Abstract

We demonstrate a top-down fabrication strategy for creating a III-nitride hole array photonic crystal (PhC) with embedded quantum wells (QWs). Our photoelectrochemical (PEC) etching technique is highly bandgap selective, permitting the removal of QWs with well-defined indium (In) concentration. Room-temperature micro-photoluminescence (μ-PL) measurements confirm the removal of one multiple quantum well (MQW) while preserving a QW of differing In concentration. Moreover, PhC cavity resonances, wholly unobservable before, are present following PEC etching. Our results indicate an interesting route for creating III-nitride membranes with tailorable emission wavelengths. Our top-down fabrication approach offers exciting opportunities for III-nitride based light emitters.

© 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

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References

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    [Crossref]
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2018 (2)

M. A. Bandres, S. Wittek, G. Harari, M. Parto, J. Ren, M. Segev, D. N. Christodoulides, and M. Khajavikhan, “Topological insulator laser: Experiments,” Science 359(6381), eaar4005 (2018).
[Crossref] [PubMed]

S. Barik, A. Karasahin, C. Flower, T. Cai, H. Miyake, W. DeGottardi, M. Hafezi, and E. Waks, “A topological quantum optics interface,” Science 359(6376), 666–668 (2018).
[Crossref] [PubMed]

2017 (3)

2016 (3)

S. Barik, H. Miyake, W. DeGottardi, E. Waks, and M. Hafezi, “Two-dimensionally confined topological edge states in photonic crystals,” New J. Phys. 18(11), 113013 (2016).
[Crossref]

L. Zhang, C.-H. Teng, P.-C. Ku, and H. Deng, “Site-controlled InGaN/GaN single-photon-emitting diode,” Appl. Phys. Lett. 108(15), 153102 (2016).
[Crossref]

T. S. Kao, T. T. Wu, C. W. Tsao, J. H. Lin, D. W. Lin, S. J. Huang, T. C. Lu, H. C. Kuo, S. C. Wang, and Y. K. Su, “Light Emission Characteristics of Nonpolar $a$ -Plane GaN-Based Photonic Crystal Defect Cavities,” IEEE J. Quantum Electron. 52, 1–7 (2016).
[Crossref]

2015 (3)

X. Xiao, A. J. Fischer, M. E. Coltrin, P. Lu, D. D. Koleske, G. T. Wang, R. Polsky, and J. Y. Tsao, “Photoelectrochemical etching of epitaxial InGaN thin films: self-limited kinetics and nanostructuring,” Electrochim. Acta 162, 163–168 (2015).
[Crossref]

F. La China, F. Intonti, N. Caselli, F. Lotti, A. Vinattieri, N. Vico Triviño, J. F. Carlin, R. Butté, N. Grandjean, and M. Gurioli, “Vectorial near-field imaging of a GaN based photonic crystal cavity,” Appl. Phys. Lett. 107(10), 101110 (2015).
[Crossref]

L.-H. Wu and X. Hu, “Scheme for Achieving a Topological Photonic Crystal by Using Dielectric Material,” Phys. Rev. Lett. 114(22), 223901 (2015).
[Crossref] [PubMed]

2014 (4)

S. Kako, M. Holmes, S. Sergent, M. Bürger, D. J. As, and Y. Arakawa, “Single-photon emission from cubic GaN quantum dots,” Appl. Phys. Lett. 104(1), 011101 (2014).
[Crossref]

J. Y. Tsao, M. H. Crawford, M. E. Coltrin, A. J. Fischer, D. D. Koleske, G. S. Subramania, G. T. Wang, J. J. Wierer, and R. F. Karlicek, “Toward Smart and Ultra-efficient Solid-State Lighting,” Adv. Opt. Mater. 2(9), 809–836 (2014).
[Crossref]

M. E. Coltrin, A. M. Armstrong, I. Brener, W. W. Chow, M. H. Crawford, A. J. Fischer, D. F. Kelley, D. D. Koleske, L. J. Lauhon, J. E. Martin, M. Nyman, E. F. Schubert, L. E. Shea-Rohwer, G. Subramania, J. Y. Tsao, G. T. Wang, J. J. Wierer, and J. B. Wright, “Energy Frontier Research Center for Solid-State Lighting Science: Exploring New Materials Architectures and Light Emission Phenomena,” J. Phys. Chem. C 118(25), 13330–13345 (2014).
[Crossref]

X. Xiao, A. J. Fischer, G. T. Wang, P. Lu, D. D. Koleske, M. E. Coltrin, J. B. Wright, S. Liu, I. Brener, G. S. Subramania, and J. Y. Tsao, “Quantum-Size-Controlled Photoelectrochemical Fabrication of Epitaxial InGaN Quantum Dots,” Nano Lett. 14(10), 5616–5620 (2014).
[Crossref] [PubMed]

2013 (2)

J. B. Wright, S. Liu, G. T. Wang, Q. Li, A. Benz, D. D. Koleske, P. Lu, H. Xu, L. Lester, T. S. Luk, I. Brener, and G. Subramania, “Multi-Colour Nanowire Photonic Crystal Laser Pixels,” Sci. Rep. 3(1), 2982 (2013).
[Crossref] [PubMed]

S. Deshpande, J. Heo, A. Das, and P. Bhattacharya, “Electrically driven polarized single-photon emission from an InGaN quantum dot in a GaN nanowire,” Nat. Commun. 4(1), 1675 (2013).
[Crossref] [PubMed]

2012 (3)

N. Vico Triviño, G. Rossbach, U. Dharanipathy, J. Levrat, A. Castiglia, J. F. Carlin, K. A. Atlasov, R. Butté, R. Houdré, and N. Grandjean, “High quality factor two dimensional GaN photonic crystal cavity membranes grown on silicon substrate,” Appl. Phys. Lett. 100(7), 071103 (2012).
[Crossref]

Q. Li, J. B. Wright, W. W. Chow, T. S. Luk, I. Brener, L. F. Lester, and G. T. Wang, “Single-mode GaN nanowire lasers,” Opt. Express 20(16), 17873–17879 (2012).
[Crossref] [PubMed]

K. Nozaki, A. Shinya, S. Matsuo, Y. Suzaki, T. Segawa, T. Sato, Y. Kawaguchi, R. Takahashi, and M. Notomi, “Ultralow-power all-optical RAM based on nanocavities,” Nat. Photonics 6(4), 248–252 (2012).
[Crossref]

2011 (5)

D. A. Fuhrmann, S. M. Thon, H. Kim, D. Bouwmeester, P. M. Petroff, A. Wixforth, and H. J. Krenner, “Dynamic modulation of photonic crystal nanocavities using gigahertz acoustic phonons,” Nat. Photonics 5(10), 605–609 (2011).
[Crossref]

P.-H. Weng, T.-T. Wu, T.-C. Lu, and S.-C. Wang, “Threshold gain analysis in GaN-based photonic crystal surface emitting lasers,” Opt. Lett. 36(10), 1908–1910 (2011).
[Crossref] [PubMed]

I. Shusuke, K. Katsumi, A. Ryuichi, K. Akihiko, and S. Shuichi, “Optically Pumped Green (530–560 nm) Stimulated Emissions from InGaN/GaN Multiple-Quantum-Well Triangular-Lattice Nanocolumn Arrays,” Appl. Phys. Express 4(5), 055001 (2011).
[Crossref]

