Abstract

Short-period (~3.5 nm) Co/C multilayer mirrors are fabricated by the direct current magnetron sputtering technique through the addition of a small proportion of nitrogen (4–15% partial pressure) to the working gas (Ar). The addition of nitrogen has been demonstrated to significantly suppress the interdiffusion of neighboring materials due to the nitridation of carbon layers as compared with the Co/C multilayer fabricated with the use of pure Ar. The optimal partial pressure of nitrogen was found to be 6%. At this pressure, nitrogen provides abrupt interfaces and the maximal peak value (19%) of the s-polarized radiation reflectivity at the 251-eV photon energy and 45° angle of incidence. The p-polarized radiation reflectivity proved to be less than 0.3%, demonstrating high potentialities of the nitridated Co/C multilayers as Bragg polarizers in the 4.5–6.5-nm spectral range.

© 2016 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Effect of background pressure on Co/C multilayers

Mingwu Wen, Shuang Ma, Qiushi Huang, Li Jiang, Ping Li, Zhong Zhang, Zhanshan Wang, Delai Wang, and Mingqi Cui
Appl. Opt. 56(4) C16-C20 (2017)

Nitridated Pd/B4C multilayer mirrors for soft X-ray region: internal structure and aging effects

Yiwen Wang, Qiushi Huang, Qiang Yi, Igor V. Kozhevnikov, Runze Qi, Mingwu Wen, Philippe Jonnard, Jinshuai Zhang, Angelo Giglia, Zhong Zhang, and Zhanshan Wang
Opt. Express 25(7) 7749-7760 (2017)

Enhancement of soft X-ray reflectivity and interface stability in nitridated Pd/Y multilayer mirrors

Dechao Xu, Qiushi Huang, Yiwen Wang, Pin Li, Mingwu Wen, Philippe Jonnard, Angelo Giglia, Igor V. Kozhevnikov, Kun Wang, Zhong Zhang, and Zhanshan Wang
Opt. Express 23(26) 33018-33026 (2015)

References

  • View by:
  • |
  • |
  • |

  1. B. Kjornrattanawanich, S. Bajt, and J. F. Seely, “Multilayer-coated photodiodes with polarization sensitivity at EUV wavelength,” Proc. SPIE 5168, 31–34 (2004).
    [Crossref]
  2. Z. Wang, H. Wang, J. Zhu, Y. Xu, S. Zhang, C. Li, F. Wang, Z. Zhang, Y. Wu, X. Cheng, L. Chen, A. G. Michette, S. J. Pfauntsch, A. K. Powell, F. Schäfers, A. Gaupp, and M. MacDonald, “Extreme ultraviolet broadband Mo/Y multilayer analyzers,” Appl. Phys. Lett. 89(24), 241120 (2006).
    [Crossref]
  3. J. M. André, P. Jonnard, C. Michaelsen, J. Wiesmann, F. Bridou, M. F. Ravet, A. Jérome, F. Delmotte, and E. O. Filatova, “La/B4C small period multilayer interferential mirror for the analysis of boron,” XRay Spectrom. 34(3), 203–206 (2005).
    [Crossref]
  4. F. Schäfers, M. Mertin, D. Abramsohn, A. Gaupp, H. Ch. Mertins, and N. N. Salashchenko, ““Cr/Sc nanolayers for the water window: improved performance,” Nucl. Instrum. Methods Phys. Res,” Sect. A 467, 349–353 (2001).
  5. R. She, H. Feng, F. Muleri, P. Soffitta, R. Xu, H. Li, R. Bellazzini, Z. Wang, D. Spiga, M. Minuti, A. Brez, G. Spandre, M. Pinchera, C. Sgrò, L. Baldini, M. Wen, Z. Shen, G. Pareschi, G. Tagliaferri, K. Tayabaly, B. Salmaso, and Y. Zhan, “LAMP: a micro-satellite based soft X-ray polarimeter for astrophysics,” Proc. SPIE 9601, 96010I (2015).
    [Crossref]
  6. M. Wen, L. Jiang, Z. Zhang, Q. Huang, Z. Wang, R. She, H. Feng, and H. Wang, “High reflectance Cr/C multilayer at 250 eV for soft X-ray polarimetry,” Thin Solid Films 592, 262–265 (2015).
    [Crossref]
  7. J. A. Bellotti and D. L. Windt, “Depth-graded Co/C multilayers prepared by reactive sputtering,” Proc. SPIE 7437, 743715 (2009).
    [Crossref]
  8. R. Gupta and M. Gupta, “Nanocrystallization and amorphization induced by reactive nitrogen sputtering in iron and permalloy,” Phys. Rev. B 72(2), 024202 (2005).
    [Crossref]
  9. D. L. Windt, “Reduction of stress and roughness by reactive sputtering in W/B4C X-ray multilayer films,” Proc. SPIE 6688, 66880R (2007).
    [Crossref]
  10. N. Ghafoor, F. Eriksson, E. Gullikson, L. Hultman, and J. Birch, “Incorporation of nitrogen in Cr/Sc multilayers giving improved soft X-ray reflectivity,” Appl. Phys. Lett. 92(9), 091913 (2008).
    [Crossref]
  11. T. Tsarfati, R. W. E. van de Kruijs, E. Zoethout, E. Louis, and F. Bijkerk, “Nitridation and contrast of B4C/La interfaces and X-ray multilayer optics,” Thin Solid Films 518(24), 7249–7252 (2010).
    [Crossref]
  12. D. S. Kuznetsov, A. E. Yakshin, J. M. Sturm, R. W. E. van de Kruijs, E. Louis, and F. Bijkerk, “High-reflectance La/B-based multilayer mirror for 6.x nm wavelength,” Opt. Lett. 40(16), 3778–3781 (2015).
    [Crossref] [PubMed]
  13. D. Xu, Q. Huang, Y. Wang, P. Li, M. Wen, P. Jonnard, A. Giglia, I. V. Kozhevnikov, K. Wang, Z. Zhang, and Z. Wang, “Enhancement of soft X-ray reflectivity and interface stability in nitridated Pd/Y multilayer mirrors,” Opt. Express 23(26), 33018–33026 (2015).
    [Crossref] [PubMed]
  14. H. L. Bai, E. Y. Jiang, and C. D. Wang, “Interdiffusion in CoN/CN soft X-ray multilayer mirrors,” Thin Solid Films 304(1-2), 278–285 (1997).
    [Crossref]
  15. H. Jiang, A. Michette, S. Pfauntsch, Z. Wang, J. Zhu, and D. Li, “Determination of the evolution of layer thickness errors and interfacial imperfections in ultrathin sputtered Cr/C multilayers using high-resolution transmission electron microscopy,” Opt. Express 19(12), 11815–11824 (2011).
    [Crossref] [PubMed]
  16. H. L. Bai, E. Y. Jiang, and C. D. Wang, “Structural stability of heat-treated Co/C soft X-ray multilayers fabricated by dual-facing-target sputtering,” Appl. Phys., A Mater. Sci. Process. 63(1), 57–65 (1996).
    [Crossref]
  17. H. Wang, S. P. Wong, W. Y. Cheung, N. Ke, G. H. Wen, X. X. Zhang, and R. W. M. Kwok, “Magnetic properties and structure evolution of amorphous Co–C nanocomposite films prepared by pulsed filtered vacuum arc deposition,” J. Appl. Phys. 88(8), 4919–4921 (2000).
    [Crossref]
  18. J. Xiong, Y. Ding, T. Wang, L. Yan, W. Chen, H. Zhu, and Y. Lu, “The formation of Co2C species in activated carbon supported cobalt-based catalysts and its impact on Fischer-Tropsch reaction,” Catal. Lett. 102(3-4), 265–269 (2005).
    [Crossref]
  19. F. L. Normand, J. Hommet, T. Szörényi, C. Fuchs, and E. Fogarassy, “XPS study of pulsed laser deposited CNx films,” Phys. Rev. B 64(23), 235416 (2001).
    [Crossref]
  20. D. Marton, K. J. Boyd, A. H. Al-Bayati, S. S. Todorov, and J. W. Rabalais, “Carbon nitride deposited using energetic species: A two-phase system,” Phys. Rev. Lett. 73(1), 118–121 (1994).
    [Crossref] [PubMed]
  21. C. Ronning, H. Feldermann, R. Merk, H. Hofsäss, P. Reinke, and J.-U. Thiele, “Carbon nitride deposited using energetic species: a review on XPS studies,” Phys. Rev. B 58(4), 2207–2215 (1998).
    [Crossref]
  22. N. Hellgren, M. P. Johansson, E. Broitman, L. Hultman, and J. E. Sundgren, “Role of nitrogen in the formation of hard and elastic CNx thin films by reactive magnetron sputtering,” Phys. Rev. B 59(7), 5162–5169 (1999).
    [Crossref]
  23. D. X. Ye, S. Pimanpang, C. Jezewski, F. Tang, J. J. Senkevich, G. C. Wang, and T. M. Lu, “Low temperature chemical vapor deposition of Co thin films from Co2(CO)8,” Thin Solid Films 485(1-2), 95–100 (2005).
    [Crossref]
  24. M. A. Baker and P. Hammer, “A study of the chemical bonding and microstructure of ion beam-deposited CNx films including an XPS C 1s peak simulation,” Surf. Interface Anal. 25(9), 629–642 (1997).
    [Crossref]
  25. S. Nannarone, F. Borgatti, A. DeLuisa, B. P. Doyle, G. C. Gazzadi, A. Giglia, P. Finetti, N. Mahne, L. Pasquali, M. Pedio, G. Selvaggi, G. Naletto, M. G. Pelizzo, and G. Tondello, “The BEAR beamline at Elettra,” AIP Conf. Proc. 705, 450–453 (2004).
    [Crossref]

