Abstract

We report a 1.02 W coherent light at 193 nm and a 2.15 W coherent light at 221 nm generated by sum-frequency generation in CLBO crystals. The conversion efficiency from 221 nm to 193 nm was about 47%. To the best of our knowledge, this is the highest average power of 193 nm and 221 nm coherent light generated by SFG, respectively. These two DUV coherent lights could be used in many applications such as laser machining for their high photon energy features as well as the high power. The 193 nm coherent light also meets the requirements of injection-seeding hybrid ArF excimer laser.

© 2017 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

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  1. S. Tanaka, M. Arakawa, A. Fuchimukai, Y. Sasaki, T. Onose, Y. Kamba, H. Igarashi, C. Qu, M. Tamiya, H. Oizumi, S. Ito, K. Kakizaki, H. Xuan, Z. Zhao, Y. Kobayashi, and H. Mizoguchi, “Development of high coherence high power 193 nm laser,” Proc. SPIE 9726, 972624 (2016).
    [Crossref]
  2. H. Xuan, Z. Zhao, H. Igarashi, S. Ito, K. Kakizaki, and Y. Kobayashi, “300-mW narrow-linewidth deep-ultraviolet light generation at 193 nm by frequency mixing between Yb-hybrid and Er-fiber lasers,” Opt. Express 23, 10564–10572 (2015).
    [Crossref] [PubMed]
  3. M. Scholz, D. Opalevs, P. Leisching, W. Kaenders, G. Wang, X. Wang, R. Li, and C. Chen, “A bright continuous-wave laser source at 193 nm,” Appl. Phys. Lett.,  103, 051114 (2013).
    [Crossref]
  4. J. Sakuma, Y. Kaneda, N. Oka, T. Ishida, K. Moriizumi, H. Kusunose, and Y. Furukawa, “Continuous-wave 193.4 nm laser with 120 mW output power,” Opt. Lett. 40, 5590 (2015)
    [Crossref] [PubMed]
  5. T. Kanai, X. Wang, S. Adachi, S. Watanabe, and C. Chen, “Watt-level tunable deep ultraviolet light source by a KBBF prism-coupled device,” Opt. Express 17, 8696 (2009)
    [Crossref] [PubMed]
  6. S. Ito, T. Onose, S. Watanabe, T. Kanai, K. Kakizaki, T. Matsunaga, C. Chen, Y. Kobayashi, C. Zhou, J. Fujimoto, H. Mizoguchi, and X. Y. Wang, “A Sub-Watt, Line-narrowing, 193-nm Solid State Laser Operating at 6 kHz with KBBF for Injection-locking ArF excimer laser systems,” in Lasers, Sources, and Related Photonic Devices, OSA Technical Digest (CD) (Optical Society of America, 2012), paper AT4A.7.
    [Crossref]
  7. H. Kawai, A. Tokuhisa, M. Doi, S. Miwa, H. Matsuura, H. Kitano, and S. Owa, “UV light source using fiber amplifier and nonlinear wavelength conversion,” in Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference, Technical Digest (Optical Society of America, 2003), paper CTuT4.
  8. N. Umemura, M. Ando, K. Suzuki, E. Takaoka, K. Kato, Z. Hu, M. Yoshimura, Y. Mori, and T. Sasaki,“200-mW-average power ultraviolet generation at 0.193 µm in K2Al2B2O7,” App. Opt. 42 (15), 2716–2719 (2003)
    [Crossref]
  9. H. Zhang, G. Wang, L. Guo, A. Geng, Y. Bo, D. Cui, Z. Xu, R. Li, Y. Zhu, X. Wang, and C. Chen, “175 to 210 nm widely tunable deep-ultraviolet light generation based on KBBF crystal,” Appl. Phys. B 93, 323–326 (2008).
    [Crossref]
  10. P. Koch, J. Bartschke, and J. A. L’huillier, “All solid-state 191.7 nm deep-UV light source by seventh harmonic generation of an 888 nm pumped, Q-switched 1342 nm Nd: YVO4 laser with excellent beam quality,” Opt. Express 22, 13648–13658 (2014).
    [Crossref] [PubMed]
  11. H. Xuan, C. Qu, S. Ito, and Y. Kobayashi,“High power, and high conversion efficiency deep ultraviolet (DUV) laser at 258 nm generation in the CsLiB6O10 (CLBO) crystal with a beam quality of M2<1.5,” Opt. Lett. 42, 3133–3136 (2017).
    [Crossref] [PubMed]
  12. Z. Zhao, H. Xuan, H. Igarashi, S. Ito, K. Kakizaki, and Y. Kobayashi, “Single frequency, 5 ns, 200 µJ, 1553 nm fiber laser using silica based Er-doped fiber,” Opt. Express 23, 29764–29771 (2015).
    [Crossref] [PubMed]
  13. H. Xuan, Z. Zhao, H. Igarashi, S. Ito, K. Kakizaki, and Y. Kobayashi, “Development of narrow-linewidth Yb- and Er-fiber lasers and frequency mixing for ArF excimer laser seeding,” Proc. SPIE 8961, 89612M (2014).
    [Crossref]
  14. A. V. Smith, “SNLO nonlinear optics code,” AS-Photonics, http://www.as-photonics.com/products/snlo .
  15. N. Umemura, K. Yoshida, T. Kamimura, Y. Mori, T. Sasaki, and K. Kato, “New data on the phase-matching properties of CsLiB6O10,” in Advanced Solid State Lasers, M. Fejer, H. Injeyan, and U. Keller, eds., Vol. 26 of OSA Trends in Optics and Photonics (Optical Society of America, 1999), paper PD15.