C.-H. Lin, J.-Y. Wang, C.-Y. Chen, K.-C. Shen, D.-M. Yeh, Y.-W. Kiang, and C. C. Yang, “A GaN photonic crystal membrane laser,” Nanotechnology 22(2), 025201 (2011).
[Crossref] [PubMed]

Q. Li, K. R. Westlake, M. H. Crawford, S. R. Lee, D. D. Koleske, J. J. Figiel, K. C. Cross, S. Fathololoumi, Z. Mi, and G. T. Wang, “Optical performance of top-down fabricated InGaN/GaN nanorod light emitting diode arrays,” Opt. Express 19(25), 25528–25534 (2011).
[Crossref] [PubMed]

2010 (4)

W. Y. Fu, K. K.-Y. Wong, and H. W. Choi, “Room temperature photonic crystal band-edge lasing from nanopillar array on GaN patterned by nanosphere lithography,” J. Appl. Phys. 107(6), 063104 (2010).
[Crossref]

T. Kouno, K. Kishino, M. Sakai, Y. Inose, A. Kikuchi, and K. Ema, “Stimulated emission on two-dimensional distributed feedback scheme in triangular GaN nanocolumn arrays,” Electron. Lett. 46(9), 644–645 (2010).
[Crossref]

J.-Y. Kim, M.-K. Kwon, S.-J. Park, S. H. Kim, and K.-D. Lee, “Enhancement of light extraction from GaN-based green light-emitting diodes using selective area photonic crystal,” Appl. Phys. Lett. 96(25), 251103 (2010).
[Crossref]

S. Kawashima, T. Kawashima, Y. Nagatomo, Y. Hori, H. Iwase, T. Uchida, K. Hoshino, A. Numata, and M. Uchida, “GaN-based surface-emitting laser with two-dimensional photonic crystal acting as distributed-feedback grating and optical cladding,” Appl. Phys. Lett. 97(25), 251112 (2010).
[Crossref]

2009 (4)

J. J. Wierer, A. David, and M. M. Megens, “III-nitride photonic-crystal light-emitting diodes with high extraction efficiency,” Nat. Photonics 3(3), 163–169 (2009).
[Crossref]

T. A. Truong, L. M. Campos, E. Matioli, I. Meinel, C. J. Hawker, C. Weisbuch, and P. M. Petroff, “Light extraction from GaN-based light emitting diode structures with a noninvasive two-dimensional photonic crystal,” Appl. Phys. Lett. 94(2), 023101 (2009).
[Crossref]

M. Toishi, D. Englund, A. Faraon, and J. Vucković, “High-brightness single photon source from a quantum dot in a directional-emission nanocavity,” Opt. Express 17(17), 14618–14626 (2009).
[Crossref] [PubMed]

T. Kouno, K. Kishino, K. Yamano, and A. Kikuchi, “Two-dimensional light confinement in periodic InGaN/GaN nanocolumn arrays and optically pumped blue stimulated emission,” Opt. Express 17(22), 20440–20447 (2009).
[Crossref] [PubMed]

2008 (3)

K. Rivoire, A. Faraon, and J. Vuckovic, “Gallium phosphide photonic crystal nanocavities in the visible,” Appl. Phys. Lett. 93(6), 063103 (2008).
[Crossref]

H. Matsubara, S. Yoshimoto, H. Saito, Y. Jianglin, Y. Tanaka, and S. Noda, “GaN Photonic-Crystal Surface-Emitting Laser at Blue-Violet Wavelengths,” Science 319(5862), 445–447 (2008).
[Crossref] [PubMed]

A. Fischer, G. Subramania, Y.-J. Lee, T. Luk, J. Wendt, and D. Koleske, “Improved InGaN LED Efficiency using Photonic Crystal Patterning and Surface Plasmon Enhanced Emission,” ECS Trans. 13, 5–11 (2008).

2007 (1)

2006 (1)

L. Chang, C. Hou, Y. Ting, C. Chen, C. Hsu, J. Chang, C. Lee, G. Chen, and J. Chyi, “Laser emission from GaN photonic crystals,” Appl. Phys. Lett. 89(7), 071116 (2006).
[Crossref]

2005 (1)

Y. S. Choi, K. Hennessy, R. Sharma, E. Haberer, Y. Gao, S. P. DenBaars, S. Nakamura, E. L. Hu, and C. Meier, “GaN blue photonic crystal membrane nanocavities,” Appl. Phys. Lett. 87(24), 243101 (2005).
[Crossref]

2004 (1)

E. D. Haberer, R. Sharma, A. R. Stonas, S. Nakamura, S. P. DenBaars, and E. L. Hu, “Removal of thick (>100nm) InGaN layers for optical devices using band-gap-selective photoelectrochemical etching,” Appl. Phys. Lett. 85(5), 762–764 (2004).
[Crossref]

2003 (2)

G. Subramania, S. Y. Lin, J. R. Wendt, and J. M. Rivera, “Tuning the microcavity resonant wavelength in a two-dimensional photonic crystal by modifying the cavity geometry,” Appl. Phys. Lett. 83, 4491–4493 (2003).
[Crossref]

Y. Akahane, T. Asano, B.-S. Song, and S. Noda, “High-Q photonic nanocavity in a two-dimensional photonic crystal,” Nature 425(6961), 944–947 (2003).
[Crossref] [PubMed]

2001 (1)

A. A. Erchak, D. J. Ripin, S. Fan, P. Rakich, J. D. Joannopoulos, E. P. Ippen, G. S. Petrich, and L. A. Kolodziejski, “Enhanced coupling to vertical radiation using a two-dimensional photonic crystal in a semiconductor light-emitting diode,” Appl. Phys. Lett. 78(5), 563–565 (2001).
[Crossref]

Akahane, Y.

Y. Akahane, T. Asano, B.-S. Song, and S. Noda, “High-Q photonic nanocavity in a two-dimensional photonic crystal,” Nature 425(6961), 944–947 (2003).
[Crossref] [PubMed]

Akihiko, K.

I. Shusuke, K. Katsumi, A. Ryuichi, K. Akihiko, and S. Shuichi, “Optically Pumped Green (530–560 nm) Stimulated Emissions from InGaN/GaN Multiple-Quantum-Well Triangular-Lattice Nanocolumn Arrays,” Appl. Phys. Express 4(5), 055001 (2011).
[Crossref]

Anderson, P. D.

Arakawa, Y.

S. Kako, M. Holmes, S. Sergent, M. Bürger, D. J. As, and Y. Arakawa, “Single-photon emission from cubic GaN quantum dots,” Appl. Phys. Lett. 104(1), 011101 (2014).
[Crossref]

Armstrong, A. M.

