X. Li, W. Gao, H. Muto, Y. Shimizu, S. Ito, and S. Dian, “A six-degree-of-freedom surface encoder for precision positioning of a planar motion stage,” Precis. Eng. 37(3), 771–781 (2013).

[Crossref]

F. Qibo, Z. Bin, C. Cunxing, K. Cuifang, Z. Yusheng, and Y. Fenglin, “Development of a simple system for simultaneously measuring 6DOF geometric motion errors of a linear guide,” Opt. Express 21(22), 25805–25819 (2013).

[Crossref]
[PubMed]

C. Lee, G. H. Kim, and S.-K. Lee, “Design and construction of a single unit multi-function optical encoder for a six-degree-of-freedom motion error measurement in an ultraprecision linear stage,” Meas. Sci. Technol. 22(10), 105901 (2011).

[Crossref]

C. Kuang, E. Hong, and Q. Feng, “High-accuracy method for measuring two-dimensional angles of a linear guideway,” Opt. Eng. 46(5), 051016 (2007).

[Crossref]

C.-H. Liu, W.-Y. Jywe, C.-C. Hsu, and T.-H. Hsu, “Development of a laser-based high-precision six-degrees-of-freedom motion errors measuring system for linear stage,” Rev. Sci. Instrum. 76(5), 055110 (2005).

[Crossref]

Q. Feng, B. Zhang, and C. Kuang, “A straightness measurement system using a single-mode fiber-coupled laser module,” Opt. Laser Technol. 36(4), 279–283 (2004).

[Crossref]

W. Gao, P. S. Huang, T. Yamada, and S. Kiyono, “A compact and sensitive two-dimensional angle probe for flatness measurement of large silicon wafers,” Precis. Eng. 26(4), 396–404 (2002).

[Crossref]

J.-A. Kim, K.-C. Kim, E. W. Bae, S. Kim, and Y. K. Kwak, “Six-degree-of-freedom displacement measurement system using a diffraction grating,” Rev. Sci. Instrum. 71(8), 3214–3219 (2000).

[Crossref]

K.-C. Fan and M.-J. Chen, “A 6-degree-of-freedom measurement system for the accuracy of XY stages,” Precis. Eng. 24(1), 15–23 (2000).

[Crossref]

A. C. Okafor and Y. M. Ertekin, “Vertical machining center accuracy characterization using laser interferometer: part 1. Linear positional errors,” J. Mater. Process. Technol. 105(3), 394–406 (2000).

[Crossref]

A. C. Okafor and Y. M. Ertekin, “Vertical machining center accuracy characterization using laser interferometer: part 2. Angular errors,” J. Mater. Process. Technol. 105(3), 407–420 (2000).

[Crossref]

K.-C. Fan, M.-J. Chen, and W. Huang, “A six-degree-of-freedom measurement system for the motion accuracy of linear stages,” Int. J. Mach. Tools Manuf. 38(3), 155–164 (1998).

[Crossref]

P. Huang and J. Ni, “On-line error compensation of coordinate measuring machines,” Int. J. Mach. Tools Manuf. 35(5), 725–738 (1995).

[Crossref]

S. Shimizu, H.-s. Lee, and N. Imai, “Simultaneous measuring method of table motion errors in 6 degrees of freedom,” Int. J. Jpn Soc. Precis. Eng. 28, 273–274 (1994).

N. Bobroff, “Recent advances in displacement measuring interferometry,” Meas. Sci. Technol. 4(9), 907–926 (1993).

[Crossref]

J. Ni, P. Huang, and S. Wu, “A multi-degree-of-freedom measuring system for CMM geometric errors,” J. Eng. Ind. 114, 362–369 (1992).

J.-A. Kim, K.-C. Kim, E. W. Bae, S. Kim, and Y. K. Kwak, “Six-degree-of-freedom displacement measurement system using a diffraction grating,” Rev. Sci. Instrum. 71(8), 3214–3219 (2000).