2015 (4)

R. She, H. Feng, F. Muleri, P. Soffitta, R. Xu, H. Li, R. Bellazzini, Z. Wang, D. Spiga, M. Minuti, A. Brez, G. Spandre, M. Pinchera, C. Sgrò, L. Baldini, M. Wen, Z. Shen, G. Pareschi, G. Tagliaferri, K. Tayabaly, B. Salmaso, and Y. Zhan, “LAMP: a micro-satellite based soft X-ray polarimeter for astrophysics,” Proc. SPIE 9601, 96010I (2015).
[Crossref]

M. Wen, L. Jiang, Z. Zhang, Q. Huang, Z. Wang, R. She, H. Feng, and H. Wang, “High reflectance Cr/C multilayer at 250 eV for soft X-ray polarimetry,” Thin Solid Films 592, 262–265 (2015).
[Crossref]

D. S. Kuznetsov, A. E. Yakshin, J. M. Sturm, R. W. E. van de Kruijs, E. Louis, and F. Bijkerk, “High-reflectance La/B-based multilayer mirror for 6.x nm wavelength,” Opt. Lett. 40(16), 3778–3781 (2015).
[Crossref] [PubMed]

D. Xu, Q. Huang, Y. Wang, P. Li, M. Wen, P. Jonnard, A. Giglia, I. V. Kozhevnikov, K. Wang, Z. Zhang, and Z. Wang, “Enhancement of soft X-ray reflectivity and interface stability in nitridated Pd/Y multilayer mirrors,” Opt. Express 23(26), 33018–33026 (2015).
[Crossref] [PubMed]

2011 (1)

2010 (1)

T. Tsarfati, R. W. E. van de Kruijs, E. Zoethout, E. Louis, and F. Bijkerk, “Nitridation and contrast of B4C/La interfaces and X-ray multilayer optics,” Thin Solid Films 518(24), 7249–7252 (2010).
[Crossref]

2009 (1)

J. A. Bellotti and D. L. Windt, “Depth-graded Co/C multilayers prepared by reactive sputtering,” Proc. SPIE 7437, 743715 (2009).
[Crossref]

2008 (1)

N. Ghafoor, F. Eriksson, E. Gullikson, L. Hultman, and J. Birch, “Incorporation of nitrogen in Cr/Sc multilayers giving improved soft X-ray reflectivity,” Appl. Phys. Lett. 92(9), 091913 (2008).
[Crossref]

2007 (1)

D. L. Windt, “Reduction of stress and roughness by reactive sputtering in W/B4C X-ray multilayer films,” Proc. SPIE 6688, 66880R (2007).
[Crossref]

2006 (1)