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S. Barik, A. Karasahin, C. Flower, T. Cai, H. Miyake, W. DeGottardi, M. Hafezi, and E. Waks, “A topological quantum optics interface,” Science 359(6376), 666–668 (2018).
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T. A. Truong, L. M. Campos, E. Matioli, I. Meinel, C. J. Hawker, C. Weisbuch, and P. M. Petroff, “Light extraction from GaN-based light emitting diode structures with a noninvasive two-dimensional photonic crystal,” Appl. Phys. Lett. 94(2), 023101 (2009).
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Y. S. Choi, K. Hennessy, R. Sharma, E. Haberer, Y. Gao, S. P. DenBaars, S. Nakamura, E. L. Hu, and C. Meier, “GaN blue photonic crystal membrane nanocavities,” Appl. Phys. Lett. 87(24), 243101 (2005).
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S. Deshpande, J. Heo, A. Das, and P. Bhattacharya, “Electrically driven polarized single-photon emission from an InGaN quantum dot in a GaN nanowire,” Nat. Commun. 4(1), 1675 (2013).
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S. Kako, M. Holmes, S. Sergent, M. Bürger, D. J. As, and Y. Arakawa, “Single-photon emission from cubic GaN quantum dots,” Appl. Phys. Lett. 104(1), 011101 (2014).
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L. Chang, C. Hou, Y. Ting, C. Chen, C. Hsu, J. Chang, C. Lee, G. Chen, and J. Chyi, “Laser emission from GaN photonic crystals,” Appl. Phys. Lett. 89(7), 071116 (2006).
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Y. S. Choi, K. Hennessy, R. Sharma, E. Haberer, Y. Gao, S. P. DenBaars, S. Nakamura, E. L. Hu, and C. Meier, “GaN blue photonic crystal membrane nanocavities,” Appl. Phys. Lett. 87(24), 243101 (2005).
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L.-H. Wu and X. Hu, “Scheme for Achieving a Topological Photonic Crystal by Using Dielectric Material,” Phys. Rev. Lett. 114(22), 223901 (2015).
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T. Kouno, K. Kishino, M. Sakai, Y. Inose, A. Kikuchi, and K. Ema, “Stimulated emission on two-dimensional distributed feedback scheme in triangular GaN nanocolumn arrays,” Electron. Lett. 46(9), 644–645 (2010).
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F. La China, F. Intonti, N. Caselli, F. Lotti, A. Vinattieri, N. Vico Triviño, J. F. Carlin, R. Butté, N. Grandjean, and M. Gurioli, “Vectorial near-field imaging of a GaN based photonic crystal cavity,” Appl. Phys. Lett. 107(10), 101110 (2015).
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A. A. Erchak, D. J. Ripin, S. Fan, P. Rakich, J. D. Joannopoulos, E. P. Ippen, G. S. Petrich, and L. A. Kolodziejski, “Enhanced coupling to vertical radiation using a two-dimensional photonic crystal in a semiconductor light-emitting diode,” Appl. Phys. Lett. 78(5), 563–565 (2001).
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S. Kawashima, T. Kawashima, Y. Nagatomo, Y. Hori, H. Iwase, T. Uchida, K. Hoshino, A. Numata, and M. Uchida, “GaN-based surface-emitting laser with two-dimensional photonic crystal acting as distributed-feedback grating and optical cladding,” Appl. Phys. Lett. 97(25), 251112 (2010).
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H. Matsubara, S. Yoshimoto, H. Saito, Y. Jianglin, Y. Tanaka, and S. Noda, “GaN Photonic-Crystal Surface-Emitting Laser at Blue-Violet Wavelengths,” Science 319(5862), 445–447 (2008).
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A. A. Erchak, D. J. Ripin, S. Fan, P. Rakich, J. D. Joannopoulos, E. P. Ippen, G. S. Petrich, and L. A. Kolodziejski, “Enhanced coupling to vertical radiation using a two-dimensional photonic crystal in a semiconductor light-emitting diode,” Appl. Phys. Lett. 78(5), 563–565 (2001).
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S. Barik, A. Karasahin, C. Flower, T. Cai, H. Miyake, W. DeGottardi, M. Hafezi, and E. Waks, “A topological quantum optics interface,” Science 359(6376), 666–668 (2018).
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J. Y. Tsao, M. H. Crawford, M. E. Coltrin, A. J. Fischer, D. D. Koleske, G. S. Subramania, G. T. Wang, J. J. Wierer, and R. F. Karlicek, “Toward Smart and Ultra-efficient Solid-State Lighting,” Adv. Opt. Mater. 2(9), 809–836 (2014).
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S. Kawashima, T. Kawashima, Y. Nagatomo, Y. Hori, H. Iwase, T. Uchida, K. Hoshino, A. Numata, and M. Uchida, “GaN-based surface-emitting laser with two-dimensional photonic crystal acting as distributed-feedback grating and optical cladding,” Appl. Phys. Lett. 97(25), 251112 (2010).
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S. Kawashima, T. Kawashima, Y. Nagatomo, Y. Hori, H. Iwase, T. Uchida, K. Hoshino, A. Numata, and M. Uchida, “GaN-based surface-emitting laser with two-dimensional photonic crystal acting as distributed-feedback grating and optical cladding,” Appl. Phys. Lett. 97(25), 251112 (2010).
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M. E. Coltrin, A. M. Armstrong, I. Brener, W. W. Chow, M. H. Crawford, A. J. Fischer, D. F. Kelley, D. D. Koleske, L. J. Lauhon, J. E. Martin, M. Nyman, E. F. Schubert, L. E. Shea-Rohwer, G. Subramania, J. Y. Tsao, G. T. Wang, J. J. Wierer, and J. B. Wright, “Energy Frontier Research Center for Solid-State Lighting Science: Exploring New Materials Architectures and Light Emission Phenomena,” J. Phys. Chem. C 118(25), 13330–13345 (2014).
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M. A. Bandres, S. Wittek, G. Harari, M. Parto, J. Ren, M. Segev, D. N. Christodoulides, and M. Khajavikhan, “Topological insulator laser: Experiments,” Science 359(6381), eaar4005 (2018).
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C.-H. Lin, J.-Y. Wang, C.-Y. Chen, K.-C. Shen, D.-M. Yeh, Y.-W. Kiang, and C. C. Yang, “A GaN photonic crystal membrane laser,” Nanotechnology 22(2), 025201 (2011).
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T. Kouno, K. Kishino, M. Sakai, Y. Inose, A. Kikuchi, and K. Ema, “Stimulated emission on two-dimensional distributed feedback scheme in triangular GaN nanocolumn arrays,” Electron. Lett. 46(9), 644–645 (2010).
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T. Kouno, K. Kishino, K. Yamano, and A. Kikuchi, “Two-dimensional light confinement in periodic InGaN/GaN nanocolumn arrays and optically pumped blue stimulated emission,” Opt. Express 17(22), 20440–20447 (2009).
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Kim, H.

D. A. Fuhrmann, S. M. Thon, H. Kim, D. Bouwmeester, P. M. Petroff, A. Wixforth, and H. J. Krenner, “Dynamic modulation of photonic crystal nanocavities using gigahertz acoustic phonons,” Nat. Photonics 5(10), 605–609 (2011).
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Kim, J.-Y.

J.-Y. Kim, M.-K. Kwon, S.-J. Park, S. H. Kim, and K.-D. Lee, “Enhancement of light extraction from GaN-based green light-emitting diodes using selective area photonic crystal,” Appl. Phys. Lett. 96(25), 251103 (2010).
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Kim, S. H.

J.-Y. Kim, M.-K. Kwon, S.-J. Park, S. H. Kim, and K.-D. Lee, “Enhancement of light extraction from GaN-based green light-emitting diodes using selective area photonic crystal,” Appl. Phys. Lett. 96(25), 251103 (2010).
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Kishino, K.

T. Kouno, K. Kishino, M. Sakai, Y. Inose, A. Kikuchi, and K. Ema, “Stimulated emission on two-dimensional distributed feedback scheme in triangular GaN nanocolumn arrays,” Electron. Lett. 46(9), 644–645 (2010).
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T. Kouno, K. Kishino, K. Yamano, and A. Kikuchi, “Two-dimensional light confinement in periodic InGaN/GaN nanocolumn arrays and optically pumped blue stimulated emission,” Opt. Express 17(22), 20440–20447 (2009).
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Koleske, D.