[Crossref]

N. Bobroff, “Recent advances in displacement measuring interferometry,” Meas. Sci. Technol. 4(9), 907–926 (1993).

[Crossref]

K.-C. Fan and M.-J. Chen, “A 6-degree-of-freedom measurement system for the accuracy of XY stages,” Precis. Eng. 24(1), 15–23 (2000).

[Crossref]

K.-C. Fan, M.-J. Chen, and W. Huang, “A six-degree-of-freedom measurement system for the motion accuracy of linear stages,” Int. J. Mach. Tools Manuf. 38(3), 155–164 (1998).

[Crossref]

C. Cui, Q. Feng, and B. Zhang, “Compensation for straightness measurement systematic errors in six degree-of-freedom motion error simultaneous measurement system,” Appl. Opt. 54(11), 3122–3131 (2015).

[Crossref]
[PubMed]

T. Zhang, Q. Feng, C. Cui, and B. Zhang, “Research on error compensation method for dual-beam measurement of roll angle based on rhombic prism,” Chin. Opt. Lett. 12(7), 071201 (2014).

[Crossref]

X. Li, W. Gao, H. Muto, Y. Shimizu, S. Ito, and S. Dian, “A six-degree-of-freedom surface encoder for precision positioning of a planar motion stage,” Precis. Eng. 37(3), 771–781 (2013).

[Crossref]

A. C. Okafor and Y. M. Ertekin, “Vertical machining center accuracy characterization using laser interferometer: part 1. Linear positional errors,” J. Mater. Process. Technol. 105(3), 394–406 (2000).

[Crossref]

A. C. Okafor and Y. M. Ertekin, “Vertical machining center accuracy characterization using laser interferometer: part 2. Angular errors,” J. Mater. Process. Technol. 105(3), 407–420 (2000).

[Crossref]

K.-C. Fan and M.-J. Chen, “A 6-degree-of-freedom measurement system for the accuracy of XY stages,” Precis. Eng. 24(1), 15–23 (2000).

[Crossref]

K.-C. Fan, M.-J. Chen, and W. Huang, “A six-degree-of-freedom measurement system for the motion accuracy of linear stages,” Int. J. Mach. Tools Manuf. 38(3), 155–164 (1998).

[Crossref]

C. Cui, Q. Feng, and B. Zhang, “Compensation for straightness measurement systematic errors in six degree-of-freedom motion error simultaneous measurement system,” Appl. Opt. 54(11), 3122–3131 (2015).

[Crossref]
[PubMed]

T. Zhang, Q. Feng, C. Cui, and B. Zhang, “Research on error compensation method for dual-beam measurement of roll angle based on rhombic prism,” Chin. Opt. Lett. 12(7), 071201 (2014).

[Crossref]

C. Kuang, E. Hong, and Q. Feng, “High-accuracy method for measuring two-dimensional angles of a linear guideway,” Opt. Eng. 46(5), 051016 (2007).

[Crossref]

Q. Feng, B. Zhang, and C. Kuang, “A straightness measurement system using a single-mode fiber-coupled laser module,” Opt. Laser Technol. 36(4), 279–283 (2004).

[Crossref]

X. Li, W. Gao, H. Muto, Y. Shimizu, S. Ito, and S. Dian, “A six-degree-of-freedom surface encoder for precision positioning of a planar motion stage,” Precis. Eng. 37(3), 771–781 (2013).

[Crossref]

W. Gao, P. S. Huang, T. Yamada, and S. Kiyono, “A compact and sensitive two-dimensional angle probe for flatness measurement of large silicon wafers,” Precis. Eng. 26(4), 396–404 (2002).

[Crossref]

C. Kuang, E. Hong, and Q. Feng, “High-accuracy method for measuring two-dimensional angles of a linear guideway,” Opt. Eng. 46(5), 051016 (2007).

[Crossref]

C.-H. Liu, W.-Y. Jywe, C.-C. Hsu, and T.-H. Hsu, “Development of a laser-based high-precision six-degrees-of-freedom motion errors measuring system for linear stage,” Rev. Sci. Instrum. 76(5), 055110 (2005).

