovese, and J. Forneris, “Single-Photon Emitters in Lead-Implanted Single-Crystal Diamond,” ACS Photonics 5(12), 4864–4871 (2018).
[Crossref]

Siyushev, P.

T. Iwasaki, Y. Miyamoto, T. Taniguchi, P. Siyushev, M. H. Metsch, F. Jelezko, and M. Hatano, “Tin-Vacancy Quantum Emitters in Diamond,” Phys. Rev. Lett. 119(25), 253601 (2017).
[Crossref]

Sotillo, B.

S. M. Eaton, J. P. Hadden, V. Bharadwaj, J. Forneris, F. Picollo, F. Bosia, B. Sotillo, A. N. Giakoumaki, O. Jedrkiewicz, A. Chiappini, M. Ferrari, R. Osellame, P. E. Barclay, P. Olivero, and R. Ramponi, “Quantum Micro–Nano Devices Fabricated in Diamond by Femtosecond Laser and Ion Irradiation (Adv. Quantum Technol. 5-6/2019),” Adv. Quantum Technol. 2(5-6), 1970033 (2019).
[Crossref]

Stacey, A.

A. H. Piracha, K. Ganesan, D. W. M. Lau, A. Stacey, L. P. McGuinness, S. Tomljenovic-Hanic, and S. Prawer, “Scalable fabrication of high-quality, ultra-thin single crystal diamond membrane windows,” Nanoscale 8(12), 6860–6865 (2016).
[Crossref]

Stroud, R. M.

M. J. Crane, A. Petrone, R. A. Beck, M. B. Lim, X. Zhou, X. Li, R. M. Stroud, and P. J. Pauzauskie, “High-pressure, high-temperature molecular doping of nanodiamond,” Sci. Adv. 5(5), eaau6073 (2019).
[Crossref]

Sun, S.

A. E. Rugar, C. Dory, S. Sun, and J. Vučković, “Characterization of optical and spin properties of single tin-vacancy centers in diamond nanopillars,” Phys. Rev. B 99(20), 205417 (2019).
[Crossref]

Tahara, K.

T. Iwasaki, F. Ishibashi, Y. Miyamoto, Y. Doi, S. Kobayashi, T. Miyazaki, K. Tahara, K. D. Jahnke, L. J. Rogers, B. Naydenov, F. Jelezko, S. Yamasaki, S. Nagamachi, T. Inubushi, N. Mizuochi, and M. Hatano, “Germanium-Vacancy Single Color Centers in Diamond,” Sci. Rep. 5(1), 12882 (2015).
[Crossref]

Taniguchi, T.

T. Iwasaki, Y. Miyamoto, T. Taniguchi, P. Siyushev, M. H. Metsch, F. Jelezko, and M. Hatano, “Tin-Vacancy Quantum Emitters in Diamond,” Phys. Rev. Lett. 119(25), 253601 (2017).
[Crossref]

Tomljenovic-Hanic, S.

A. H. Piracha, K. Ganesan, D. W. M. Lau, A. Stacey, L. P. McGuinness, S. Tomljenovic-Hanic, and S. Prawer, “Scalable fabrication of high-quality, ultra-thin single crystal diamond membrane windows,” Nanoscale 8(12), 6860–6865 (2016).
[Crossref]

Toth, M.

K. Bray, H. Kato, R. Previdi, R. Sandstrom, K. Ganesan, M. Ogura, T. Makino, S. Yamasaki, A. P. Magyar, M. Toth, and I. Aharonovich, “Single crystal diamond membranes for nanoelectronics,” Nanoscale 10(8), 4028–4035 (2018).
[Crossref]

Traina, P.

S. Ditalia Tchernij, T. Lühmann, T. Herzig, J. Küpper, A. Damin, S. Santonocito, M. Signorile, P. Traina, E. Moreva, F. Celegato, S. Pezzagna, I. P. Degiovanni, P. Olivero, M. Jakšić, J. Meijer, P. M. Genovese, and J. Forneris, “Single-Photon Emitters in Lead-Implanted Single-Crystal Diamond,” ACS Photonics 5(12), 4864–4871 (2018).
[Crossref]

Trusheim, M. E.