Z. Wang, H. Wang, J. Zhu, Y. Xu, S. Zhang, C. Li, F. Wang, Z. Zhang, Y. Wu, X. Cheng, L. Chen, A. G. Michette, S. J. Pfauntsch, A. K. Powell, F. Schäfers, A. Gaupp, and M. MacDonald, “Extreme ultraviolet broadband Mo/Y multilayer analyzers,” Appl. Phys. Lett. 89(24), 241120 (2006).
[Crossref]

2005 (4)

J. M. André, P. Jonnard, C. Michaelsen, J. Wiesmann, F. Bridou, M. F. Ravet, A. Jérome, F. Delmotte, and E. O. Filatova, “La/B4C small period multilayer interferential mirror for the analysis of boron,” XRay Spectrom. 34(3), 203–206 (2005).
[Crossref]

R. Gupta and M. Gupta, “Nanocrystallization and amorphization induced by reactive nitrogen sputtering in iron and permalloy,” Phys. Rev. B 72(2), 024202 (2005).
[Crossref]

J. Xiong, Y. Ding, T. Wang, L. Yan, W. Chen, H. Zhu, and Y. Lu, “The formation of Co2C species in activated carbon supported cobalt-based catalysts and its impact on Fischer-Tropsch reaction,” Catal. Lett. 102(3-4), 265–269 (2005).
[Crossref]

D. X. Ye, S. Pimanpang, C. Jezewski, F. Tang, J. J. Senkevich, G. C. Wang, and T. M. Lu, “Low temperature chemical vapor deposition of Co thin films from Co2(CO)8,” Thin Solid Films 485(1-2), 95–100 (2005).
[Crossref]

2004 (2)

S. Nannarone, F. Borgatti, A. DeLuisa, B. P. Doyle, G. C. Gazzadi, A. Giglia, P. Finetti, N. Mahne, L. Pasquali, M. Pedio, G. Selvaggi, G. Naletto, M. G. Pelizzo, and G. Tondello, “The BEAR beamline at Elettra,” AIP Conf. Proc. 705, 450–453 (2004).
[Crossref]

B. Kjornrattanawanich, S. Bajt, and J. F. Seely, “Multilayer-coated photodiodes with polarization sensitivity at EUV wavelength,” Proc. SPIE 5168, 31–34 (2004).
[Crossref]

2001 (2)

F. Schäfers, M. Mertin, D. Abramsohn, A. Gaupp, H. Ch. Mertins, and N. N. Salashchenko, ““Cr/Sc nanolayers for the water window: improved performance,” Nucl. Instrum. Methods Phys. Res,” Sect. A 467, 349–353 (2001).

F. L. Normand, J. Hommet, T. Szörényi, C. Fuchs, and E. Fogarassy, “XPS study of pulsed laser deposited CNx films,” Phys. Rev. B 64(23), 235416 (2001).
[Crossref]

2000 (1)

H. Wang, S. P. Wong, W. Y. Cheung, N. Ke, G. H. Wen, X. X. Zhang, and R. W. M. Kwok, “Magnetic properties and structure evolution of amorphous Co–C nanocomposite films prepared by pulsed filtered vacuum arc deposition,” J. Appl. Phys. 88(8), 4919–4921 (2000).
[Crossref]

1999 (1)

N. Hellgren, M. P. Johansson, E. Broitman, L. Hultman, and J. E. Sundgren, “Role of nitrogen in the formation of hard and elastic CNx thin films by reactive magnetron sputtering,” Phys. Rev. B 59(7), 5162–5169 (1999).
[Crossref]

1998 (1)

C. Ronning, H. Feldermann, R. Merk, H. Hofsäss, P. Reinke, and J.-U. Thiele, “Carbon nitride deposited using energetic species: a review on XPS studies,” Phys. Rev. B 58(4), 2207–2215 (1998).
[Crossref]

1997 (2)

M. A. Baker and P. Hammer, “A study of the chemical bonding and microstructure of ion beam-deposited CNx films including an XPS C 1s peak simulation,” Surf. Interface Anal. 25(9), 629–642 (1997).
[Crossref]

H. L. Bai, E. Y. Jiang, and C. D. Wang, “Interdiffusion in CoN/CN soft X-ray multilayer mirrors,” Thin Solid Films 304(1-2), 278–285 (1997).
[Crossref]

1996 (1)

H. L. Bai, E. Y. Jiang, and C. D. Wang, “Structural stability of heat-treated Co/C soft X-ray multilayers fabricated by dual-facing-target sputtering,” Appl. Phys., A Mater. Sci. Process. 63(1), 57–65 (1996).
[Crossref]

1994 (1)

D. Marton, K. J. Boyd, A. H. Al-Bayati, S. S. Todorov, and J. W. Rabalais, “Carbon nitride deposited using energetic species: A two-phase system,” Phys. Rev. Lett. 73(1), 118–121 (1994).
[Crossref] [PubMed]

Abramsohn, D.

F. Schäfers, M. Mertin, D. Abramsohn, A. Gaupp, H. Ch. Mertins, and N. N. Salashchenko, ““Cr/Sc nanolayers for the water window: improved performance,” Nucl. Instrum. Methods Phys. Res,” Sect. A 467, 349–353 (2001).

Al-Bayati, A. H.

D. Marton, K. J. Boyd, A. H. Al-Bayati, S. S. Todorov, and J. W. Rabalais, “Carbon nitride deposited using energetic species: A two-phase system,” Phys. Rev. Lett. 73(1), 118–121 (1994).
[Crossref] [PubMed]

André, J. M.

J. M. André, P. Jonnard, C. Michaelsen, J. Wiesmann, F. Bridou, M. F. Ravet, A. Jérome, F. Delmotte, and E. O. Filatova, “La/B4C small period multilayer interferential mirror for the analysis of boron,” XRay Spectrom. 34(3), 203–206 (2005).
[Crossref]

Bai, H. L.

H. L. Bai, E. Y. Jiang, and C. D. Wang, “Interdiffusion in CoN/CN soft X-ray multilayer mirrors,” Thin Solid Films 304(1-2), 278–285 (1997).
[Crossref]

H. L. Bai, E. Y. Jiang, and C. D. Wang, “Structural stability of heat-treated Co/C soft X-ray multilayers fabricated by dual-facing-target sputtering,” Appl. Phys., A Mater. Sci. Process. 63(1), 57–65 (1996).
[Crossref]

Bajt, S.

