Abstract

Using two-beam interference lithography and dry etching, we fabricated a mid-IR wire-grid polarizer consisting of a 350nm pitch WSi grating on an Y2O3 ceramic substrate, which has wider transparency than sapphire. The transmittance of TM polarization was greater than 70% in the 37μm wavelength range without antireflection films, and the extinction ratio was over 20dB in the 2.55μm wavelength range. The wire-grid polarizer with the Y2O3 ceramic substrate provides high durability and good IR transparency.

© 2010 Optical Society of America

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