2017 (1)

2016 (1)

S. Tanaka, M. Arakawa, A. Fuchimukai, Y. Sasaki, T. Onose, Y. Kamba, H. Igarashi, C. Qu, M. Tamiya, H. Oizumi, S. Ito, K. Kakizaki, H. Xuan, Z. Zhao, Y. Kobayashi, and H. Mizoguchi, “Development of high coherence high power 193 nm laser,” Proc. SPIE 9726, 972624 (2016).
[Crossref]

2015 (3)

2014 (2)

H. Xuan, Z. Zhao, H. Igarashi, S. Ito, K. Kakizaki, and Y. Kobayashi, “Development of narrow-linewidth Yb- and Er-fiber lasers and frequency mixing for ArF excimer laser seeding,” Proc. SPIE 8961, 89612M (2014).
[Crossref]

P. Koch, J. Bartschke, and J. A. L’huillier, “All solid-state 191.7 nm deep-UV light source by seventh harmonic generation of an 888 nm pumped, Q-switched 1342 nm Nd: YVO4 laser with excellent beam quality,” Opt. Express 22, 13648–13658 (2014).
[Crossref] [PubMed]

2013 (1)

M. Scholz, D. Opalevs, P. Leisching, W. Kaenders, G. Wang, X. Wang, R. Li, and C. Chen, “A bright continuous-wave laser source at 193 nm,” Appl. Phys. Lett.,  103, 051114 (2013).
[Crossref]

2009 (1)

2008 (1)

H. Zhang, G. Wang, L. Guo, A. Geng, Y. Bo, D. Cui, Z. Xu, R. Li, Y. Zhu, X. Wang, and C. Chen, “175 to 210 nm widely tunable deep-ultraviolet light generation based on KBBF crystal,” Appl. Phys. B 93, 323–326 (2008).
[Crossref]

2003 (1)

N. Umemura, M. Ando, K. Suzuki, E. Takaoka, K. Kato, Z. Hu, M. Yoshimura, Y. Mori, and T. Sasaki,“200-mW-average power ultraviolet generation at 0.193 µm in K2Al2B2O7,” App. Opt. 42 (15), 2716–2719 (2003)
[Crossref]

Adachi, S.

Ando, M.

N. Umemura, M. Ando, K. Suzuki, E. Takaoka, K. Kato, Z. Hu, M. Yoshimura, Y. Mori, and T. Sasaki,“200-mW-average power ultraviolet generation at 0.193 µm in K2Al2B2O7,” App. Opt. 42 (15), 2716–2719 (2003)
[Crossref]

Arakawa, M.

S. Tanaka, M. Arakawa, A. Fuchimukai, Y. Sasaki, T. Onose, Y. Kamba, H. Igarashi, C. Qu, M. Tamiya, H. Oizumi, S. Ito, K. Kakizaki, H. Xuan, Z. Zhao, Y. Kobayashi, and H. Mizoguchi, “Development of high coherence high power 193 nm laser,” Proc. SPIE 9726, 972624 (2016).
[Crossref]

Bartschke, J.

Bo, Y.

H. Zhang, G. Wang, L. Guo, A. Geng, Y. Bo, D. Cui, Z. Xu, R. Li, Y. Zhu, X. Wang, and C. Chen, “175 to 210 nm widely tunable deep-ultraviolet light generation based on KBBF crystal,” Appl. Phys. B 93, 323–326 (2008).
[Crossref]

Chen, C.

M. Scholz, D. Opalevs, P. Leisching, W. Kaenders, G. Wang, X. Wang, R. Li, and C. Chen, “A bright continuous-wave laser source at 193 nm,” Appl. Phys. Lett.,  103, 051114 (2013).
[Crossref]

T. Kanai, X. Wang, S. Adachi, S. Watanabe, and C. Chen, “Watt-level tunable deep ultraviolet light source by a KBBF prism-coupled device,” Opt. Express 17, 8696 (2009)
[Crossref] [PubMed]

H. Zhang, G. Wang, L. Guo, A. Geng, Y. Bo, D. Cui, Z. Xu, R. Li, Y. Zhu, X. Wang, and C. Chen, “175 to 210 nm widely tunable deep-ultraviolet light generation based on KBBF crystal,” Appl. Phys. B 93, 323–326 (2008).
[Crossref]

S. Ito, T. Onose, S. Watanabe, T. Kanai, K. Kakizaki, T. Matsunaga, C. Chen, Y. Kobayashi, C. Zhou, J. Fujimoto, H. Mizoguchi, and X. Y. Wang, “A Sub-Watt, Line-narrowing, 193-nm Solid State Laser Operating at 6 kHz with KBBF for Injection-locking ArF excimer laser systems,” in Lasers, Sources, and Related Photonic Devices, OSA Technical Digest (CD) (Optical Society of America, 2012), paper AT4A.7.
[Crossref]

Cui, D.

H. Zhang, G. Wang, L. Guo, A. Geng, Y. Bo, D. Cui, Z. Xu, R. Li, Y. Zhu, X. Wang, and C. Chen, “175 to 210 nm widely tunable deep-ultraviolet light generation based on KBBF crystal,” Appl. Phys. B 93, 323–326 (2008).
[Crossref]

Doi, M.

H. Kawai, A. Tokuhisa, M. Doi, S. Miwa, H. Matsuura, H. Kitano, and S. Owa, “UV light source using fiber amplifier and nonlinear wavelength conversion,” in Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference, Technical Digest (Optical Society of America, 2003), paper CTuT4.

Fuchimukai, A.

S. Tanaka, M. Arakawa, A. Fuchimukai, Y. Sasaki, T. Onose, Y. Kamba, H. Igarashi, C. Qu, M. Tamiya, H. Oizumi, S. Ito, K. Kakizaki, H. Xuan, Z. Zhao, Y. Kobayashi, and H. Mizoguchi, “Development of high coherence high power 193 nm laser,” Proc. SPIE 9726, 972624 (2016).
[Crossref]

Fujimoto, J.