A. Fischer, G. Subramania, Y.-J. Lee, T. Luk, J. Wendt, and D. Koleske, “Improved InGaN LED Efficiency using Photonic Crystal Patterning and Surface Plasmon Enhanced Emission,” ECS Trans. 13, 5–11 (2008).

Koleske, D. D.

P. D. Anderson, D. D. Koleske, M. L. Povinelli, and G. Subramania, “Improving emission uniformity and linearizing band dispersion in nanowire arrays using quasi-aperiodicity,” Opt. Mater. Express 7(10), 3634–3642 (2017).
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A. J. Fischer, P. D. Anderson, D. D. Koleske, and G. Subramania, “Deterministic Placement of Quantum-Size Controlled Quantum Dots for Seamless Top-Down Integration,” ACS Photonics 4(9), 2165–2170 (2017).
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X. Xiao, A. J. Fischer, M. E. Coltrin, P. Lu, D. D. Koleske, G. T. Wang, R. Polsky, and J. Y. Tsao, “Photoelectrochemical etching of epitaxial InGaN thin films: self-limited kinetics and nanostructuring,” Electrochim. Acta 162, 163–168 (2015).
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X. Xiao, A. J. Fischer, G. T. Wang, P. Lu, D. D. Koleske, M. E. Coltrin, J. B. Wright, S. Liu, I. Brener, G. S. Subramania, and J. Y. Tsao, “Quantum-Size-Controlled Photoelectrochemical Fabrication of Epitaxial InGaN Quantum Dots,” Nano Lett. 14(10), 5616–5620 (2014).
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J. Y. Tsao, M. H. Crawford, M. E. Coltrin, A. J. Fischer, D. D. Koleske, G. S. Subramania, G. T. Wang, J. J. Wierer, and R. F. Karlicek, “Toward Smart and Ultra-efficient Solid-State Lighting,” Adv. Opt. Mater. 2(9), 809–836 (2014).
[Crossref]

M. E. Coltrin, A. M. Armstrong, I. Brener, W. W. Chow, M. H. Crawford, A. J. Fischer, D. F. Kelley, D. D. Koleske, L. J. Lauhon, J. E. Martin, M. Nyman, E. F. Schubert, L. E. Shea-Rohwer, G. Subramania, J. Y. Tsao, G. T. Wang, J. J. Wierer, and J. B. Wright, “Energy Frontier Research Center for Solid-State Lighting Science: Exploring New Materials Architectures and Light Emission Phenomena,” J. Phys. Chem. C 118(25), 13330–13345 (2014).
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J. B. Wright, S. Liu, G. T. Wang, Q. Li, A. Benz, D. D. Koleske, P. Lu, H. Xu, L. Lester, T. S. Luk, I. Brener, and G. Subramania, “Multi-Colour Nanowire Photonic Crystal Laser Pixels,” Sci. Rep. 3(1), 2982 (2013).
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Q. Li, K. R. Westlake, M. H. Crawford, S. R. Lee, D. D. Koleske, J. J. Figiel, K. C. Cross, S. Fathololoumi, Z. Mi, and G. T. Wang, “Optical performance of top-down fabricated InGaN/GaN nanorod light emitting diode arrays,” Opt. Express 19(25), 25528–25534 (2011).
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A. A. Erchak, D. J. Ripin, S. Fan, P. Rakich, J. D. Joannopoulos, E. P. Ippen, G. S. Petrich, and L. A. Kolodziejski, “Enhanced coupling to vertical radiation using a two-dimensional photonic crystal in a semiconductor light-emitting diode,” Appl. Phys. Lett. 78(5), 563–565 (2001).
[Crossref]

Kouno, T.

T. Kouno, K. Kishino, M. Sakai, Y. Inose, A. Kikuchi, and K. Ema, “Stimulated emission on two-dimensional distributed feedback scheme in triangular GaN nanocolumn arrays,” Electron. Lett. 46(9), 644–645 (2010).
[Crossref]

T. Kouno, K. Kishino, K. Yamano, and A. Kikuchi, “Two-dimensional light confinement in periodic InGaN/GaN nanocolumn arrays and optically pumped blue stimulated emission,” Opt. Express 17(22), 20440–20447 (2009).
[Crossref] [PubMed]

Krenner, H. J.

D. A. Fuhrmann, S. M. Thon, H. Kim, D. Bouwmeester, P. M. Petroff, A. Wixforth, and H. J. Krenner, “Dynamic modulation of photonic crystal nanocavities using gigahertz acoustic phonons,” Nat. Photonics 5(10), 605–609 (2011).
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L. Zhang, C.-H. Teng, P.-C. Ku, and H. Deng, “Site-controlled InGaN/GaN single-photon-emitting diode,” Appl. Phys. Lett. 108(15), 153102 (2016).
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T. S. Kao, T. T. Wu, C. W. Tsao, J. H. Lin, D. W. Lin, S. J. Huang, T. C. Lu, H. C. Kuo, S. C. Wang, and Y. K. Su, “Light Emission Characteristics of Nonpolar $a$ -Plane GaN-Based Photonic Crystal Defect Cavities,” IEEE J. Quantum Electron. 52, 1–7 (2016).
[Crossref]

Kwon, M.-K.

J.-Y. Kim, M.-K. Kwon, S.-J. Park, S. H. Kim, and K.-D. Lee, “Enhancement of light extraction from GaN-based green light-emitting diodes using selective area photonic crystal,” Appl. Phys. Lett. 96(25), 251103 (2010).
[Crossref]

La China, F.

F. La China, F. Intonti, N. Caselli, F. Lotti, A. Vinattieri, N. Vico Triviño, J. F. Carlin, R. Butté, N. Grandjean, and M. Gurioli, “Vectorial near-field imaging of a GaN based photonic crystal cavity,” Appl. Phys. Lett. 107(10), 101110 (2015).
[Crossref]

Lauhon, L. J.

M. E. Coltrin, A. M. Armstrong, I. Brener, W. W. Chow, M. H. Crawford, A. J. Fischer, D. F. Kelley, D. D. Koleske, L. J. Lauhon, J. E. Martin, M. Nyman, E. F. Schubert, L. E. Shea-Rohwer, G. Subramania, J. Y. Tsao, G. T. Wang, J. J. Wierer, and J. B. Wright, “Energy Frontier Research Center for Solid-State Lighting Science: Exploring New Materials Architectures and Light Emission Phenomena,” J. Phys. Chem. C 118(25), 13330–13345 (2014).
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Lee, C.

L. Chang, C. Hou, Y. Ting, C. Chen, C. Hsu, J. Chang, C. Lee, G. Chen, and J. Chyi, “Laser emission from GaN photonic crystals,” Appl. Phys. Lett. 89(7), 071116 (2006).
[Crossref]

Lee, K.-D.

J.-Y. Kim, M.-K. Kwon, S.-J. Park, S. H. Kim, and K.-D. Lee, “Enhancement of light extraction from GaN-based green light-emitting diodes using selective area photonic crystal,” Appl. Phys. Lett. 96(25), 251103 (2010).
[Crossref]

Lee, S. R.

Lee, Y.-J.

A. Fischer, G. Subramania, Y.-J. Lee, T. Luk, J. Wendt, and D. Koleske, “Improved InGaN LED Efficiency using Photonic Crystal Patterning and Surface Plasmon Enhanced Emission,” ECS Trans. 13, 5–11 (2008).

Lester, L.