B. Kjornrattanawanich, S. Bajt, and J. F. Seely, “Multilayer-coated photodiodes with polarization sensitivity at EUV wavelength,” Proc. SPIE 5168, 31–34 (2004).
[Crossref]

Baker, M. A.

M. A. Baker and P. Hammer, “A study of the chemical bonding and microstructure of ion beam-deposited CNx films including an XPS C 1s peak simulation,” Surf. Interface Anal. 25(9), 629–642 (1997).
[Crossref]

Baldini, L.

R. She, H. Feng, F. Muleri, P. Soffitta, R. Xu, H. Li, R. Bellazzini, Z. Wang, D. Spiga, M. Minuti, A. Brez, G. Spandre, M. Pinchera, C. Sgrò, L. Baldini, M. Wen, Z. Shen, G. Pareschi, G. Tagliaferri, K. Tayabaly, B. Salmaso, and Y. Zhan, “LAMP: a micro-satellite based soft X-ray polarimeter for astrophysics,” Proc. SPIE 9601, 96010I (2015).
[Crossref]

Bellazzini, R.

R. She, H. Feng, F. Muleri, P. Soffitta, R. Xu, H. Li, R. Bellazzini, Z. Wang, D. Spiga, M. Minuti, A. Brez, G. Spandre, M. Pinchera, C. Sgrò, L. Baldini, M. Wen, Z. Shen, G. Pareschi, G. Tagliaferri, K. Tayabaly, B. Salmaso, and Y. Zhan, “LAMP: a micro-satellite based soft X-ray polarimeter for astrophysics,” Proc. SPIE 9601, 96010I (2015).
[Crossref]

Bellotti, J. A.

J. A. Bellotti and D. L. Windt, “Depth-graded Co/C multilayers prepared by reactive sputtering,” Proc. SPIE 7437, 743715 (2009).
[Crossref]

Bijkerk, F.

D. S. Kuznetsov, A. E. Yakshin, J. M. Sturm, R. W. E. van de Kruijs, E. Louis, and F. Bijkerk, “High-reflectance La/B-based multilayer mirror for 6.x nm wavelength,” Opt. Lett. 40(16), 3778–3781 (2015).
[Crossref] [PubMed]

T. Tsarfati, R. W. E. van de Kruijs, E. Zoethout, E. Louis, and F. Bijkerk, “Nitridation and contrast of B4C/La interfaces and X-ray multilayer optics,” Thin Solid Films 518(24), 7249–7252 (2010).
[Crossref]

Birch, J.

N. Ghafoor, F. Eriksson, E. Gullikson, L. Hultman, and J. Birch, “Incorporation of nitrogen in Cr/Sc multilayers giving improved soft X-ray reflectivity,” Appl. Phys. Lett. 92(9), 091913 (2008).
[Crossref]

Borgatti, F.

S. Nannarone, F. Borgatti, A. DeLuisa, B. P. Doyle, G. C. Gazzadi, A. Giglia, P. Finetti, N. Mahne, L. Pasquali, M. Pedio, G. Selvaggi, G. Naletto, M. G. Pelizzo, and G. Tondello, “The BEAR beamline at Elettra,” AIP Conf. Proc. 705, 450–453 (2004).
[Crossref]

Boyd, K. J.

D. Marton, K. J. Boyd, A. H. Al-Bayati, S. S. Todorov, and J. W. Rabalais, “Carbon nitride deposited using energetic species: A two-phase system,” Phys. Rev. Lett. 73(1), 118–121 (1994).
[Crossref] [PubMed]

Brez, A.

R. She, H. Feng, F. Muleri, P. Soffitta, R. Xu, H. Li, R. Bellazzini, Z. Wang, D. Spiga, M. Minuti, A. Brez, G. Spandre, M. Pinchera, C. Sgrò, L. Baldini, M. Wen, Z. Shen, G. Pareschi, G. Tagliaferri, K. Tayabaly, B. Salmaso, and Y. Zhan, “LAMP: a micro-satellite based soft X-ray polarimeter for astrophysics,” Proc. SPIE 9601, 96010I (2015).
[Crossref]

Bridou, F.

J. M. André, P. Jonnard, C. Michaelsen, J. Wiesmann, F. Bridou, M. F. Ravet, A. Jérome, F. Delmotte, and E. O. Filatova, “La/B4C small period multilayer interferential mirror for the analysis of boron,” XRay Spectrom. 34(3), 203–206 (2005).
[Crossref]

Broitman, E.

N. Hellgren, M. P. Johansson, E. Broitman, L. Hultman, and J. E. Sundgren, “Role of nitrogen in the formation of hard and elastic CNx thin films by reactive magnetron sputtering,” Phys. Rev. B 59(7), 5162–5169 (1999).
[Crossref]

Chen, L.

Z. Wang, H. Wang, J. Zhu, Y. Xu, S. Zhang, C. Li, F. Wang, Z. Zhang, Y. Wu, X. Cheng, L. Chen, A. G. Michette, S. J. Pfauntsch, A. K. Powell, F. Schäfers, A. Gaupp, and M. MacDonald, “Extreme ultraviolet broadband Mo/Y multilayer analyzers,” Appl. Phys. Lett. 89(24), 241120 (2006).
[Crossref]

Chen, W.

J. Xiong, Y. Ding, T. Wang, L. Yan, W. Chen, H. Zhu, and Y. Lu, “The formation of Co2C species in activated carbon supported cobalt-based catalysts and its impact on Fischer-Tropsch reaction,” Catal. Lett. 102(3-4), 265–269 (2005).
[Crossref]

Cheng, X.

Z. Wang, H. Wang, J. Zhu, Y. Xu, S. Zhang, C. Li, F. Wang, Z. Zhang, Y. Wu, X. Cheng, L. Chen, A. G. Michette, S. J. Pfauntsch, A. K. Powell, F. Schäfers, A. Gaupp, and M. MacDonald, “Extreme ultraviolet broadband Mo/Y multilayer analyzers,” Appl. Phys. Lett. 89(24), 241120 (2006).
[Crossref]

Cheung, W. Y.

H. Wang, S. P. Wong, W. Y. Cheung, N. Ke, G. H. Wen, X. X. Zhang, and R. W. M. Kwok, “Magnetic properties and structure evolution of amorphous Co–C nanocomposite films prepared by pulsed filtered vacuum arc deposition,” J. Appl. Phys. 88(8), 4919–4921 (2000).
[Crossref]

Delmotte, F.