T. Schröder, S. L. Mouradian, J. Zheng, M. E. Trusheim, M. Walsh, E. H. Chen, L. Li, I. Bayn, and D. Englund, “Quantum nanophotonics in diamond [Invited],” J. Opt. Soc. Am. B 33(4), B65–B83 (2016).
[Crossref]

C. Bradac, W. B. Gao, J. Forneris, M. E. Trusheim, and I. Aharonovich, “Quantum Nanophotonics with Group IV defects in Diamond”, https://arxiv.org/abs/1906.10992 , (2019).

M. E. Trusheim, B. Pingault, N. H. Wan, M. Gundogan, L. de Santis, K. C. Chen, M. Walsh, J. Rose, J. N. Becker, B. Lienhard, E. Bersin, G. Malladi, D. Lyzwa, H. Bakhru, I. Walmsley, M. Atature, and D. Englund, “Transform-limited photons from a tin-vacancy spin in diamond”, https://arxiv.org/abs/1811.07777 , (2019).

Trycz, A.

K. Bray, B. Regan, A. Trycz, R. Previdi, G. Seniutinas, K. Ganesan, M. Kianinia, S. Kim, and I. Aharonovich, “Single Crystal Diamond Membranes and Photonic Resonators Containing Germanium Vacancy Color Centers,” ACS Photonics 5(12), 4817–4822 (2018).
[Crossref]

Twamley, J.

S. Häußler, J. Benedikter, K. Bray, B. Regan, A. Dietrich, J. Twamley, I. Aharonovich, D. Hunger, and A. Kubanek, “Diamond photonics platform based on silicon vacancy centers in a single-crystal diamond membrane and a fiber cavity,” Phys. Rev. B 99(16), 165310 (2019).
[Crossref]

Twitchen, D. J.

R. S. Balmer, J. R. Brandon, S. L. Clewes, H. K. Dhillon, J. M. Dodson, I. Friel, P. N. Inglis, T. D. Madgwick, M. L. Markham, T. P. Mollart, N. Perkins, G. A. Scarsbrook, D. J. Twitchen, A. J. Whitehead, J. J. Wilman, and S. M. Woollard, “Chemical vapour deposition synthetic diamond: materials, technology and applications,” J. Phys.: Condens. Matter 21(36), 364221 (2009).
[Crossref]

Vamivakas, N.

M. Atatüre, D. Englund, N. Vamivakas, S.-Y. Lee, and J. Wrachtrup, “Material platforms for spin-based photonic quantum technologies,” Nat. Rev. Mater. 3(5), 38–51 (2018).
[Crossref]

Vlasov, I. I.

E. A. Ekimov, M. V. Kondrin, V. S. Krivobok, A. A. Khomich, I. I. Vlasov, R. A. Khmelnitskiy, T. Iwasaki, and M. Hatano, “Effect of Si, Ge and Sn dopant elements on structure and photoluminescence of nano- and microdiamonds synthesized from organic compounds,” Diamond Relat. Mater. 93, 75–83 (2019).
[Crossref]

Vuckovic, J.

A. E. Rugar, C. Dory, S. Sun, and J. Vučković, “Characterization of optical and spin properties of single tin-vacancy centers in diamond nanopillars,” Phys. Rev. B 99(20), 205417 (2019).
[Crossref]

Walmsley, I.

M. E. Trusheim, B. Pingault, N. H. Wan, M. Gundogan, L. de Santis, K. C. Chen, M. Walsh, J. Rose, J. N. Becker, B. Lienhard, E. Bersin, G. Malladi, D. Lyzwa, H. Bakhru, I. Walmsley, M. Atature, and D. Englund, “Transform-limited photons from a tin-vacancy spin in diamond”, https://arxiv.org/abs/1811.07777 , (2019).

Walsh, M.