S. Ito, T. Onose, S. Watanabe, T. Kanai, K. Kakizaki, T. Matsunaga, C. Chen, Y. Kobayashi, C. Zhou, J. Fujimoto, H. Mizoguchi, and X. Y. Wang, “A Sub-Watt, Line-narrowing, 193-nm Solid State Laser Operating at 6 kHz with KBBF for Injection-locking ArF excimer laser systems,” in Lasers, Sources, and Related Photonic Devices, OSA Technical Digest (CD) (Optical Society of America, 2012), paper AT4A.7.
[Crossref]

Furukawa, Y.

Geng, A.

H. Zhang, G. Wang, L. Guo, A. Geng, Y. Bo, D. Cui, Z. Xu, R. Li, Y. Zhu, X. Wang, and C. Chen, “175 to 210 nm widely tunable deep-ultraviolet light generation based on KBBF crystal,” Appl. Phys. B 93, 323–326 (2008).
[Crossref]

Guo, L.

H. Zhang, G. Wang, L. Guo, A. Geng, Y. Bo, D. Cui, Z. Xu, R. Li, Y. Zhu, X. Wang, and C. Chen, “175 to 210 nm widely tunable deep-ultraviolet light generation based on KBBF crystal,” Appl. Phys. B 93, 323–326 (2008).
[Crossref]

Hu, Z.

N. Umemura, M. Ando, K. Suzuki, E. Takaoka, K. Kato, Z. Hu, M. Yoshimura, Y. Mori, and T. Sasaki,“200-mW-average power ultraviolet generation at 0.193 µm in K2Al2B2O7,” App. Opt. 42 (15), 2716–2719 (2003)
[Crossref]

Igarashi, H.

S. Tanaka, M. Arakawa, A. Fuchimukai, Y. Sasaki, T. Onose, Y. Kamba, H. Igarashi, C. Qu, M. Tamiya, H. Oizumi, S. Ito, K. Kakizaki, H. Xuan, Z. Zhao, Y. Kobayashi, and H. Mizoguchi, “Development of high coherence high power 193 nm laser,” Proc. SPIE 9726, 972624 (2016).
[Crossref]

Z. Zhao, H. Xuan, H. Igarashi, S. Ito, K. Kakizaki, and Y. Kobayashi, “Single frequency, 5 ns, 200 µJ, 1553 nm fiber laser using silica based Er-doped fiber,” Opt. Express 23, 29764–29771 (2015).
[Crossref] [PubMed]

H. Xuan, Z. Zhao, H. Igarashi, S. Ito, K. Kakizaki, and Y. Kobayashi, “300-mW narrow-linewidth deep-ultraviolet light generation at 193 nm by frequency mixing between Yb-hybrid and Er-fiber lasers,” Opt. Express 23, 10564–10572 (2015).
[Crossref] [PubMed]

H. Xuan, Z. Zhao, H. Igarashi, S. Ito, K. Kakizaki, and Y. Kobayashi, “Development of narrow-linewidth Yb- and Er-fiber lasers and frequency mixing for ArF excimer laser seeding,” Proc. SPIE 8961, 89612M (2014).
[Crossref]

Ishida, T.

Ito, S.

H. Xuan, C. Qu, S. Ito, and Y. Kobayashi,“High power, and high conversion efficiency deep ultraviolet (DUV) laser at 258 nm generation in the CsLiB6O10 (CLBO) crystal with a beam quality of M2<1.5,” Opt. Lett. 42, 3133–3136 (2017).
[Crossref] [PubMed]

S. Tanaka, M. Arakawa, A. Fuchimukai, Y. Sasaki, T. Onose, Y. Kamba, H. Igarashi, C. Qu, M. Tamiya, H. Oizumi, S. Ito, K. Kakizaki, H. Xuan, Z. Zhao, Y. Kobayashi, and H. Mizoguchi, “Development of high coherence high power 193 nm laser,” Proc. SPIE 9726, 972624 (2016).
[Crossref]

H. Xuan, Z. Zhao, H. Igarashi, S. Ito, K. Kakizaki, and Y. Kobayashi, “300-mW narrow-linewidth deep-ultraviolet light generation at 193 nm by frequency mixing between Yb-hybrid and Er-fiber lasers,” Opt. Express 23, 10564–10572 (2015).
[Crossref] [PubMed]

Z. Zhao, H. Xuan, H. Igarashi, S. Ito, K. Kakizaki, and Y. Kobayashi, “Single frequency, 5 ns, 200 µJ, 1553 nm fiber laser using silica based Er-doped fiber,” Opt. Express 23, 29764–29771 (2015).
[Crossref] [PubMed]

H. Xuan, Z. Zhao, H. Igarashi, S. Ito, K. Kakizaki, and Y. Kobayashi, “Development of narrow-linewidth Yb- and Er-fiber lasers and frequency mixing for ArF excimer laser seeding,” Proc. SPIE 8961, 89612M (2014).
[Crossref]

S. Ito, T. Onose, S. Watanabe, T. Kanai, K. Kakizaki, T. Matsunaga, C. Chen, Y. Kobayashi, C. Zhou, J. Fujimoto, H. Mizoguchi, and X. Y. Wang, “A Sub-Watt, Line-narrowing, 193-nm Solid State Laser Operating at 6 kHz with KBBF for Injection-locking ArF excimer laser systems,” in Lasers, Sources, and Related Photonic Devices, OSA Technical Digest (CD) (Optical Society of America, 2012), paper AT4A.7.
[Crossref]

Kaenders, W.

M. Scholz, D. Opalevs, P. Leisching, W. Kaenders, G. Wang, X. Wang, R. Li, and C. Chen, “A bright continuous-wave laser source at 193 nm,” Appl. Phys. Lett.,  103, 051114 (2013).
[Crossref]

Kakizaki, K.