J. B. Wright, S. Liu, G. T. Wang, Q. Li, A. Benz, D. D. Koleske, P. Lu, H. Xu, L. Lester, T. S. Luk, I. Brener, and G. Subramania, “Multi-Colour Nanowire Photonic Crystal Laser Pixels,” Sci. Rep. 3(1), 2982 (2013).
[Crossref] [PubMed]

Lester, L. F.

Levrat, J.

N. Vico Triviño, G. Rossbach, U. Dharanipathy, J. Levrat, A. Castiglia, J. F. Carlin, K. A. Atlasov, R. Butté, R. Houdré, and N. Grandjean, “High quality factor two dimensional GaN photonic crystal cavity membranes grown on silicon substrate,” Appl. Phys. Lett. 100(7), 071103 (2012).
[Crossref]

Li, Q.

Lin, C.-H.

C.-H. Lin, J.-Y. Wang, C.-Y. Chen, K.-C. Shen, D.-M. Yeh, Y.-W. Kiang, and C. C. Yang, “A GaN photonic crystal membrane laser,” Nanotechnology 22(2), 025201 (2011).
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Lin, D. W.

T. S. Kao, T. T. Wu, C. W. Tsao, J. H. Lin, D. W. Lin, S. J. Huang, T. C. Lu, H. C. Kuo, S. C. Wang, and Y. K. Su, “Light Emission Characteristics of Nonpolar $a$ -Plane GaN-Based Photonic Crystal Defect Cavities,” IEEE J. Quantum Electron. 52, 1–7 (2016).
[Crossref]

Lin, J. H.

T. S. Kao, T. T. Wu, C. W. Tsao, J. H. Lin, D. W. Lin, S. J. Huang, T. C. Lu, H. C. Kuo, S. C. Wang, and Y. K. Su, “Light Emission Characteristics of Nonpolar $a$ -Plane GaN-Based Photonic Crystal Defect Cavities,” IEEE J. Quantum Electron. 52, 1–7 (2016).
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Lin, S. Y.

G. Subramania, S. Y. Lin, J. R. Wendt, and J. M. Rivera, “Tuning the microcavity resonant wavelength in a two-dimensional photonic crystal by modifying the cavity geometry,” Appl. Phys. Lett. 83, 4491–4493 (2003).
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X. Xiao, A. J. Fischer, G. T. Wang, P. Lu, D. D. Koleske, M. E. Coltrin, J. B. Wright, S. Liu, I. Brener, G. S. Subramania, and J. Y. Tsao, “Quantum-Size-Controlled Photoelectrochemical Fabrication of Epitaxial InGaN Quantum Dots,” Nano Lett. 14(10), 5616–5620 (2014).
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J. B. Wright, S. Liu, G. T. Wang, Q. Li, A. Benz, D. D. Koleske, P. Lu, H. Xu, L. Lester, T. S. Luk, I. Brener, and G. Subramania, “Multi-Colour Nanowire Photonic Crystal Laser Pixels,” Sci. Rep. 3(1), 2982 (2013).
[Crossref] [PubMed]

Lotti, F.

F. La China, F. Intonti, N. Caselli, F. Lotti, A. Vinattieri, N. Vico Triviño, J. F. Carlin, R. Butté, N. Grandjean, and M. Gurioli, “Vectorial near-field imaging of a GaN based photonic crystal cavity,” Appl. Phys. Lett. 107(10), 101110 (2015).
[Crossref]

Lu, P.

X. Xiao, A. J. Fischer, M. E. Coltrin, P. Lu, D. D. Koleske, G. T. Wang, R. Polsky, and J. Y. Tsao, “Photoelectrochemical etching of epitaxial InGaN thin films: self-limited kinetics and nanostructuring,” Electrochim. Acta 162, 163–168 (2015).
[Crossref]

X. Xiao, A. J. Fischer, G. T. Wang, P. Lu, D. D. Koleske, M. E. Coltrin, J. B. Wright, S. Liu, I. Brener, G. S. Subramania, and J. Y. Tsao, “Quantum-Size-Controlled Photoelectrochemical Fabrication of Epitaxial InGaN Quantum Dots,” Nano Lett. 14(10), 5616–5620 (2014).
[Crossref] [PubMed]

J. B. Wright, S. Liu, G. T. Wang, Q. Li, A. Benz, D. D. Koleske, P. Lu, H. Xu, L. Lester, T. S. Luk, I. Brener, and G. Subramania, “Multi-Colour Nanowire Photonic Crystal Laser Pixels,” Sci. Rep. 3(1), 2982 (2013).
[Crossref] [PubMed]

Lu, T. C.

T. S. Kao, T. T. Wu, C. W. Tsao, J. H. Lin, D. W. Lin, S. J. Huang, T. C. Lu, H. C. Kuo, S. C. Wang, and Y. K. Su, “Light Emission Characteristics of Nonpolar $a$ -Plane GaN-Based Photonic Crystal Defect Cavities,” IEEE J. Quantum Electron. 52, 1–7 (2016).
[Crossref]

Lu, T.-C.

Luk, T.

A. Fischer, G. Subramania, Y.-J. Lee, T. Luk, J. Wendt, and D. Koleske, “Improved InGaN LED Efficiency using Photonic Crystal Patterning and Surface Plasmon Enhanced Emission,” ECS Trans. 13, 5–11 (2008).

Luk, T. S.

J. B. Wright, S. Liu, G. T. Wang, Q. Li, A. Benz, D. D. Koleske, P. Lu, H. Xu, L. Lester, T. S. Luk, I. Brener, and G. Subramania, “Multi-Colour Nanowire Photonic Crystal Laser Pixels,” Sci. Rep. 3(1), 2982 (2013).
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Q. Li, J. B. Wright, W. W. Chow, T. S. Luk, I. Brener, L. F. Lester, and G. T. Wang, “Single-mode GaN nanowire lasers,” Opt. Express 20(16), 17873–17879 (2012).
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Martin, J. E.

M. E. Coltrin, A. M. Armstrong, I. Brener, W. W. Chow, M. H. Crawford, A. J. Fischer, D. F. Kelley, D. D. Koleske, L. J. Lauhon, J. E. Martin, M. Nyman, E. F. Schubert, L. E. Shea-Rohwer, G. Subramania, J. Y. Tsao, G. T. Wang, J. J. Wierer, and J. B. Wright, “Energy Frontier Research Center for Solid-State Lighting Science: Exploring New Materials Architectures and Light Emission Phenomena,” J. Phys. Chem. C 118(25), 13330–13345 (2014).
[Crossref]

Matioli, E.

T. A. Truong, L. M. Campos, E. Matioli, I. Meinel, C. J. Hawker, C. Weisbuch, and P. M. Petroff, “Light extraction from GaN-based light emitting diode structures with a noninvasive two-dimensional photonic crystal,” Appl. Phys. Lett. 94(2), 023101 (2009).
[Crossref]

Matsubara, H.

H. Matsubara, S. Yoshimoto, H. Saito, Y. Jianglin, Y. Tanaka, and S. Noda, “GaN Photonic-Crystal Surface-Emitting Laser at Blue-Violet Wavelengths,” Science 319(5862), 445–447 (2008).
[Crossref] [PubMed]

Matsuo, S.

K. Nozaki, A. Shinya, S. Matsuo, Y. Suzaki, T. Segawa, T. Sato, Y. Kawaguchi, R. Takahashi, and M. Notomi, “Ultralow-power all-optical RAM based on nanocavities,” Nat. Photonics 6(4), 248–252 (2012).
[Crossref]

Megens, M. M.