J. M. André, P. Jonnard, C. Michaelsen, J. Wiesmann, F. Bridou, M. F. Ravet, A. Jérome, F. Delmotte, and E. O. Filatova, “La/B4C small period multilayer interferential mirror for the analysis of boron,” XRay Spectrom. 34(3), 203–206 (2005).
[Crossref]

DeLuisa, A.

S. Nannarone, F. Borgatti, A. DeLuisa, B. P. Doyle, G. C. Gazzadi, A. Giglia, P. Finetti, N. Mahne, L. Pasquali, M. Pedio, G. Selvaggi, G. Naletto, M. G. Pelizzo, and G. Tondello, “The BEAR beamline at Elettra,” AIP Conf. Proc. 705, 450–453 (2004).
[Crossref]

Ding, Y.

J. Xiong, Y. Ding, T. Wang, L. Yan, W. Chen, H. Zhu, and Y. Lu, “The formation of Co2C species in activated carbon supported cobalt-based catalysts and its impact on Fischer-Tropsch reaction,” Catal. Lett. 102(3-4), 265–269 (2005).
[Crossref]

Doyle, B. P.

S. Nannarone, F. Borgatti, A. DeLuisa, B. P. Doyle, G. C. Gazzadi, A. Giglia, P. Finetti, N. Mahne, L. Pasquali, M. Pedio, G. Selvaggi, G. Naletto, M. G. Pelizzo, and G. Tondello, “The BEAR beamline at Elettra,” AIP Conf. Proc. 705, 450–453 (2004).
[Crossref]

Eriksson, F.

N. Ghafoor, F. Eriksson, E. Gullikson, L. Hultman, and J. Birch, “Incorporation of nitrogen in Cr/Sc multilayers giving improved soft X-ray reflectivity,” Appl. Phys. Lett. 92(9), 091913 (2008).
[Crossref]

Feldermann, H.

C. Ronning, H. Feldermann, R. Merk, H. Hofsäss, P. Reinke, and J.-U. Thiele, “Carbon nitride deposited using energetic species: a review on XPS studies,” Phys. Rev. B 58(4), 2207–2215 (1998).
[Crossref]

Feng, H.

M. Wen, L. Jiang, Z. Zhang, Q. Huang, Z. Wang, R. She, H. Feng, and H. Wang, “High reflectance Cr/C multilayer at 250 eV for soft X-ray polarimetry,” Thin Solid Films 592, 262–265 (2015).
[Crossref]

R. She, H. Feng, F. Muleri, P. Soffitta, R. Xu, H. Li, R. Bellazzini, Z. Wang, D. Spiga, M. Minuti, A. Brez, G. Spandre, M. Pinchera, C. Sgrò, L. Baldini, M. Wen, Z. Shen, G. Pareschi, G. Tagliaferri, K. Tayabaly, B. Salmaso, and Y. Zhan, “LAMP: a micro-satellite based soft X-ray polarimeter for astrophysics,” Proc. SPIE 9601, 96010I (2015).
[Crossref]

Filatova, E. O.

J. M. André, P. Jonnard, C. Michaelsen, J. Wiesmann, F. Bridou, M. F. Ravet, A. Jérome, F. Delmotte, and E. O. Filatova, “La/B4C small period multilayer interferential mirror for the analysis of boron,” XRay Spectrom. 34(3), 203–206 (2005).
[Crossref]

Finetti, P.

S. Nannarone, F. Borgatti, A. DeLuisa, B. P. Doyle, G. C. Gazzadi, A. Giglia, P. Finetti, N. Mahne, L. Pasquali, M. Pedio, G. Selvaggi, G. Naletto, M. G. Pelizzo, and G. Tondello, “The BEAR beamline at Elettra,” AIP Conf. Proc. 705, 450–453 (2004).
[Crossref]

Fogarassy, E.

F. L. Normand, J. Hommet, T. Szörényi, C. Fuchs, and E. Fogarassy, “XPS study of pulsed laser deposited CNx films,” Phys. Rev. B 64(23), 235416 (2001).
[Crossref]

Fuchs, C.

F. L. Normand, J. Hommet, T. Szörényi, C. Fuchs, and E. Fogarassy, “XPS study of pulsed laser deposited CNx films,” Phys. Rev. B 64(23), 235416 (2001).
[Crossref]

Gaupp, A.

Z. Wang, H. Wang, J. Zhu, Y. Xu, S. Zhang, C. Li, F. Wang, Z. Zhang, Y. Wu, X. Cheng, L. Chen, A. G. Michette, S. J. Pfauntsch, A. K. Powell, F. Schäfers, A. Gaupp, and M. MacDonald, “Extreme ultraviolet broadband Mo/Y multilayer analyzers,” Appl. Phys. Lett. 89(24), 241120 (2006).
[Crossref]

F. Schäfers, M. Mertin, D. Abramsohn, A. Gaupp, H. Ch. Mertins, and N. N. Salashchenko, ““Cr/Sc nanolayers for the water window: improved performance,” Nucl. Instrum. Methods Phys. Res,” Sect. A 467, 349–353 (2001).

Gazzadi, G. C.

S. Nannarone, F. Borgatti, A. DeLuisa, B. P. Doyle, G. C. Gazzadi, A. Giglia, P. Finetti, N. Mahne, L. Pasquali, M. Pedio, G. Selvaggi, G. Naletto, M. G. Pelizzo, and G. Tondello, “The BEAR beamline at Elettra,” AIP Conf. Proc. 705, 450–453 (2004).
[Crossref]

Ghafoor, N.

N. Ghafoor, F. Eriksson, E. Gullikson, L. Hultman, and J. Birch, “Incorporation of nitrogen in Cr/Sc multilayers giving improved soft X-ray reflectivity,” Appl. Phys. Lett. 92(9), 091913 (2008).
[Crossref]

Giglia, A.

D. Xu, Q. Huang, Y. Wang, P. Li, M. Wen, P. Jonnard, A. Giglia, I. V. Kozhevnikov, K. Wang, Z. Zhang, and Z. Wang, “Enhancement of soft X-ray reflectivity and interface stability in nitridated Pd/Y multilayer mirrors,” Opt. Express 23(26), 33018–33026 (2015).
[Crossref] [PubMed]

S. Nannarone, F. Borgatti, A. DeLuisa, B. P. Doyle, G. C. Gazzadi, A. Giglia, P. Finetti, N. Mahne, L. Pasquali, M. Pedio, G. Selvaggi, G. Naletto, M. G. Pelizzo, and G. Tondello, “The BEAR beamline at Elettra,” AIP Conf. Proc. 705, 450–453 (2004).
[Crossref]

Gullikson, E.