S. Tanaka, M. Arakawa, A. Fuchimukai, Y. Sasaki, T. Onose, Y. Kamba, H. Igarashi, C. Qu, M. Tamiya, H. Oizumi, S. Ito, K. Kakizaki, H. Xuan, Z. Zhao, Y. Kobayashi, and H. Mizoguchi, “Development of high coherence high power 193 nm laser,” Proc. SPIE 9726, 972624 (2016).
[Crossref]

Z. Zhao, H. Xuan, H. Igarashi, S. Ito, K. Kakizaki, and Y. Kobayashi, “Single frequency, 5 ns, 200 µJ, 1553 nm fiber laser using silica based Er-doped fiber,” Opt. Express 23, 29764–29771 (2015).
[Crossref] [PubMed]

H. Xuan, Z. Zhao, H. Igarashi, S. Ito, K. Kakizaki, and Y. Kobayashi, “300-mW narrow-linewidth deep-ultraviolet light generation at 193 nm by frequency mixing between Yb-hybrid and Er-fiber lasers,” Opt. Express 23, 10564–10572 (2015).
[Crossref] [PubMed]

H. Xuan, Z. Zhao, H. Igarashi, S. Ito, K. Kakizaki, and Y. Kobayashi, “Development of narrow-linewidth Yb- and Er-fiber lasers and frequency mixing for ArF excimer laser seeding,” Proc. SPIE 8961, 89612M (2014).
[Crossref]

S. Ito, T. Onose, S. Watanabe, T. Kanai, K. Kakizaki, T. Matsunaga, C. Chen, Y. Kobayashi, C. Zhou, J. Fujimoto, H. Mizoguchi, and X. Y. Wang, “A Sub-Watt, Line-narrowing, 193-nm Solid State Laser Operating at 6 kHz with KBBF for Injection-locking ArF excimer laser systems,” in Lasers, Sources, and Related Photonic Devices, OSA Technical Digest (CD) (Optical Society of America, 2012), paper AT4A.7.
[Crossref]

Kamba, Y.

S. Tanaka, M. Arakawa, A. Fuchimukai, Y. Sasaki, T. Onose, Y. Kamba, H. Igarashi, C. Qu, M. Tamiya, H. Oizumi, S. Ito, K. Kakizaki, H. Xuan, Z. Zhao, Y. Kobayashi, and H. Mizoguchi, “Development of high coherence high power 193 nm laser,” Proc. SPIE 9726, 972624 (2016).
[Crossref]

Kamimura, T.

N. Umemura, K. Yoshida, T. Kamimura, Y. Mori, T. Sasaki, and K. Kato, “New data on the phase-matching properties of CsLiB6O10,” in Advanced Solid State Lasers, M. Fejer, H. Injeyan, and U. Keller, eds., Vol. 26 of OSA Trends in Optics and Photonics (Optical Society of America, 1999), paper PD15.

Kanai, T.

T. Kanai, X. Wang, S. Adachi, S. Watanabe, and C. Chen, “Watt-level tunable deep ultraviolet light source by a KBBF prism-coupled device,” Opt. Express 17, 8696 (2009)
[Crossref] [PubMed]

S. Ito, T. Onose, S. Watanabe, T. Kanai, K. Kakizaki, T. Matsunaga, C. Chen, Y. Kobayashi, C. Zhou, J. Fujimoto, H. Mizoguchi, and X. Y. Wang, “A Sub-Watt, Line-narrowing, 193-nm Solid State Laser Operating at 6 kHz with KBBF for Injection-locking ArF excimer laser systems,” in Lasers, Sources, and Related Photonic Devices, OSA Technical Digest (CD) (Optical Society of America, 2012), paper AT4A.7.
[Crossref]

Kaneda, Y.

Kato, K.

N. Umemura, M. Ando, K. Suzuki, E. Takaoka, K. Kato, Z. Hu, M. Yoshimura, Y. Mori, and T. Sasaki,“200-mW-average power ultraviolet generation at 0.193 µm in K2Al2B2O7,” App. Opt. 42 (15), 2716–2719 (2003)
[Crossref]

N. Umemura, K. Yoshida, T. Kamimura, Y. Mori, T. Sasaki, and K. Kato, “New data on the phase-matching properties of CsLiB6O10,” in Advanced Solid State Lasers, M. Fejer, H. Injeyan, and U. Keller, eds., Vol. 26 of OSA Trends in Optics and Photonics (Optical Society of America, 1999), paper PD15.

Kawai, H.

H. Kawai, A. Tokuhisa, M. Doi, S. Miwa, H. Matsuura, H. Kitano, and S. Owa, “UV light source using fiber amplifier and nonlinear wavelength conversion,” in Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference, Technical Digest (Optical Society of America, 2003), paper CTuT4.

Kitano, H.

H. Kawai, A. Tokuhisa, M. Doi, S. Miwa, H. Matsuura, H. Kitano, and S. Owa, “UV light source using fiber amplifier and nonlinear wavelength conversion,” in Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference, Technical Digest (Optical Society of America, 2003), paper CTuT4.

Kobayashi, Y.

H. Xuan, C. Qu, S. Ito, and Y. Kobayashi,“High power, and high conversion efficiency deep ultraviolet (DUV) laser at 258 nm generation in the CsLiB6O10 (CLBO) crystal with a beam quality of M2<1.5,” Opt. Lett. 42, 3133–3136 (2017).
[Crossref] [PubMed]

S. Tanaka, M. Arakawa, A. Fuchimukai, Y. Sasaki, T. Onose, Y. Kamba, H. Igarashi, C. Qu, M. Tamiya, H. Oizumi, S. Ito, K. Kakizaki, H. Xuan, Z. Zhao, Y. Kobayashi, and H. Mizoguchi, “Development of high coherence high power 193 nm laser,” Proc. SPIE 9726, 972624 (2016).
[Crossref]

Z. Zhao, H. Xuan, H. Igarashi, S. Ito, K. Kakizaki, and Y. Kobayashi, “Single frequency, 5 ns, 200 µJ, 1553 nm fiber laser using silica based Er-doped fiber,” Opt. Express 23, 29764–29771 (2015).
[Crossref] [PubMed]