J. J. Wierer, A. David, and M. M. Megens, “III-nitride photonic-crystal light-emitting diodes with high extraction efficiency,” Nat. Photonics 3(3), 163–169 (2009).
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Meier, C.

Y. S. Choi, K. Hennessy, R. Sharma, E. Haberer, Y. Gao, S. P. DenBaars, S. Nakamura, E. L. Hu, and C. Meier, “GaN blue photonic crystal membrane nanocavities,” Appl. Phys. Lett. 87(24), 243101 (2005).
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Meinel, I.

T. A. Truong, L. M. Campos, E. Matioli, I. Meinel, C. J. Hawker, C. Weisbuch, and P. M. Petroff, “Light extraction from GaN-based light emitting diode structures with a noninvasive two-dimensional photonic crystal,” Appl. Phys. Lett. 94(2), 023101 (2009).
[Crossref]

Mi, Z.

Miyake, H.

S. Barik, A. Karasahin, C. Flower, T. Cai, H. Miyake, W. DeGottardi, M. Hafezi, and E. Waks, “A topological quantum optics interface,” Science 359(6376), 666–668 (2018).
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S. Barik, H. Miyake, W. DeGottardi, E. Waks, and M. Hafezi, “Two-dimensionally confined topological edge states in photonic crystals,” New J. Phys. 18(11), 113013 (2016).
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Nagatomo, Y.

S. Kawashima, T. Kawashima, Y. Nagatomo, Y. Hori, H. Iwase, T. Uchida, K. Hoshino, A. Numata, and M. Uchida, “GaN-based surface-emitting laser with two-dimensional photonic crystal acting as distributed-feedback grating and optical cladding,” Appl. Phys. Lett. 97(25), 251112 (2010).
[Crossref]

Nakamura, S.

Y. S. Choi, K. Hennessy, R. Sharma, E. Haberer, Y. Gao, S. P. DenBaars, S. Nakamura, E. L. Hu, and C. Meier, “GaN blue photonic crystal membrane nanocavities,” Appl. Phys. Lett. 87(24), 243101 (2005).
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A. Fischer, G. Subramania, Y.-J. Lee, T. Luk, J. Wendt, and D. Koleske, “Improved InGaN LED Efficiency using Photonic Crystal Patterning and Surface Plasmon Enhanced Emission,” ECS Trans. 13, 5–11 (2008).

Wendt, J. R.

G. Subramania, S. Y. Lin, J. R. Wendt, and J. M. Rivera, “Tuning the microcavity resonant wavelength in a two-dimensional photonic crystal by modifying the cavity geometry,” Appl. Phys. Lett. 83, 4491–4493 (2003).
[Crossref]

Weng, P.-H.

Westlake, K. R.

Wierer, J. J.

J. Y. Tsao, M. H. Crawford, M. E. Coltrin, A. J. Fischer, D. D. Koleske, G. S. Subramania, G. T. Wang, J. J. Wierer, and R. F. Karlicek, “Toward Smart and Ultra-efficient Solid-State Lighting,” Adv. Opt. Mater. 2(9), 809–836 (2014).
[Crossref]

M. E. Coltrin, A. M. Armstrong, I. Brener, W. W. Chow, M. H. Crawford, A. J. Fischer, D. F. Kelley, D. D. Koleske, L. J. Lauhon, J. E. Martin, M. Nyman, E. F. Schubert, L. E. Shea-Rohwer, G. Subramania, J. Y. Tsao, G. T. Wang, J. J. Wierer, and J. B. Wright, “Energy Frontier Research Center for Solid-State Lighting Science: Exploring New Materials Architectures and Light Emission Phenomena,” J. Phys. Chem. C 118(25), 13330–13345 (2014).
[Crossref]

J. J. Wierer, A. David, and M. M. Megens, “III-nitride photonic-crystal light-emitting diodes with high extraction efficiency,” Nat. Photonics 3(3), 163–169 (2009).
[Crossref]

Wittek, S.

M. A. Bandres, S. Wittek, G. Harari, M. Parto, J. Ren, M. Segev, D. N. Christodoulides, and M. Khajavikhan, “Topological insulator laser: Experiments,” Science 359(6381), eaar4005 (2018).
[Crossref] [PubMed]

Wixforth, A.

D. A. Fuhrmann, S. M. Thon, H. Kim, D. Bouwmeester, P. M. Petroff, A. Wixforth, and H. J. Krenner, “Dynamic modulation of photonic crystal nanocavities using gigahertz acoustic phonons,” Nat. Photonics 5(10), 605–609 (2011).
[Crossref]

Wong, K. K.-Y.

W. Y. Fu, K. K.-Y. Wong, and H. W. Choi, “Room temperature photonic crystal band-edge lasing from nanopillar array on GaN patterned by nanosphere lithography,” J. Appl. Phys. 107(6), 063104 (2010).
[Crossref]

Wright, J. B.

M. E. Coltrin, A. M. Armstrong, I. Brener, W. W. Chow, M. H. Crawford, A. J. Fischer, D. F. Kelley, D. D. Koleske, L. J. Lauhon, J. E. Martin, M. Nyman, E. F. Schubert, L. E. Shea-Rohwer, G. Subramania, J. Y. Tsao, G. T. Wang, J. J. Wierer, and J. B. Wright, “Energy Frontier Research Center for Solid-State Lighting Science: Exploring New Materials Architectures and Light Emission Phenomena,” J. Phys. Chem. C 118(25), 13330–13345 (2014).
[Crossref]

X. Xiao, A. J. Fischer, G. T. Wang, P. Lu, D. D. Koleske, M. E. Coltrin, J. B. Wright, S. Liu, I. Brener, G. S. Subramania, and J. Y. Tsao, “Quantum-Size-Controlled Photoelectrochemical Fabrication of Epitaxial InGaN Quantum Dots,” Nano Lett. 14(10), 5616–5620 (2014).
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J. B. Wright, S. Liu, G. T. Wang, Q. Li, A. Benz, D. D. Koleske, P. Lu, H. Xu, L. Lester, T. S. Luk, I. Brener, and G. Subramania, “Multi-Colour Nanowire Photonic Crystal Laser Pixels,” Sci. Rep. 3(1), 2982 (2013).
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Q. Li, J. B. Wright, W. W. Chow, T. S. Luk, I. Brener, L. F. Lester, and G. T. Wang, “Single-mode GaN nanowire lasers,” Opt. Express 20(16), 17873–17879 (2012).
[Crossref] [PubMed]

Wu, L.-H.

L.-H. Wu and X. Hu, “Scheme for Achieving a Topological Photonic Crystal by Using Dielectric Material,” Phys. Rev. Lett. 114(22), 223901 (2015).
[Crossref] [PubMed]

Wu, T. T.

T. S. Kao, T. T. Wu, C. W. Tsao, J. H. Lin, D. W. Lin, S. J. Huang, T. C. Lu, H. C. Kuo, S. C. Wang, and Y. K. Su, “Light Emission Characteristics of Nonpolar $a$ -Plane GaN-Based Photonic Crystal Defect Cavities,” IEEE J. Quantum Electron. 52, 1–7 (2016).
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Wu, T.-T.

Xiao, X.