N. Ghafoor, F. Eriksson, E. Gullikson, L. Hultman, and J. Birch, “Incorporation of nitrogen in Cr/Sc multilayers giving improved soft X-ray reflectivity,” Appl. Phys. Lett. 92(9), 091913 (2008).
[Crossref]

Gupta, M.

R. Gupta and M. Gupta, “Nanocrystallization and amorphization induced by reactive nitrogen sputtering in iron and permalloy,” Phys. Rev. B 72(2), 024202 (2005).
[Crossref]

Gupta, R.

R. Gupta and M. Gupta, “Nanocrystallization and amorphization induced by reactive nitrogen sputtering in iron and permalloy,” Phys. Rev. B 72(2), 024202 (2005).
[Crossref]

Hammer, P.

M. A. Baker and P. Hammer, “A study of the chemical bonding and microstructure of ion beam-deposited CNx films including an XPS C 1s peak simulation,” Surf. Interface Anal. 25(9), 629–642 (1997).
[Crossref]

Hellgren, N.

N. Hellgren, M. P. Johansson, E. Broitman, L. Hultman, and J. E. Sundgren, “Role of nitrogen in the formation of hard and elastic CNx thin films by reactive magnetron sputtering,” Phys. Rev. B 59(7), 5162–5169 (1999).
[Crossref]

Hofsäss, H.

C. Ronning, H. Feldermann, R. Merk, H. Hofsäss, P. Reinke, and J.-U. Thiele, “Carbon nitride deposited using energetic species: a review on XPS studies,” Phys. Rev. B 58(4), 2207–2215 (1998).
[Crossref]

Hommet, J.

F. L. Normand, J. Hommet, T. Szörényi, C. Fuchs, and E. Fogarassy, “XPS study of pulsed laser deposited CNx films,” Phys. Rev. B 64(23), 235416 (2001).
[Crossref]

Huang, Q.

Hultman, L.

N. Ghafoor, F. Eriksson, E. Gullikson, L. Hultman, and J. Birch, “Incorporation of nitrogen in Cr/Sc multilayers giving improved soft X-ray reflectivity,” Appl. Phys. Lett. 92(9), 091913 (2008).
[Crossref]

N. Hellgren, M. P. Johansson, E. Broitman, L. Hultman, and J. E. Sundgren, “Role of nitrogen in the formation of hard and elastic CNx thin films by reactive magnetron sputtering,” Phys. Rev. B 59(7), 5162–5169 (1999).
[Crossref]

Jérome, A.

J. M. André, P. Jonnard, C. Michaelsen, J. Wiesmann, F. Bridou, M. F. Ravet, A. Jérome, F. Delmotte, and E. O. Filatova, “La/B4C small period multilayer interferential mirror for the analysis of boron,” XRay Spectrom. 34(3), 203–206 (2005).
[Crossref]

Jezewski, C.

D. X. Ye, S. Pimanpang, C. Jezewski, F. Tang, J. J. Senkevich, G. C. Wang, and T. M. Lu, “Low temperature chemical vapor deposition of Co thin films from Co2(CO)8,” Thin Solid Films 485(1-2), 95–100 (2005).
[Crossref]

Jiang, E. Y.

H. L. Bai, E. Y. Jiang, and C. D. Wang, “Interdiffusion in CoN/CN soft X-ray multilayer mirrors,” Thin Solid Films 304(1-2), 278–285 (1997).
[Crossref]

H. L. Bai, E. Y. Jiang, and C. D. Wang, “Structural stability of heat-treated Co/C soft X-ray multilayers fabricated by dual-facing-target sputtering,” Appl. Phys., A Mater. Sci. Process. 63(1), 57–65 (1996).
[Crossref]

Jiang, H.

Jiang, L.

M. Wen, L. Jiang, Z. Zhang, Q. Huang, Z. Wang, R. She, H. Feng, and H. Wang, “High reflectance Cr/C multilayer at 250 eV for soft X-ray polarimetry,” Thin Solid Films 592, 262–265 (2015).
[Crossref]

Johansson, M. P.

N. Hellgren, M. P. Johansson, E. Broitman, L. Hultman, and J. E. Sundgren, “Role of nitrogen in the formation of hard and elastic CNx thin films by reactive magnetron sputtering,” Phys. Rev. B 59(7), 5162–5169 (1999).
[Crossref]

Jonnard, P.

D. Xu, Q. Huang, Y. Wang, P. Li, M. Wen, P. Jonnard, A. Giglia, I. V. Kozhevnikov, K. Wang, Z. Zhang, and Z. Wang, “Enhancement of soft X-ray reflectivity and interface stability in nitridated Pd/Y multilayer mirrors,” Opt. Express 23(26), 33018–33026 (2015).
[Crossref] [PubMed]

J. M. André, P. Jonnard, C. Michaelsen, J. Wiesmann, F. Bridou, M. F. Ravet, A. Jérome, F. Delmotte, and E. O. Filatova, “La/B4C small period multilayer interferential mirror for the analysis of boron,” XRay Spectrom. 34(3), 203–206 (2005).
[Crossref]

Ke, N.

H. Wang, S. P. Wong, W. Y. Cheung, N. Ke, G. H. Wen, X. X. Zhang, and R. W. M. Kwok, “Magnetic properties and structure evolution of amorphous Co–C nanocomposite films prepared by pulsed filtered vacuum arc deposition,” J. Appl. Phys. 88(8), 4919–4921 (2000).
[Crossref]

Kjornrattanawanich, B.

B. Kjornrattanawanich, S. Bajt, and J. F. Seely, “Multilayer-coated photodiodes with polarization sensitivity at EUV wavelength,” Proc. SPIE 5168, 31–34 (2004).
[Crossref]

Kozhevnikov, I. V.

Kuznetsov, D. S.

Kwok, R. W. M.