H. Xuan, Z. Zhao, H. Igarashi, S. Ito, K. Kakizaki, and Y. Kobayashi, “300-mW narrow-linewidth deep-ultraviolet light generation at 193 nm by frequency mixing between Yb-hybrid and Er-fiber lasers,” Opt. Express 23, 10564–10572 (2015).
[Crossref] [PubMed]

H. Xuan, Z. Zhao, H. Igarashi, S. Ito, K. Kakizaki, and Y. Kobayashi, “Development of narrow-linewidth Yb- and Er-fiber lasers and frequency mixing for ArF excimer laser seeding,” Proc. SPIE 8961, 89612M (2014).
[Crossref]

S. Ito, T. Onose, S. Watanabe, T. Kanai, K. Kakizaki, T. Matsunaga, C. Chen, Y. Kobayashi, C. Zhou, J. Fujimoto, H. Mizoguchi, and X. Y. Wang, “A Sub-Watt, Line-narrowing, 193-nm Solid State Laser Operating at 6 kHz with KBBF for Injection-locking ArF excimer laser systems,” in Lasers, Sources, and Related Photonic Devices, OSA Technical Digest (CD) (Optical Society of America, 2012), paper AT4A.7.
[Crossref]

Koch, P.

Kusunose, H.

L’huillier, J. A.

Leisching, P.

M. Scholz, D. Opalevs, P. Leisching, W. Kaenders, G. Wang, X. Wang, R. Li, and C. Chen, “A bright continuous-wave laser source at 193 nm,” Appl. Phys. Lett.,  103, 051114 (2013).
[Crossref]

Li, R.

M. Scholz, D. Opalevs, P. Leisching, W. Kaenders, G. Wang, X. Wang, R. Li, and C. Chen, “A bright continuous-wave laser source at 193 nm,” Appl. Phys. Lett.,  103, 051114 (2013).
[Crossref]

H. Zhang, G. Wang, L. Guo, A. Geng, Y. Bo, D. Cui, Z. Xu, R. Li, Y. Zhu, X. Wang, and C. Chen, “175 to 210 nm widely tunable deep-ultraviolet light generation based on KBBF crystal,” Appl. Phys. B 93, 323–326 (2008).
[Crossref]

Matsunaga, T.

S. Ito, T. Onose, S. Watanabe, T. Kanai, K. Kakizaki, T. Matsunaga, C. Chen, Y. Kobayashi, C. Zhou, J. Fujimoto, H. Mizoguchi, and X. Y. Wang, “A Sub-Watt, Line-narrowing, 193-nm Solid State Laser Operating at 6 kHz with KBBF for Injection-locking ArF excimer laser systems,” in Lasers, Sources, and Related Photonic Devices, OSA Technical Digest (CD) (Optical Society of America, 2012), paper AT4A.7.
[Crossref]

Matsuura, H.

H. Kawai, A. Tokuhisa, M. Doi, S. Miwa, H. Matsuura, H. Kitano, and S. Owa, “UV light source using fiber amplifier and nonlinear wavelength conversion,” in Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference, Technical Digest (Optical Society of America, 2003), paper CTuT4.

Miwa, S.

H. Kawai, A. Tokuhisa, M. Doi, S. Miwa, H. Matsuura, H. Kitano, and S. Owa, “UV light source using fiber amplifier and nonlinear wavelength conversion,” in Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference, Technical Digest (Optical Society of America, 2003), paper CTuT4.

Mizoguchi, H.

S. Tanaka, M. Arakawa, A. Fuchimukai, Y. Sasaki, T. Onose, Y. Kamba, H. Igarashi, C. Qu, M. Tamiya, H. Oizumi, S. Ito, K. Kakizaki, H. Xuan, Z. Zhao, Y. Kobayashi, and H. Mizoguchi, “Development of high coherence high power 193 nm laser,” Proc. SPIE 9726, 972624 (2016).
[Crossref]

S. Ito, T. Onose, S. Watanabe, T. Kanai, K. Kakizaki, T. Matsunaga, C. Chen, Y. Kobayashi, C. Zhou, J. Fujimoto, H. Mizoguchi, and X. Y. Wang, “A Sub-Watt, Line-narrowing, 193-nm Solid State Laser Operating at 6 kHz with KBBF for Injection-locking ArF excimer laser systems,” in Lasers, Sources, and Related Photonic Devices, OSA Technical Digest (CD) (Optical Society of America, 2012), paper AT4A.7.
[Crossref]

Mori, Y.

N. Umemura, M. Ando, K. Suzuki, E. Takaoka, K. Kato, Z. Hu, M. Yoshimura, Y. Mori, and T. Sasaki,“200-mW-average power ultraviolet generation at 0.193 µm in K2Al2B2O7,” App. Opt. 42 (15), 2716–2719 (2003)
[Crossref]

N. Umemura, K. Yoshida, T. Kamimura, Y. Mori, T. Sasaki, and K. Kato, “New data on the phase-matching properties of CsLiB6O10,” in Advanced Solid State Lasers, M. Fejer, H. Injeyan, and U. Keller, eds., Vol. 26 of OSA Trends in Optics and Photonics (Optical Society of America, 1999), paper PD15.

Moriizumi, K.

Oizumi, H.

S. Tanaka, M. Arakawa, A. Fuchimukai, Y. Sasaki, T. Onose, Y. Kamba, H. Igarashi, C. Qu, M. Tamiya, H. Oizumi, S. Ito, K. Kakizaki, H. Xuan, Z. Zhao, Y. Kobayashi, and H. Mizoguchi, “Development of high coherence high power 193 nm laser,” Proc. SPIE 9726, 972624 (2016).
[Crossref]

Oka, N.

Onose, T.