X. Xiao, A. J. Fischer, M. E. Coltrin, P. Lu, D. D. Koleske, G. T. Wang, R. Polsky, and J. Y. Tsao, “Photoelectrochemical etching of epitaxial InGaN thin films: self-limited kinetics and nanostructuring,” Electrochim. Acta 162, 163–168 (2015).
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X. Xiao, A. J. Fischer, G. T. Wang, P. Lu, D. D. Koleske, M. E. Coltrin, J. B. Wright, S. Liu, I. Brener, G. S. Subramania, and J. Y. Tsao, “Quantum-Size-Controlled Photoelectrochemical Fabrication of Epitaxial InGaN Quantum Dots,” Nano Lett. 14(10), 5616–5620 (2014).
[Crossref] [PubMed]

Xu, H.

J. B. Wright, S. Liu, G. T. Wang, Q. Li, A. Benz, D. D. Koleske, P. Lu, H. Xu, L. Lester, T. S. Luk, I. Brener, and G. Subramania, “Multi-Colour Nanowire Photonic Crystal Laser Pixels,” Sci. Rep. 3(1), 2982 (2013).
[Crossref] [PubMed]

Yamano, K.

Yang, C. C.

C.-H. Lin, J.-Y. Wang, C.-Y. Chen, K.-C. Shen, D.-M. Yeh, Y.-W. Kiang, and C. C. Yang, “A GaN photonic crystal membrane laser,” Nanotechnology 22(2), 025201 (2011).
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Yeh, D.-M.

C.-H. Lin, J.-Y. Wang, C.-Y. Chen, K.-C. Shen, D.-M. Yeh, Y.-W. Kiang, and C. C. Yang, “A GaN photonic crystal membrane laser,” Nanotechnology 22(2), 025201 (2011).
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Yoshimoto, S.

H. Matsubara, S. Yoshimoto, H. Saito, Y. Jianglin, Y. Tanaka, and S. Noda, “GaN Photonic-Crystal Surface-Emitting Laser at Blue-Violet Wavelengths,” Science 319(5862), 445–447 (2008).
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Zhang, L.

L. Zhang, C.-H. Teng, P.-C. Ku, and H. Deng, “Site-controlled InGaN/GaN single-photon-emitting diode,” Appl. Phys. Lett. 108(15), 153102 (2016).
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ACS Photonics (1)

A. J. Fischer, P. D. Anderson, D. D. Koleske, and G. Subramania, “Deterministic Placement of Quantum-Size Controlled Quantum Dots for Seamless Top-Down Integration,” ACS Photonics 4(9), 2165–2170 (2017).
[Crossref]

Adv. Opt. Mater. (1)

J. Y. Tsao, M. H. Crawford, M. E. Coltrin, A. J. Fischer, D. D. Koleske, G. S. Subramania, G. T. Wang, J. J. Wierer, and R. F. Karlicek, “Toward Smart and Ultra-efficient Solid-State Lighting,” Adv. Opt. Mater. 2(9), 809–836 (2014).
[Crossref]

Appl. Phys. Express (1)

I. Shusuke, K. Katsumi, A. Ryuichi, K. Akihiko, and S. Shuichi, “Optically Pumped Green (530–560 nm) Stimulated Emissions from InGaN/GaN Multiple-Quantum-Well Triangular-Lattice Nanocolumn Arrays,” Appl. Phys. Express 4(5), 055001 (2011).
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Appl. Phys. Lett. (13)

L. Zhang, C.-H. Teng, P.-C. Ku, and H. Deng, “Site-controlled InGaN/GaN single-photon-emitting diode,” Appl. Phys. Lett. 108(15), 153102 (2016).
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S. Kako, M. Holmes, S. Sergent, M. Bürger, D. J. As, and Y. Arakawa, “Single-photon emission from cubic GaN quantum dots,” Appl. Phys. Lett. 104(1), 011101 (2014).
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L. Chang, C. Hou, Y. Ting, C. Chen, C. Hsu, J. Chang, C. Lee, G. Chen, and J. Chyi, “Laser emission from GaN photonic crystals,” Appl. Phys. Lett. 89(7), 071116 (2006).
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Y. S. Choi, K. Hennessy, R. Sharma, E. Haberer, Y. Gao, S. P. DenBaars, S. Nakamura, E. L. Hu, and C. Meier, “GaN blue photonic crystal membrane nanocavities,” Appl. Phys. Lett. 87(24), 243101 (2005).
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J.-Y. Kim, M.-K. Kwon, S.-J. Park, S. H. Kim, and K.-D. Lee, “Enhancement of light extraction from GaN-based green light-emitting diodes using selective area photonic crystal,” Appl. Phys. Lett. 96(25), 251103 (2010).
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S. Kawashima, T. Kawashima, Y. Nagatomo, Y. Hori, H. Iwase, T. Uchida, K. Hoshino, A. Numata, and M. Uchida, “GaN-based surface-emitting laser with two-dimensional photonic crystal acting as distributed-feedback grating and optical cladding,” Appl. Phys. Lett. 97(25), 251112 (2010).
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F. La China, F. Intonti, N. Caselli, F. Lotti, A. Vinattieri, N. Vico Triviño, J. F. Carlin, R. Butté, N. Grandjean, and M. Gurioli, “Vectorial near-field imaging of a GaN based photonic crystal cavity,” Appl. Phys. Lett. 107(10), 101110 (2015).
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T. A. Truong, L. M. Campos, E. Matioli, I. Meinel, C. J. Hawker, C. Weisbuch, and P. M. Petroff, “Light extraction from GaN-based light emitting diode structures with a noninvasive two-dimensional photonic crystal,” Appl. Phys. Lett. 94(2), 023101 (2009).
[Crossref]

G. Subramania, S. Y. Lin, J. R. Wendt, and J. M. Rivera, “Tuning the microcavity resonant wavelength in a two-dimensional photonic crystal by modifying the cavity geometry,” Appl. Phys. Lett. 83, 4491–4493 (2003).
[Crossref]

A. A. Erchak, D. J. Ripin, S. Fan, P. Rakich, J. D. Joannopoulos, E. P. Ippen, G. S. Petrich, and L. A. Kolodziejski, “Enhanced coupling to vertical radiation using a two-dimensional photonic crystal in a semiconductor light-emitting diode,” Appl. Phys. Lett. 78(5), 563–565 (2001).
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N. Vico Triviño, G. Rossbach, U. Dharanipathy, J. Levrat, A. Castiglia, J. F. Carlin, K. A. Atlasov, R. Butté, R. Houdré, and N. Grandjean, “High quality factor two dimensional GaN photonic crystal cavity membranes grown on silicon substrate,” Appl. Phys. Lett. 100(7), 071103 (2012).
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E. D. Haberer, R. Sharma, A. R. Stonas, S. Nakamura, S. P. DenBaars, and E. L. Hu, “Removal of thick (>100nm) InGaN layers for optical devices using band-gap-selective photoelectrochemical etching,” Appl. Phys. Lett. 85(5), 762–764 (2004).
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K. Rivoire, A. Faraon, and J. Vuckovic, “Gallium phosphide photonic crystal nanocavities in the visible,” Appl. Phys. Lett. 93(6), 063103 (2008).
[Crossref]

ECS Trans. (1)

A. Fischer, G. Subramania, Y.-J. Lee, T. Luk, J. Wendt, and D. Koleske, “Improved InGaN LED Efficiency using Photonic Crystal Patterning and Surface Plasmon Enhanced Emission,” ECS Trans. 13, 5–11 (2008).