T. Schröder, S. L. Mouradian, J. Zheng, M. E. Trusheim, M. Walsh, E. H. Chen, L. Li, I. Bayn, and D. Englund, “Quantum nanophotonics in diamond [Invited],” J. Opt. Soc. Am. B 33(4), B65–B83 (2016).
[Crossref]

M. E. Trusheim, B. Pingault, N. H. Wan, M. Gundogan, L. de Santis, K. C. Chen, M. Walsh, J. Rose, J. N. Becker, B. Lienhard, E. Bersin, G. Malladi, D. Lyzwa, H. Bakhru, I. Walmsley, M. Atature, and D. Englund, “Transform-limited photons from a tin-vacancy spin in diamond”, https://arxiv.org/abs/1811.07777 , (2019).

Walter, N.

F. Lenzini, N. Gruhler, N. Walter, and W. H. P. Pernice, “Diamond as a Platform for Integrated Quantum Photonics,” Adv. Quantum Technol. 1(3), 1800061 (2018).
[Crossref]

Wan, N. H.

M. E. Trusheim, B. Pingault, N. H. Wan, M. Gundogan, L. de Santis, K. C. Chen, M. Walsh, J. Rose, J. N. Becker, B. Lienhard, E. Bersin, G. Malladi, D. Lyzwa, H. Bakhru, I. Walmsley, M. Atature, and D. Englund, “Transform-limited photons from a tin-vacancy spin in diamond”, https://arxiv.org/abs/1811.07777 , (2019).

Wehner, S.

S. Wehner, D. Elkouss, and R. Hanson, “Quantum internet: A vision for the road ahead,” Science 362(6412), eaam9288 (2018).
[Crossref]

Whitehead, A. J.

R. S. Balmer, J. R. Brandon, S. L. Clewes, H. K. Dhillon, J. M. Dodson, I. Friel, P. N. Inglis, T. D. Madgwick, M. L. Markham, T. P. Mollart, N. Perkins, G. A. Scarsbrook, D. J. Twitchen, A. J. Whitehead, J. J. Wilman, and S. M. Woollard, “Chemical vapour deposition synthetic diamond: materials, technology and applications,” J. Phys.: Condens. Matter 21(36), 364221 (2009).
[Crossref]

Wilman, J. J.

R. S. Balmer, J. R. Brandon, S. L. Clewes, H. K. Dhillon, J. M. Dodson, I. Friel, P. N. Inglis, T. D. Madgwick, M. L. Markham, T. P. Mollart, N. Perkins, G. A. Scarsbrook, D. J. Twitchen, A. J. Whitehead, J. J. Wilman, and S. M. Woollard, “Chemical vapour deposition synthetic diamond: materials, technology and applications,” J. Phys.: Condens. Matter 21(36), 364221 (2009).
[Crossref]

Woollard, S. M.

R. S. Balmer, J. R. Brandon, S. L. Clewes, H. K. Dhillon, J. M. Dodson, I. Friel, P. N. Inglis, T. D. Madgwick, M. L. Markham, T. P. Mollart, N. Perkins, G. A. Scarsbrook, D. J. Twitchen, A. J. Whitehead, J. J. Wilman, and S. M. Woollard, “Chemical vapour deposition synthetic diamond: materials, technology and applications,” J. Phys.: Condens. Matter 21(36), 364221 (2009).
[Crossref]

Wrachtrup, J.

D. D. Awschalom, R. Hanson, J. Wrachtrup, and B. B. Zhou, “Quantum technologies with optically interfaced solid-state spins,” Nat. Photonics 12(9), 516–527 (2018).
[Crossref]

M. Atatüre, D. Englund, N. Vamivakas, S.-Y. Lee, and J. Wrachtrup, “Material platforms for spin-based photonic quantum technologies,” Nat. Rev. Mater. 3(5), 38–51 (2018).
[Crossref]

Yale, C. G.

I. Aharonovich, J. C. Lee, A. P. Magyar, B. B. Buckley, C. G. Yale, D. D. Awschalom, and E. L. Hu, “Homoepitaxial Growth of Single Crystal Diamond Membranes for Quantum Information Processing,” Adv. Mater. 24(10), OP54–OP59 (2012).
[Crossref]

Yamasaki, S.