H. Wang, S. P. Wong, W. Y. Cheung, N. Ke, G. H. Wen, X. X. Zhang, and R. W. M. Kwok, “Magnetic properties and structure evolution of amorphous Co–C nanocomposite films prepared by pulsed filtered vacuum arc deposition,” J. Appl. Phys. 88(8), 4919–4921 (2000).
[Crossref]

Li, C.

Z. Wang, H. Wang, J. Zhu, Y. Xu, S. Zhang, C. Li, F. Wang, Z. Zhang, Y. Wu, X. Cheng, L. Chen, A. G. Michette, S. J. Pfauntsch, A. K. Powell, F. Schäfers, A. Gaupp, and M. MacDonald, “Extreme ultraviolet broadband Mo/Y multilayer analyzers,” Appl. Phys. Lett. 89(24), 241120 (2006).
[Crossref]

Li, D.

Li, H.

R. She, H. Feng, F. Muleri, P. Soffitta, R. Xu, H. Li, R. Bellazzini, Z. Wang, D. Spiga, M. Minuti, A. Brez, G. Spandre, M. Pinchera, C. Sgrò, L. Baldini, M. Wen, Z. Shen, G. Pareschi, G. Tagliaferri, K. Tayabaly, B. Salmaso, and Y. Zhan, “LAMP: a micro-satellite based soft X-ray polarimeter for astrophysics,” Proc. SPIE 9601, 96010I (2015).
[Crossref]

Li, P.

Louis, E.

D. S. Kuznetsov, A. E. Yakshin, J. M. Sturm, R. W. E. van de Kruijs, E. Louis, and F. Bijkerk, “High-reflectance La/B-based multilayer mirror for 6.x nm wavelength,” Opt. Lett. 40(16), 3778–3781 (2015).
[Crossref] [PubMed]

T. Tsarfati, R. W. E. van de Kruijs, E. Zoethout, E. Louis, and F. Bijkerk, “Nitridation and contrast of B4C/La interfaces and X-ray multilayer optics,” Thin Solid Films 518(24), 7249–7252 (2010).
[Crossref]

Lu, T. M.

D. X. Ye, S. Pimanpang, C. Jezewski, F. Tang, J. J. Senkevich, G. C. Wang, and T. M. Lu, “Low temperature chemical vapor deposition of Co thin films from Co2(CO)8,” Thin Solid Films 485(1-2), 95–100 (2005).
[Crossref]

Lu, Y.

J. Xiong, Y. Ding, T. Wang, L. Yan, W. Chen, H. Zhu, and Y. Lu, “The formation of Co2C species in activated carbon supported cobalt-based catalysts and its impact on Fischer-Tropsch reaction,” Catal. Lett. 102(3-4), 265–269 (2005).
[Crossref]

MacDonald, M.

Z. Wang, H. Wang, J. Zhu, Y. Xu, S. Zhang, C. Li, F. Wang, Z. Zhang, Y. Wu, X. Cheng, L. Chen, A. G. Michette, S. J. Pfauntsch, A. K. Powell, F. Schäfers, A. Gaupp, and M. MacDonald, “Extreme ultraviolet broadband Mo/Y multilayer analyzers,” Appl. Phys. Lett. 89(24), 241120 (2006).
[Crossref]

Mahne, N.

S. Nannarone, F. Borgatti, A. DeLuisa, B. P. Doyle, G. C. Gazzadi, A. Giglia, P. Finetti, N. Mahne, L. Pasquali, M. Pedio, G. Selvaggi, G. Naletto, M. G. Pelizzo, and G. Tondello, “The BEAR beamline at Elettra,” AIP Conf. Proc. 705, 450–453 (2004).
[Crossref]

Marton, D.

D. Marton, K. J. Boyd, A. H. Al-Bayati, S. S. Todorov, and J. W. Rabalais, “Carbon nitride deposited using energetic species: A two-phase system,” Phys. Rev. Lett. 73(1), 118–121 (1994).
[Crossref] [PubMed]

Merk, R.

C. Ronning, H. Feldermann, R. Merk, H. Hofsäss, P. Reinke, and J.-U. Thiele, “Carbon nitride deposited using energetic species: a review on XPS studies,” Phys. Rev. B 58(4), 2207–2215 (1998).
[Crossref]

Mertin, M.

F. Schäfers, M. Mertin, D. Abramsohn, A. Gaupp, H. Ch. Mertins, and N. N. Salashchenko, ““Cr/Sc nanolayers for the water window: improved performance,” Nucl. Instrum. Methods Phys. Res,” Sect. A 467, 349–353 (2001).

Mertins, H. Ch.

F. Schäfers, M. Mertin, D. Abramsohn, A. Gaupp, H. Ch. Mertins, and N. N. Salashchenko, ““Cr/Sc nanolayers for the water window: improved performance,” Nucl. Instrum. Methods Phys. Res,” Sect. A 467, 349–353 (2001).

Michaelsen, C.

J. M. André, P. Jonnard, C. Michaelsen, J. Wiesmann, F. Bridou, M. F. Ravet, A. Jérome, F. Delmotte, and E. O. Filatova, “La/B4C small period multilayer interferential mirror for the analysis of boron,” XRay Spectrom. 34(3), 203–206 (2005).
[Crossref]

Michette, A.

Michette, A. G.

Z. Wang, H. Wang, J. Zhu, Y. Xu, S. Zhang, C. Li, F. Wang, Z. Zhang, Y. Wu, X. Cheng, L. Chen, A. G. Michette, S. J. Pfauntsch, A. K. Powell, F. Schäfers, A. Gaupp, and M. MacDonald, “Extreme ultraviolet broadband Mo/Y multilayer analyzers,” Appl. Phys. Lett. 89(24), 241120 (2006).
[Crossref]

Minuti, M.

R. She, H. Feng, F. Muleri, P. Soffitta, R. Xu, H. Li, R. Bellazzini, Z. Wang, D. Spiga, M. Minuti, A. Brez, G. Spandre, M. Pinchera, C. Sgrò, L. Baldini, M. Wen, Z. Shen, G. Pareschi, G. Tagliaferri, K. Tayabaly, B. Salmaso, and Y. Zhan, “LAMP: a micro-satellite based soft X-ray polarimeter for astrophysics,” Proc. SPIE 9601, 96010I (2015).
[Crossref]

Muleri, F.