[Crossref]

C.-H. Liu, W.-Y. Jywe, C.-C. Hsu, and T.-H. Hsu, “Development of a laser-based high-precision six-degrees-of-freedom motion errors measuring system for linear stage,” Rev. Sci. Instrum. 76(5), 055110 (2005).

[Crossref]

P. Huang and J. Ni, “On-line error compensation of coordinate measuring machines,” Int. J. Mach. Tools Manuf. 35(5), 725–738 (1995).

[Crossref]

J. Ni, P. Huang, and S. Wu, “A multi-degree-of-freedom measuring system for CMM geometric errors,” J. Eng. Ind. 114, 362–369 (1992).

W. Gao, P. S. Huang, T. Yamada, and S. Kiyono, “A compact and sensitive two-dimensional angle probe for flatness measurement of large silicon wafers,” Precis. Eng. 26(4), 396–404 (2002).

[Crossref]

K.-C. Fan, M.-J. Chen, and W. Huang, “A six-degree-of-freedom measurement system for the motion accuracy of linear stages,” Int. J. Mach. Tools Manuf. 38(3), 155–164 (1998).

[Crossref]

S. Shimizu, H.-s. Lee, and N. Imai, “Simultaneous measuring method of table motion errors in 6 degrees of freedom,” Int. J. Jpn Soc. Precis. Eng. 28, 273–274 (1994).

X. Li, W. Gao, H. Muto, Y. Shimizu, S. Ito, and S. Dian, “A six-degree-of-freedom surface encoder for precision positioning of a planar motion stage,” Precis. Eng. 37(3), 771–781 (2013).

[Crossref]

C.-H. Liu, W.-Y. Jywe, C.-C. Hsu, and T.-H. Hsu, “Development of a laser-based high-precision six-degrees-of-freedom motion errors measuring system for linear stage,” Rev. Sci. Instrum. 76(5), 055110 (2005).

[Crossref]

C. Lee, G. H. Kim, and S.-K. Lee, “Design and construction of a single unit multi-function optical encoder for a six-degree-of-freedom motion error measurement in an ultraprecision linear stage,” Meas. Sci. Technol. 22(10), 105901 (2011).

[Crossref]

J.-A. Kim, K.-C. Kim, E. W. Bae, S. Kim, and Y. K. Kwak, “Six-degree-of-freedom displacement measurement system using a diffraction grating,” Rev. Sci. Instrum. 71(8), 3214–3219 (2000).

[Crossref]

J.-A. Kim, K.-C. Kim, E. W. Bae, S. Kim, and Y. K. Kwak, “Six-degree-of-freedom displacement measurement system using a diffraction grating,” Rev. Sci. Instrum. 71(8), 3214–3219 (2000).

[Crossref]

J.-A. Kim, K.-C. Kim, E. W. Bae, S. Kim, and Y. K. Kwak, “Six-degree-of-freedom displacement measurement system using a diffraction grating,” Rev. Sci. Instrum. 71(8), 3214–3219 (2000).

[Crossref]

W. Gao, P. S. Huang, T. Yamada, and S. Kiyono, “A compact and sensitive two-dimensional angle probe for flatness measurement of large silicon wafers,” Precis. Eng. 26(4), 396–404 (2002).

[Crossref]

C. Kuang, E. Hong, and Q. Feng, “High-accuracy method for measuring two-dimensional angles of a linear guideway,” Opt. Eng. 46(5), 051016 (2007).

[Crossref]

Q. Feng, B. Zhang, and C. Kuang, “A straightness measurement system using a single-mode fiber-coupled laser module,” Opt. Laser Technol. 36(4), 279–283 (2004).

[Crossref]

J.-A. Kim, K.-C. Kim, E. W. Bae, S. Kim, and Y. K. Kwak, “Six-degree-of-freedom displacement measurement system using a diffraction grating,” Rev. Sci. Instrum. 71(8), 3214–3219 (2000).