K. Bray, H. Kato, R. Previdi, R. Sandstrom, K. Ganesan, M. Ogura, T. Makino, S. Yamasaki, A. P. Magyar, M. Toth, and I. Aharonovich, “Single crystal diamond membranes for nanoelectronics,” Nanoscale 10(8), 4028–4035 (2018).
[Crossref]

T. Iwasaki, F. Ishibashi, Y. Miyamoto, Y. Doi, S. Kobayashi, T. Miyazaki, K. Tahara, K. D. Jahnke, L. J. Rogers, B. Naydenov, F. Jelezko, S. Yamasaki, S. Nagamachi, T. Inubushi, N. Mizuochi, and M. Hatano, “Germanium-Vacancy Single Color Centers in Diamond,” Sci. Rep. 5(1), 12882 (2015).
[Crossref]

Zheng, J.

Zhou, B. B.

D. D. Awschalom, R. Hanson, J. Wrachtrup, and B. B. Zhou, “Quantum technologies with optically interfaced solid-state spins,” Nat. Photonics 12(9), 516–527 (2018).
[Crossref]

Zhou, X.

M. J. Crane, A. Petrone, R. A. Beck, M. B. Lim, X. Zhou, X. Li, R. M. Stroud, and P. J. Pauzauskie, “High-pressure, high-temperature molecular doping of nanodiamond,” Sci. Adv. 5(5), eaau6073 (2019).
[Crossref]

ACS Photonics (2)

K. Bray, B. Regan, A. Trycz, R. Previdi, G. Seniutinas, K. Ganesan, M. Kianinia, S. Kim, and I. Aharonovich, “Single Crystal Diamond Membranes and Photonic Resonators Containing Germanium Vacancy Color Centers,” ACS Photonics 5(12), 4817–4822 (2018).
[Crossref]

S. Ditalia Tchernij, T. Lühmann, T. Herzig, J. Küpper, A. Damin, S. Santonocito, M. Signorile, P. Traina, E. Moreva, F. Celegato, S. Pezzagna, I. P. Degiovanni, P. Olivero, M. Jakšić, J. Meijer, P. M. Genovese, and J. Forneris, “Single-Photon Emitters in Lead-Implanted Single-Crystal Diamond,” ACS Photonics 5(12), 4864–4871 (2018).
[Crossref]

Adv. Mater. (1)

I. Aharonovich, J. C. Lee, A. P. Magyar, B. B. Buckley, C. G. Yale, D. D. Awschalom, and E. L. Hu, “Homoepitaxial Growth of Single Crystal Diamond Membranes for Quantum Information Processing,” Adv. Mater. 24(10), OP54–OP59 (2012).
[Crossref]

Adv. Opt. Mater. (1)

I. Aharonovich and E. Neu, “Diamond Nanophotonics,” Adv. Opt. Mater. 2(10), 911–928 (2014).
[Crossref]

Adv. Quantum Technol. (2)

F. Lenzini, N. Gruhler, N. Walter, and W. H. P. Pernice, “Diamond as a Platform for Integrated Quantum Photonics,” Adv. Quantum Technol. 1(3), 1800061 (2018).
[Crossref]

S. M. Eaton, J. P. Hadden, V. Bharadwaj, J. Forneris, F. Picollo, F. Bosia, B. Sotillo, A. N. Giakoumaki, O. Jedrkiewicz, A. Chiappini, M. Ferrari, R. Osellame, P. E. Barclay, P. Olivero, and R. Ramponi, “Quantum Micro–Nano Devices Fabricated in Diamond by Femtosecond Laser and Ion Irradiation (Adv. Quantum Technol. 5-6/2019),” Adv. Quantum Technol. 2(5-6), 1970033 (2019).
[Crossref]

Appl. Phys. Lett. (1)

A. Magyar, J. C. Lee, A. M. Limarga, I. Aharonovich, F. Rol, D. R. Clarke, M. B. Huang, and E. L. Hu, “Fabrication of Thin, Luminescent, Single-crystal Diamond Membranes,” Appl. Phys. Lett. 99(8), 081913 (2011).
[Crossref]

Diamond Relat. Mater. (2)