Electrochim. Acta (1)

X. Xiao, A. J. Fischer, M. E. Coltrin, P. Lu, D. D. Koleske, G. T. Wang, R. Polsky, and J. Y. Tsao, “Photoelectrochemical etching of epitaxial InGaN thin films: self-limited kinetics and nanostructuring,” Electrochim. Acta 162, 163–168 (2015).
[Crossref]

Electron. Lett. (1)

T. Kouno, K. Kishino, M. Sakai, Y. Inose, A. Kikuchi, and K. Ema, “Stimulated emission on two-dimensional distributed feedback scheme in triangular GaN nanocolumn arrays,” Electron. Lett. 46(9), 644–645 (2010).
[Crossref]

IEEE J. Quantum Electron. (1)

T. S. Kao, T. T. Wu, C. W. Tsao, J. H. Lin, D. W. Lin, S. J. Huang, T. C. Lu, H. C. Kuo, S. C. Wang, and Y. K. Su, “Light Emission Characteristics of Nonpolar $a$ -Plane GaN-Based Photonic Crystal Defect Cavities,” IEEE J. Quantum Electron. 52, 1–7 (2016).
[Crossref]

J. Appl. Phys. (1)

W. Y. Fu, K. K.-Y. Wong, and H. W. Choi, “Room temperature photonic crystal band-edge lasing from nanopillar array on GaN patterned by nanosphere lithography,” J. Appl. Phys. 107(6), 063104 (2010).
[Crossref]

J. Phys. Chem. C (1)

M. E. Coltrin, A. M. Armstrong, I. Brener, W. W. Chow, M. H. Crawford, A. J. Fischer, D. F. Kelley, D. D. Koleske, L. J. Lauhon, J. E. Martin, M. Nyman, E. F. Schubert, L. E. Shea-Rohwer, G. Subramania, J. Y. Tsao, G. T. Wang, J. J. Wierer, and J. B. Wright, “Energy Frontier Research Center for Solid-State Lighting Science: Exploring New Materials Architectures and Light Emission Phenomena,” J. Phys. Chem. C 118(25), 13330–13345 (2014).
[Crossref]

Nano Lett. (1)

X. Xiao, A. J. Fischer, G. T. Wang, P. Lu, D. D. Koleske, M. E. Coltrin, J. B. Wright, S. Liu, I. Brener, G. S. Subramania, and J. Y. Tsao, “Quantum-Size-Controlled Photoelectrochemical Fabrication of Epitaxial InGaN Quantum Dots,” Nano Lett. 14(10), 5616–5620 (2014).
[Crossref] [PubMed]

Nanotechnology (1)

C.-H. Lin, J.-Y. Wang, C.-Y. Chen, K.-C. Shen, D.-M. Yeh, Y.-W. Kiang, and C. C. Yang, “A GaN photonic crystal membrane laser,” Nanotechnology 22(2), 025201 (2011).
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Nat. Commun. (1)

S. Deshpande, J. Heo, A. Das, and P. Bhattacharya, “Electrically driven polarized single-photon emission from an InGaN quantum dot in a GaN nanowire,” Nat. Commun. 4(1), 1675 (2013).
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Nat. Photonics (3)

J. J. Wierer, A. David, and M. M. Megens, “III-nitride photonic-crystal light-emitting diodes with high extraction efficiency,” Nat. Photonics 3(3), 163–169 (2009).
[Crossref]

K. Nozaki, A. Shinya, S. Matsuo, Y. Suzaki, T. Segawa, T. Sato, Y. Kawaguchi, R. Takahashi, and M. Notomi, “Ultralow-power all-optical RAM based on nanocavities,” Nat. Photonics 6(4), 248–252 (2012).
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D. A. Fuhrmann, S. M. Thon, H. Kim, D. Bouwmeester, P. M. Petroff, A. Wixforth, and H. J. Krenner, “Dynamic modulation of photonic crystal nanocavities using gigahertz acoustic phonons,” Nat. Photonics 5(10), 605–609 (2011).
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Nature (1)

Y. Akahane, T. Asano, B.-S. Song, and S. Noda, “High-Q photonic nanocavity in a two-dimensional photonic crystal,” Nature 425(6961), 944–947 (2003).
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New J. Phys. (1)

S. Barik, H. Miyake, W. DeGottardi, E. Waks, and M. Hafezi, “Two-dimensionally confined topological edge states in photonic crystals,” New J. Phys. 18(11), 113013 (2016).
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Opt. Express (6)

Opt. Lett. (1)

Opt. Mater. Express (1)

Phys. Rev. Lett. (1)

L.-H. Wu and X. Hu, “Scheme for Achieving a Topological Photonic Crystal by Using Dielectric Material,” Phys. Rev. Lett. 114(22), 223901 (2015).
[Crossref] [PubMed]

Sci. Rep. (1)

J. B. Wright, S. Liu, G. T. Wang, Q. Li, A. Benz, D. D. Koleske, P. Lu, H. Xu, L. Lester, T. S. Luk, I. Brener, and G. Subramania, “Multi-Colour Nanowire Photonic Crystal Laser Pixels,” Sci. Rep. 3(1), 2982 (2013).
[Crossref] [PubMed]

Science (3)

H. Matsubara, S. Yoshimoto, H. Saito, Y. Jianglin, Y. Tanaka, and S. Noda, “GaN Photonic-Crystal Surface-Emitting Laser at Blue-Violet Wavelengths,” Science 319(5862), 445–447 (2008).
[Crossref] [PubMed]

M. A. Bandres, S. Wittek, G. Harari, M. Parto, J. Ren, M. Segev, D. N. Christodoulides, and M. Khajavikhan, “Topological insulator laser: Experiments,” Science 359(6381), eaar4005 (2018).
[Crossref] [PubMed]

S. Barik, A. Karasahin, C. Flower, T. Cai, H. Miyake, W. DeGottardi, M. Hafezi, and E. Waks, “A topological quantum optics interface,” Science 359(6376), 666–668 (2018).
[Crossref] [PubMed]

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Figures (5)

Fig. 1
Fig. 1 Schematic showing the MOCVD epitaxial growth structure. The inset shows the single quantum well (SQW) active layer and the multiple quantum well (MQW) sacrificial layer.
Fig. 2
Fig. 2 Device fabrication: (a) PECVD of SiO2 (b) EBL patterning and development (c) Flourine based dry etch (d) Chlorine based dry etch and (e) PEC etching. Light green indicates GaN, dark green indicates SiO2, blue indicates PMMA, a single black line represents a SQW structure and a series of black lines represents a MQW structure. (f) Schematic of the QSC-PEC etching setup. A tunable picosecond laser (blue) excites carriers in a III-nitride sample (green) that is partially submerged in an electrolyte solution (clear).(figure adapted from Fig. 1 of Ref [1])
Fig. 3
Fig. 3 (a) Schematic illustration of the shifted-hole L1 PhC cavity indicating vertical shifts (Δy) of top and bottom holes of the cavity and horizontal shifts (Δx) of the two side holes. (b) Simulated E-filed intensity profile of the cavity mode. (c) SEM of a fabricated device. The black scale bar represents a physical length of 500 nm.
Fig. 4
Fig. 4 Room-temperature PL of an (a) unetched reference region and (b) PEC etched reference region after various etch durations. The dashed line in each figure coincides with the wavelength of the laser excitation source.
Fig. 5
Fig. 5 (a) schematic of PL measurement of the PhC cavity (b) Room-temperature PL emission from various regions on a sample. Red represents an unetched reference region, purple represents an etched reference region and black repre-sents an etched device region. The inset shows an optical microscope image of the sample. Markers of corresponding color indicate each region. Scale bar in inset is 5 μm.

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