[Crossref]

C. Lee, G. H. Kim, and S.-K. Lee, “Design and construction of a single unit multi-function optical encoder for a six-degree-of-freedom motion error measurement in an ultraprecision linear stage,” Meas. Sci. Technol. 22(10), 105901 (2011).

[Crossref]

S. Shimizu, H.-s. Lee, and N. Imai, “Simultaneous measuring method of table motion errors in 6 degrees of freedom,” Int. J. Jpn Soc. Precis. Eng. 28, 273–274 (1994).

C. Lee, G. H. Kim, and S.-K. Lee, “Design and construction of a single unit multi-function optical encoder for a six-degree-of-freedom motion error measurement in an ultraprecision linear stage,” Meas. Sci. Technol. 22(10), 105901 (2011).

[Crossref]

X. Li, W. Gao, H. Muto, Y. Shimizu, S. Ito, and S. Dian, “A six-degree-of-freedom surface encoder for precision positioning of a planar motion stage,” Precis. Eng. 37(3), 771–781 (2013).

[Crossref]

C.-H. Liu, W.-Y. Jywe, C.-C. Hsu, and T.-H. Hsu, “Development of a laser-based high-precision six-degrees-of-freedom motion errors measuring system for linear stage,” Rev. Sci. Instrum. 76(5), 055110 (2005).

[Crossref]

X. Li, W. Gao, H. Muto, Y. Shimizu, S. Ito, and S. Dian, “A six-degree-of-freedom surface encoder for precision positioning of a planar motion stage,” Precis. Eng. 37(3), 771–781 (2013).

[Crossref]

P. Huang and J. Ni, “On-line error compensation of coordinate measuring machines,” Int. J. Mach. Tools Manuf. 35(5), 725–738 (1995).

[Crossref]

J. Ni, P. Huang, and S. Wu, “A multi-degree-of-freedom measuring system for CMM geometric errors,” J. Eng. Ind. 114, 362–369 (1992).

A. C. Okafor and Y. M. Ertekin, “Vertical machining center accuracy characterization using laser interferometer: part 1. Linear positional errors,” J. Mater. Process. Technol. 105(3), 394–406 (2000).

[Crossref]

A. C. Okafor and Y. M. Ertekin, “Vertical machining center accuracy characterization using laser interferometer: part 2. Angular errors,” J. Mater. Process. Technol. 105(3), 407–420 (2000).

[Crossref]

S. Shimizu, H.-s. Lee, and N. Imai, “Simultaneous measuring method of table motion errors in 6 degrees of freedom,” Int. J. Jpn Soc. Precis. Eng. 28, 273–274 (1994).

X. Li, W. Gao, H. Muto, Y. Shimizu, S. Ito, and S. Dian, “A six-degree-of-freedom surface encoder for precision positioning of a planar motion stage,” Precis. Eng. 37(3), 771–781 (2013).

[Crossref]

J. Ni, P. Huang, and S. Wu, “A multi-degree-of-freedom measuring system for CMM geometric errors,” J. Eng. Ind. 114, 362–369 (1992).

W. Gao, P. S. Huang, T. Yamada, and S. Kiyono, “A compact and sensitive two-dimensional angle probe for flatness measurement of large silicon wafers,” Precis. Eng. 26(4), 396–404 (2002).

[Crossref]

C. Cui, Q. Feng, and B. Zhang, “Compensation for straightness measurement systematic errors in six degree-of-freedom motion error simultaneous measurement system,” Appl. Opt. 54(11), 3122–3131 (2015).

[Crossref]
[PubMed]

T. Zhang, Q. Feng, C. Cui, and B. Zhang, “Research on error compensation method for dual-beam measurement of roll angle based on rhombic prism,” Chin. Opt. Lett. 12(7), 071201 (2014).

[Crossref]

Q. Feng, B. Zhang, and C. Kuang, “A straightness measurement system using a single-mode fiber-coupled laser module,” Opt. Laser Technol. 36(4), 279–283 (2004).