S. Tanaka, M. Arakawa, A. Fuchimukai, Y. Sasaki, T. Onose, Y. Kamba, H. Igarashi, C. Qu, M. Tamiya, H. Oizumi, S. Ito, K. Kakizaki, H. Xuan, Z. Zhao, Y. Kobayashi, and H. Mizoguchi, “Development of high coherence high power 193 nm laser,” Proc. SPIE 9726, 972624 (2016).
[Crossref]

S. Ito, T. Onose, S. Watanabe, T. Kanai, K. Kakizaki, T. Matsunaga, C. Chen, Y. Kobayashi, C. Zhou, J. Fujimoto, H. Mizoguchi, and X. Y. Wang, “A Sub-Watt, Line-narrowing, 193-nm Solid State Laser Operating at 6 kHz with KBBF for Injection-locking ArF excimer laser systems,” in Lasers, Sources, and Related Photonic Devices, OSA Technical Digest (CD) (Optical Society of America, 2012), paper AT4A.7.
[Crossref]

Opalevs, D.

M. Scholz, D. Opalevs, P. Leisching, W. Kaenders, G. Wang, X. Wang, R. Li, and C. Chen, “A bright continuous-wave laser source at 193 nm,” Appl. Phys. Lett.,  103, 051114 (2013).
[Crossref]

Owa, S.

H. Kawai, A. Tokuhisa, M. Doi, S. Miwa, H. Matsuura, H. Kitano, and S. Owa, “UV light source using fiber amplifier and nonlinear wavelength conversion,” in Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference, Technical Digest (Optical Society of America, 2003), paper CTuT4.

Qu, C.

H. Xuan, C. Qu, S. Ito, and Y. Kobayashi,“High power, and high conversion efficiency deep ultraviolet (DUV) laser at 258 nm generation in the CsLiB6O10 (CLBO) crystal with a beam quality of M2<1.5,” Opt. Lett. 42, 3133–3136 (2017).
[Crossref] [PubMed]

S. Tanaka, M. Arakawa, A. Fuchimukai, Y. Sasaki, T. Onose, Y. Kamba, H. Igarashi, C. Qu, M. Tamiya, H. Oizumi, S. Ito, K. Kakizaki, H. Xuan, Z. Zhao, Y. Kobayashi, and H. Mizoguchi, “Development of high coherence high power 193 nm laser,” Proc. SPIE 9726, 972624 (2016).
[Crossref]

Sakuma, J.

Sasaki, T.

N. Umemura, M. Ando, K. Suzuki, E. Takaoka, K. Kato, Z. Hu, M. Yoshimura, Y. Mori, and T. Sasaki,“200-mW-average power ultraviolet generation at 0.193 µm in K2Al2B2O7,” App. Opt. 42 (15), 2716–2719 (2003)
[Crossref]

N. Umemura, K. Yoshida, T. Kamimura, Y. Mori, T. Sasaki, and K. Kato, “New data on the phase-matching properties of CsLiB6O10,” in Advanced Solid State Lasers, M. Fejer, H. Injeyan, and U. Keller, eds., Vol. 26 of OSA Trends in Optics and Photonics (Optical Society of America, 1999), paper PD15.

Sasaki, Y.

S. Tanaka, M. Arakawa, A. Fuchimukai, Y. Sasaki, T. Onose, Y. Kamba, H. Igarashi, C. Qu, M. Tamiya, H. Oizumi, S. Ito, K. Kakizaki, H. Xuan, Z. Zhao, Y. Kobayashi, and H. Mizoguchi, “Development of high coherence high power 193 nm laser,” Proc. SPIE 9726, 972624 (2016).
[Crossref]

Scholz, M.

M. Scholz, D. Opalevs, P. Leisching, W. Kaenders, G. Wang, X. Wang, R. Li, and C. Chen, “A bright continuous-wave laser source at 193 nm,” Appl. Phys. Lett.,  103, 051114 (2013).
[Crossref]

Suzuki, K.

N. Umemura, M. Ando, K. Suzuki, E. Takaoka, K. Kato, Z. Hu, M. Yoshimura, Y. Mori, and T. Sasaki,“200-mW-average power ultraviolet generation at 0.193 µm in K2Al2B2O7,” App. Opt. 42 (15), 2716–2719 (2003)
[Crossref]

Takaoka, E.

N. Umemura, M. Ando, K. Suzuki, E. Takaoka, K. Kato, Z. Hu, M. Yoshimura, Y. Mori, and T. Sasaki,“200-mW-average power ultraviolet generation at 0.193 µm in K2Al2B2O7,” App. Opt. 42 (15), 2716–2719 (2003)
[Crossref]

Tamiya, M.

S. Tanaka, M. Arakawa, A. Fuchimukai, Y. Sasaki, T. Onose, Y. Kamba, H. Igarashi, C. Qu, M. Tamiya, H. Oizumi, S. Ito, K. Kakizaki, H. Xuan, Z. Zhao, Y. Kobayashi, and H. Mizoguchi, “Development of high coherence high power 193 nm laser,” Proc. SPIE 9726, 972624 (2016).
[Crossref]

Tanaka, S.

S. Tanaka, M. Arakawa, A. Fuchimukai, Y. Sasaki, T. Onose, Y. Kamba, H. Igarashi, C. Qu, M. Tamiya, H. Oizumi, S. Ito, K. Kakizaki, H. Xuan, Z. Zhao, Y. Kobayashi, and H. Mizoguchi, “Development of high coherence high power 193 nm laser,” Proc. SPIE 9726, 972624 (2016).
[Crossref]

Tokuhisa, A.

H. Kawai, A. Tokuhisa, M. Doi, S. Miwa, H. Matsuura, H. Kitano, and S. Owa, “UV light source using fiber amplifier and nonlinear wavelength conversion,” in Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference, Technical Digest (Optical Society of America, 2003), paper CTuT4.

Umemura, N.