E. A. Ekimov, M. V. Kondrin, V. S. Krivobok, A. A. Khomich, I. I. Vlasov, R. A. Khmelnitskiy, T. Iwasaki, and M. Hatano, “Effect of Si, Ge and Sn dopant elements on structure and photoluminescence of nano- and microdiamonds synthesized from organic compounds,” Diamond Relat. Mater. 93, 75–83 (2019).
[Crossref]

V. Sedov, A. Martyanov, S. Savin, A. Bolshakov, E. Bushuev, A. Khomich, O. Kudryavtsev, V. Krivobok, S. Nikolaev, and V. Ralchenko, “Growth of polycrystalline and single-crystal CVD diamonds with bright photoluminescence of Ge-V color centers using germane GeH4 as the dopant source,” Diamond Relat. Mater. 90, 47–53 (2018).
[Crossref]

J. Opt. Soc. Am. B (1)

J. Phys.: Condens. Matter (1)

R. S. Balmer, J. R. Brandon, S. L. Clewes, H. K. Dhillon, J. M. Dodson, I. Friel, P. N. Inglis, T. D. Madgwick, M. L. Markham, T. P. Mollart, N. Perkins, G. A. Scarsbrook, D. J. Twitchen, A. J. Whitehead, J. J. Wilman, and S. M. Woollard, “Chemical vapour deposition synthetic diamond: materials, technology and applications,” J. Phys.: Condens. Matter 21(36), 364221 (2009).
[Crossref]

Nano Lett. (1)

A. H. Piracha, P. Rath, K. Ganesan, S. Kühn, W. H. P. Pernice, and S. Prawer, “Scalable Fabrication of Integrated Nanophotonic Circuits on Arrays of Thin Single Crystal Diamond Membrane Windows,” Nano Lett. 16(5), 3341–3347 (2016).
[Crossref]

Nanoscale (2)

A. H. Piracha, K. Ganesan, D. W. M. Lau, A. Stacey, L. P. McGuinness, S. Tomljenovic-Hanic, and S. Prawer, “Scalable fabrication of high-quality, ultra-thin single crystal diamond membrane windows,” Nanoscale 8(12), 6860–6865 (2016).
[Crossref]

K. Bray, H. Kato, R. Previdi, R. Sandstrom, K. Ganesan, M. Ogura, T. Makino, S. Yamasaki, A. P. Magyar, M. Toth, and I. Aharonovich, “Single crystal diamond membranes for nanoelectronics,” Nanoscale 10(8), 4028–4035 (2018).
[Crossref]

Nat. Photonics (1)

D. D. Awschalom, R. Hanson, J. Wrachtrup, and B. B. Zhou, “Quantum technologies with optically interfaced solid-state spins,” Nat. Photonics 12(9), 516–527 (2018).
[Crossref]

Nat. Rev. Mater. (1)

M. Atatüre, D. Englund, N. Vamivakas, S.-Y. Lee, and J. Wrachtrup, “Material platforms for spin-based photonic quantum technologies,” Nat. Rev. Mater. 3(5), 38–51 (2018).
[Crossref]

Opt. Express (1)

Phys. Rev. B (2)

A. E. Rugar, C. Dory, S. Sun, and J. Vučković, “Characterization of optical and spin properties of single tin-vacancy centers in diamond nanopillars,” Phys. Rev. B 99(20), 205417 (2019).
[Crossref]

S. Häußler, J. Benedikter, K. Bray, B. Regan, A. Dietrich, J. Twamley, I. Aharonovich, D. Hunger, and A. Kubanek, “Diamond photonics platform based on silicon vacancy centers in a single-crystal diamond membrane and a fiber cavity,” Phys. Rev. B 99(16), 165310 (2019).
[Crossref]

Phys. Rev. Lett. (1)

T. Iwasaki, Y. Miyamoto, T. Taniguchi, P. Siyushev, M. H. Metsch, F. Jelezko, and M. Hatano, “Tin-Vacancy Quantum Emitters in Diamond,” Phys. Rev. Lett. 119(25), 253601 (2017).
[Crossref]

Sci. Adv. (1)