[Crossref]

S. Shimizu, H.-s. Lee, and N. Imai, “Simultaneous measuring method of table motion errors in 6 degrees of freedom,” Int. J. Jpn Soc. Precis. Eng. 28, 273–274 (1994).

P. Huang and J. Ni, “On-line error compensation of coordinate measuring machines,” Int. J. Mach. Tools Manuf. 35(5), 725–738 (1995).

[Crossref]

K.-C. Fan, M.-J. Chen, and W. Huang, “A six-degree-of-freedom measurement system for the motion accuracy of linear stages,” Int. J. Mach. Tools Manuf. 38(3), 155–164 (1998).

[Crossref]

J. Ni, P. Huang, and S. Wu, “A multi-degree-of-freedom measuring system for CMM geometric errors,” J. Eng. Ind. 114, 362–369 (1992).

A. C. Okafor and Y. M. Ertekin, “Vertical machining center accuracy characterization using laser interferometer: part 1. Linear positional errors,” J. Mater. Process. Technol. 105(3), 394–406 (2000).

[Crossref]

A. C. Okafor and Y. M. Ertekin, “Vertical machining center accuracy characterization using laser interferometer: part 2. Angular errors,” J. Mater. Process. Technol. 105(3), 407–420 (2000).

[Crossref]

C. Lee, G. H. Kim, and S.-K. Lee, “Design and construction of a single unit multi-function optical encoder for a six-degree-of-freedom motion error measurement in an ultraprecision linear stage,” Meas. Sci. Technol. 22(10), 105901 (2011).

[Crossref]

N. Bobroff, “Recent advances in displacement measuring interferometry,” Meas. Sci. Technol. 4(9), 907–926 (1993).

[Crossref]

C. Kuang, E. Hong, and Q. Feng, “High-accuracy method for measuring two-dimensional angles of a linear guideway,” Opt. Eng. 46(5), 051016 (2007).

[Crossref]

F. Qibo, Z. Bin, C. Cunxing, K. Cuifang, Z. Yusheng, and Y. Fenglin, “Development of a simple system for simultaneously measuring 6DOF geometric motion errors of a linear guide,” Opt. Express 21(22), 25805–25819 (2013).

[Crossref]
[PubMed]

H.-L. Hsieh and S.-W. Pan, “Development of a grating-based interferometer for six-degree-of-freedom displacement and angle measurements,” Opt. Express 23(3), 2451–2465 (2015).

[Crossref]
[PubMed]

Q. Feng, B. Zhang, and C. Kuang, “A straightness measurement system using a single-mode fiber-coupled laser module,” Opt. Laser Technol. 36(4), 279–283 (2004).

[Crossref]

X. Li, W. Gao, H. Muto, Y. Shimizu, S. Ito, and S. Dian, “A six-degree-of-freedom surface encoder for precision positioning of a planar motion stage,” Precis. Eng. 37(3), 771–781 (2013).

[Crossref]

K.-C. Fan and M.-J. Chen, “A 6-degree-of-freedom measurement system for the accuracy of XY stages,” Precis. Eng. 24(1), 15–23 (2000).

[Crossref]

W. Gao, P. S. Huang, T. Yamada, and S. Kiyono, “A compact and sensitive two-dimensional angle probe for flatness measurement of large silicon wafers,” Precis. Eng. 26(4), 396–404 (2002).

[Crossref]

J.-A. Kim, K.-C. Kim, E. W. Bae, S. Kim, and Y. K. Kwak, “Six-degree-of-freedom displacement measurement system using a diffraction grating,” Rev. Sci. Instrum. 71(8), 3214–3219 (2000).

[Crossref]

C.-H. Liu, W.-Y. Jywe, C.-C. Hsu, and T.-H. Hsu, “Development of a laser-based high-precision six-degrees-of-freedom motion errors measuring system for linear stage,” Rev. Sci. Instrum. 76(5), 055110 (2005).

[Crossref]

K. C. Lau and Y.-Q. Liu, “Five-axis/six-axis laser measuring system,” US Patent. 6049377 (2000).