N. Umemura, M. Ando, K. Suzuki, E. Takaoka, K. Kato, Z. Hu, M. Yoshimura, Y. Mori, and T. Sasaki,“200-mW-average power ultraviolet generation at 0.193 µm in K2Al2B2O7,” App. Opt. 42 (15), 2716–2719 (2003)
[Crossref]

N. Umemura, K. Yoshida, T. Kamimura, Y. Mori, T. Sasaki, and K. Kato, “New data on the phase-matching properties of CsLiB6O10,” in Advanced Solid State Lasers, M. Fejer, H. Injeyan, and U. Keller, eds., Vol. 26 of OSA Trends in Optics and Photonics (Optical Society of America, 1999), paper PD15.

Wang, G.

M. Scholz, D. Opalevs, P. Leisching, W. Kaenders, G. Wang, X. Wang, R. Li, and C. Chen, “A bright continuous-wave laser source at 193 nm,” Appl. Phys. Lett.,  103, 051114 (2013).
[Crossref]

H. Zhang, G. Wang, L. Guo, A. Geng, Y. Bo, D. Cui, Z. Xu, R. Li, Y. Zhu, X. Wang, and C. Chen, “175 to 210 nm widely tunable deep-ultraviolet light generation based on KBBF crystal,” Appl. Phys. B 93, 323–326 (2008).
[Crossref]

Wang, X.

M. Scholz, D. Opalevs, P. Leisching, W. Kaenders, G. Wang, X. Wang, R. Li, and C. Chen, “A bright continuous-wave laser source at 193 nm,” Appl. Phys. Lett.,  103, 051114 (2013).
[Crossref]

T. Kanai, X. Wang, S. Adachi, S. Watanabe, and C. Chen, “Watt-level tunable deep ultraviolet light source by a KBBF prism-coupled device,” Opt. Express 17, 8696 (2009)
[Crossref] [PubMed]

H. Zhang, G. Wang, L. Guo, A. Geng, Y. Bo, D. Cui, Z. Xu, R. Li, Y. Zhu, X. Wang, and C. Chen, “175 to 210 nm widely tunable deep-ultraviolet light generation based on KBBF crystal,” Appl. Phys. B 93, 323–326 (2008).
[Crossref]

Wang, X. Y.

S. Ito, T. Onose, S. Watanabe, T. Kanai, K. Kakizaki, T. Matsunaga, C. Chen, Y. Kobayashi, C. Zhou, J. Fujimoto, H. Mizoguchi, and X. Y. Wang, “A Sub-Watt, Line-narrowing, 193-nm Solid State Laser Operating at 6 kHz with KBBF for Injection-locking ArF excimer laser systems,” in Lasers, Sources, and Related Photonic Devices, OSA Technical Digest (CD) (Optical Society of America, 2012), paper AT4A.7.
[Crossref]

Watanabe, S.

T. Kanai, X. Wang, S. Adachi, S. Watanabe, and C. Chen, “Watt-level tunable deep ultraviolet light source by a KBBF prism-coupled device,” Opt. Express 17, 8696 (2009)
[Crossref] [PubMed]

S. Ito, T. Onose, S. Watanabe, T. Kanai, K. Kakizaki, T. Matsunaga, C. Chen, Y. Kobayashi, C. Zhou, J. Fujimoto, H. Mizoguchi, and X. Y. Wang, “A Sub-Watt, Line-narrowing, 193-nm Solid State Laser Operating at 6 kHz with KBBF for Injection-locking ArF excimer laser systems,” in Lasers, Sources, and Related Photonic Devices, OSA Technical Digest (CD) (Optical Society of America, 2012), paper AT4A.7.
[Crossref]

Xu, Z.

H. Zhang, G. Wang, L. Guo, A. Geng, Y. Bo, D. Cui, Z. Xu, R. Li, Y. Zhu, X. Wang, and C. Chen, “175 to 210 nm widely tunable deep-ultraviolet light generation based on KBBF crystal,” Appl. Phys. B 93, 323–326 (2008).
[Crossref]

Xuan, H.

Yoshida, K.

N. Umemura, K. Yoshida, T. Kamimura, Y. Mori, T. Sasaki, and K. Kato, “New data on the phase-matching properties of CsLiB6O10,” in Advanced Solid State Lasers, M. Fejer, H. Injeyan, and U. Keller, eds., Vol. 26 of OSA Trends in Optics and Photonics (Optical Society of America, 1999), paper PD15.

Yoshimura, M.

N. Umemura, M. Ando, K. Suzuki, E. Takaoka, K. Kato, Z. Hu, M. Yoshimura, Y. Mori, and T. Sasaki,“200-mW-average power ultraviolet generation at 0.193 µm in K2Al2B2O7,” App. Opt. 42 (15), 2716–2719 (2003)
[Crossref]

Zhang, H.

H. Zhang, G. Wang, L. Guo, A. Geng, Y. Bo, D. Cui, Z. Xu, R. Li, Y. Zhu, X. Wang, and C. Chen, “175 to 210 nm widely tunable deep-ultraviolet light generation based on KBBF crystal,” Appl. Phys. B 93, 323–326 (2008).
[Crossref]

Zhao, Z.

S. Tanaka, M. Arakawa, A. Fuchimukai, Y. Sasaki, T. Onose, Y. Kamba, H. Igarashi, C. Qu, M. Tamiya, H. Oizumi, S. Ito, K. Kakizaki, H. Xuan, Z. Zhao, Y. Kobayashi, and H. Mizoguchi, “Development of high coherence high power 193 nm laser,” Proc. SPIE 9726, 972624 (2016).
[Crossref]

H. Xuan, Z. Zhao, H. Igarashi, S. Ito, K. Kakizaki, and Y. Kobayashi, “300-mW narrow-linewidth deep-ultraviolet light generation at 193 nm by frequency mixing between Yb-hybrid and Er-fiber lasers,” Opt. Express 23, 10564–10572 (2015).
[Crossref] [PubMed]

Z. Zhao, H. Xuan, H. Igarashi, S. Ito, K. Kakizaki, and Y. Kobayashi, “Single frequency, 5 ns, 200 µJ, 1553 nm fiber laser using silica based Er-doped fiber,” Opt. Express 23, 29764–29771 (2015).
[Crossref] [PubMed]

H. Xuan, Z. Zhao, H. Igarashi, S. Ito, K. Kakizaki, and Y. Kobayashi, “Development of narrow-linewidth Yb- and Er-fiber lasers and frequency mixing for ArF excimer laser seeding,” Proc. SPIE 8961, 89612M (2014).
[Crossref]

Zhou, C.