M. J. Crane, A. Petrone, R. A. Beck, M. B. Lim, X. Zhou, X. Li, R. M. Stroud, and P. J. Pauzauskie, “High-pressure, high-temperature molecular doping of nanodiamond,” Sci. Adv. 5(5), eaau6073 (2019).
[Crossref]

Sci. Rep. (1)

T. Iwasaki, F. Ishibashi, Y. Miyamoto, Y. Doi, S. Kobayashi, T. Miyazaki, K. Tahara, K. D. Jahnke, L. J. Rogers, B. Naydenov, F. Jelezko, S. Yamasaki, S. Nagamachi, T. Inubushi, N. Mizuochi, and M. Hatano, “Germanium-Vacancy Single Color Centers in Diamond,” Sci. Rep. 5(1), 12882 (2015).
[Crossref]

Science (1)

S. Wehner, D. Elkouss, and R. Hanson, “Quantum internet: A vision for the road ahead,” Science 362(6412), eaam9288 (2018).
[Crossref]

Other (2)

M. E. Trusheim, B. Pingault, N. H. Wan, M. Gundogan, L. de Santis, K. C. Chen, M. Walsh, J. Rose, J. N. Becker, B. Lienhard, E. Bersin, G. Malladi, D. Lyzwa, H. Bakhru, I. Walmsley, M. Atature, and D. Englund, “Transform-limited photons from a tin-vacancy spin in diamond”, https://arxiv.org/abs/1811.07777 , (2019).

C. Bradac, W. B. Gao, J. Forneris, M. E. Trusheim, and I. Aharonovich, “Quantum Nanophotonics with Group IV defects in Diamond”, https://arxiv.org/abs/1906.10992 , (2019).

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Figures (5)

Fig. 1.
Fig. 1. a) Incorporation of Germanium during MPCVD growth of diamond. The precursors are dissociated in the plasma region, creating active species which will eventually incorporate into the growing diamond. b) Representative SEM image of a thick 1.7 µm and c) a thin diamond membrane ∼ 300 nm.
Fig. 2.
Fig. 2. Incorporation of GeV using metallic source. a) Schematic of the growth geometry of the diamond membrane and metallic sources. Inset, is the actual photograph of the puck with diameter of ∼ 1 inch. b) Optical and c) SEM images of the membrane after overgrowth process in MPCVD. Visible square areas in SEM image is the result of secondary nucleation from micromasking with sputtered germanium during the growth. d) PL spectrum from the membrane after overgrowth did not show any peak at ∼602 nm from GeV centers.
Fig. 3.
Fig. 3. Incorporation of GeV using a germanium oxide source. a) Schematic of the growth geometry of the diamond membrane and oxide sources. Inset, is the actual photograph of the puck with diameter of ∼ 1 inch. b) Optical and c) SEM images of the membrane after the overgrowth, resulting in smooth surface after the growth. d) Room temperature PL spectrum of the membrane, with the peak centered at ∼602 nm confirms the successful incorporation of GeV into the diamond membrane.
Fig. 4.
Fig. 4. Incorporation of GeV using both metallic and oxide sources. a) Schematic of the growth geometry of the diamond membrane and metallic and oxide sources with larger distance compared to the previous approaches. Inset, is the actual photograph of the puck with diameter of 1 inch. The locations of both metallic and oxide germanium sources are marked. b) Optical and c) SEM images of the membrane after overgrowth process in MPCVD indicating the smooth surface after the growth. d) The pronounce peak confirms the successful incorporation of GeV into the diamond membrane.
Fig. 5.
Fig. 5. a) Room temperature PL spectra collected from three random position on the diamond membrane confirming the homogeneous incorporation of GeV into diamond. b) An intensity confocal map from the membrane grown with third showing a uniform distribution of GeV in all measured points across the membrane. c) low magnification SEM image of the fabricated microring from diamond membrane containing GeV centers d) PL spectrum from the diamond showing whispering gallery modes as well as GeV peak. Inset, zoomed image of the diamond ring.

Tables (1)

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Table 1. Summary of the conditions used to achieve GeV color centres in thin diamond membranes

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