S. Ito, T. Onose, S. Watanabe, T. Kanai, K. Kakizaki, T. Matsunaga, C. Chen, Y. Kobayashi, C. Zhou, J. Fujimoto, H. Mizoguchi, and X. Y. Wang, “A Sub-Watt, Line-narrowing, 193-nm Solid State Laser Operating at 6 kHz with KBBF for Injection-locking ArF excimer laser systems,” in Lasers, Sources, and Related Photonic Devices, OSA Technical Digest (CD) (Optical Society of America, 2012), paper AT4A.7.
[Crossref]

Zhu, Y.

H. Zhang, G. Wang, L. Guo, A. Geng, Y. Bo, D. Cui, Z. Xu, R. Li, Y. Zhu, X. Wang, and C. Chen, “175 to 210 nm widely tunable deep-ultraviolet light generation based on KBBF crystal,” Appl. Phys. B 93, 323–326 (2008).
[Crossref]

App. Opt. (1)

N. Umemura, M. Ando, K. Suzuki, E. Takaoka, K. Kato, Z. Hu, M. Yoshimura, Y. Mori, and T. Sasaki,“200-mW-average power ultraviolet generation at 0.193 µm in K2Al2B2O7,” App. Opt. 42 (15), 2716–2719 (2003)
[Crossref]

Appl. Phys. B (1)

H. Zhang, G. Wang, L. Guo, A. Geng, Y. Bo, D. Cui, Z. Xu, R. Li, Y. Zhu, X. Wang, and C. Chen, “175 to 210 nm widely tunable deep-ultraviolet light generation based on KBBF crystal,” Appl. Phys. B 93, 323–326 (2008).
[Crossref]

Appl. Phys. Lett. (1)

M. Scholz, D. Opalevs, P. Leisching, W. Kaenders, G. Wang, X. Wang, R. Li, and C. Chen, “A bright continuous-wave laser source at 193 nm,” Appl. Phys. Lett.,  103, 051114 (2013).
[Crossref]

Opt. Express (4)

Opt. Lett. (2)

Proc. SPIE (2)

S. Tanaka, M. Arakawa, A. Fuchimukai, Y. Sasaki, T. Onose, Y. Kamba, H. Igarashi, C. Qu, M. Tamiya, H. Oizumi, S. Ito, K. Kakizaki, H. Xuan, Z. Zhao, Y. Kobayashi, and H. Mizoguchi, “Development of high coherence high power 193 nm laser,” Proc. SPIE 9726, 972624 (2016).
[Crossref]

H. Xuan, Z. Zhao, H. Igarashi, S. Ito, K. Kakizaki, and Y. Kobayashi, “Development of narrow-linewidth Yb- and Er-fiber lasers and frequency mixing for ArF excimer laser seeding,” Proc. SPIE 8961, 89612M (2014).
[Crossref]

Other (4)

A. V. Smith, “SNLO nonlinear optics code,” AS-Photonics, http://www.as-photonics.com/products/snlo .

N. Umemura, K. Yoshida, T. Kamimura, Y. Mori, T. Sasaki, and K. Kato, “New data on the phase-matching properties of CsLiB6O10,” in Advanced Solid State Lasers, M. Fejer, H. Injeyan, and U. Keller, eds., Vol. 26 of OSA Trends in Optics and Photonics (Optical Society of America, 1999), paper PD15.

S. Ito, T. Onose, S. Watanabe, T. Kanai, K. Kakizaki, T. Matsunaga, C. Chen, Y. Kobayashi, C. Zhou, J. Fujimoto, H. Mizoguchi, and X. Y. Wang, “A Sub-Watt, Line-narrowing, 193-nm Solid State Laser Operating at 6 kHz with KBBF for Injection-locking ArF excimer laser systems,” in Lasers, Sources, and Related Photonic Devices, OSA Technical Digest (CD) (Optical Society of America, 2012), paper AT4A.7.
[Crossref]

H. Kawai, A. Tokuhisa, M. Doi, S. Miwa, H. Matsuura, H. Kitano, and S. Owa, “UV light source using fiber amplifier and nonlinear wavelength conversion,” in Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference, Technical Digest (Optical Society of America, 2003), paper CTuT4.

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Figures (7)

Fig. 1
Fig. 1 Current status of solid-state 193 nm DUV coherent light;CW, continuous-wave.
Fig. 2
Fig. 2 Schematics diagram of the 1 W DUV coherent light generation at 193 nm.
Fig. 3
Fig. 3 Experimental setup of the 1 W 193 nm coherent light.
Fig. 4
Fig. 4 (a) Average output power and frequency conversion efficiency for varying pump power resulting from 258 nm to 221 nm; (b) Beam size change of 258 nm laser at different powers.
Fig. 5
Fig. 5 (a) Average output power and frequency conversion efficiency for varying pump power resulting from 221 nm to 193 nm; (b) Power stability of the generated 193 nm coherent light in 30 minutes.
Fig. 6
Fig. 6 (a) Pulse duration of the NIR laser at 1553 nm; (b) Beam profile of the NIR laser at 1553 nm.
Fig. 7
Fig. 7 (a) Beam profile of DUV coherent light at 221 nm; (b) Beam profile of DUV coherent light at 193 nm; (c) Pulse duration of 221 nm coherent light; (d) Pulse duration of 193 nm coherent light.

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