R. She, H. Feng, F. Muleri, P. Soffitta, R. Xu, H. Li, R. Bellazzini, Z. Wang, D. Spiga, M. Minuti, A. Brez, G. Spandre, M. Pinchera, C. Sgrò, L. Baldini, M. Wen, Z. Shen, G. Pareschi, G. Tagliaferri, K. Tayabaly, B. Salmaso, and Y. Zhan, “LAMP: a micro-satellite based soft X-ray polarimeter for astrophysics,” Proc. SPIE 9601, 96010I (2015).
[Crossref]

Naletto, G.

S. Nannarone, F. Borgatti, A. DeLuisa, B. P. Doyle, G. C. Gazzadi, A. Giglia, P. Finetti, N. Mahne, L. Pasquali, M. Pedio, G. Selvaggi, G. Naletto, M. G. Pelizzo, and G. Tondello, “The BEAR beamline at Elettra,” AIP Conf. Proc. 705, 450–453 (2004).
[Crossref]

Nannarone, S.

S. Nannarone, F. Borgatti, A. DeLuisa, B. P. Doyle, G. C. Gazzadi, A. Giglia, P. Finetti, N. Mahne, L. Pasquali, M. Pedio, G. Selvaggi, G. Naletto, M. G. Pelizzo, and G. Tondello, “The BEAR beamline at Elettra,” AIP Conf. Proc. 705, 450–453 (2004).
[Crossref]

Normand, F. L.

F. L. Normand, J. Hommet, T. Szörényi, C. Fuchs, and E. Fogarassy, “XPS study of pulsed laser deposited CNx films,” Phys. Rev. B 64(23), 235416 (2001).
[Crossref]

Pareschi, G.

R. She, H. Feng, F. Muleri, P. Soffitta, R. Xu, H. Li, R. Bellazzini, Z. Wang, D. Spiga, M. Minuti, A. Brez, G. Spandre, M. Pinchera, C. Sgrò, L. Baldini, M. Wen, Z. Shen, G. Pareschi, G. Tagliaferri, K. Tayabaly, B. Salmaso, and Y. Zhan, “LAMP: a micro-satellite based soft X-ray polarimeter for astrophysics,” Proc. SPIE 9601, 96010I (2015).
[Crossref]

Pasquali, L.

S. Nannarone, F. Borgatti, A. DeLuisa, B. P. Doyle, G. C. Gazzadi, A. Giglia, P. Finetti, N. Mahne, L. Pasquali, M. Pedio, G. Selvaggi, G. Naletto, M. G. Pelizzo, and G. Tondello, “The BEAR beamline at Elettra,” AIP Conf. Proc. 705, 450–453 (2004).
[Crossref]

Pedio, M.

S. Nannarone, F. Borgatti, A. DeLuisa, B. P. Doyle, G. C. Gazzadi, A. Giglia, P. Finetti, N. Mahne, L. Pasquali, M. Pedio, G. Selvaggi, G. Naletto, M. G. Pelizzo, and G. Tondello, “The BEAR beamline at Elettra,” AIP Conf. Proc. 705, 450–453 (2004).
[Crossref]

Pelizzo, M. G.

S. Nannarone, F. Borgatti, A. DeLuisa, B. P. Doyle, G. C. Gazzadi, A. Giglia, P. Finetti, N. Mahne, L. Pasquali, M. Pedio, G. Selvaggi, G. Naletto, M. G. Pelizzo, and G. Tondello, “The BEAR beamline at Elettra,” AIP Conf. Proc. 705, 450–453 (2004).
[Crossref]

Pfauntsch, S.

Pfauntsch, S. J.

Z. Wang, H. Wang, J. Zhu, Y. Xu, S. Zhang, C. Li, F. Wang, Z. Zhang, Y. Wu, X. Cheng, L. Chen, A. G. Michette, S. J. Pfauntsch, A. K. Powell, F. Schäfers, A. Gaupp, and M. MacDonald, “Extreme ultraviolet broadband Mo/Y multilayer analyzers,” Appl. Phys. Lett. 89(24), 241120 (2006).
[Crossref]

Pimanpang, S.

D. X. Ye, S. Pimanpang, C. Jezewski, F. Tang, J. J. Senkevich, G. C. Wang, and T. M. Lu, “Low temperature chemical vapor deposition of Co thin films from Co2(CO)8,” Thin Solid Films 485(1-2), 95–100 (2005).
[Crossref]

Pinchera, M.

R. She, H. Feng, F. Muleri, P. Soffitta, R. Xu, H. Li, R. Bellazzini, Z. Wang, D. Spiga, M. Minuti, A. Brez, G. Spandre, M. Pinchera, C. Sgrò, L. Baldini, M. Wen, Z. Shen, G. Pareschi, G. Tagliaferri, K. Tayabaly, B. Salmaso, and Y. Zhan, “LAMP: a micro-satellite based soft X-ray polarimeter for astrophysics,” Proc. SPIE 9601, 96010I (2015).
[Crossref]

Powell, A. K.

Z. Wang, H. Wang, J. Zhu, Y. Xu, S. Zhang, C. Li, F. Wang, Z. Zhang, Y. Wu, X. Cheng, L. Chen, A. G. Michette, S. J. Pfauntsch, A. K. Powell, F. Schäfers, A. Gaupp, and M. MacDonald, “Extreme ultraviolet broadband Mo/Y multilayer analyzers,” Appl. Phys. Lett. 89(24), 241120 (2006).
[Crossref]

Rabalais, J. W.

D. Marton, K. J. Boyd, A. H. Al-Bayati, S. S. Todorov, and J. W. Rabalais, “Carbon nitride deposited using energetic species: A two-phase system,” Phys. Rev. Lett. 73(1), 118–121 (1994).
[Crossref] [PubMed]

Ravet, M. F.

J. M. André, P. Jonnard, C. Michaelsen, J. Wiesmann, F. Bridou, M. F. Ravet, A. Jérome, F. Delmotte, and E. O. Filatova, “La/B4C small period multilayer interferential mirror for the analysis of boron,” XRay Spectrom. 34(3), 203–206 (2005).
[Crossref]

Reinke, P.

C. Ronning, H. Feldermann, R. Merk, H. Hofsäss, P. Reinke, and J.-U. Thiele, “Carbon nitride deposited using energetic species: a review on XPS studies,” Phys. Rev. B 58(4), 2207–2215 (1998).
[Crossref]

Ronning, C.

C. Ronning, H. Feldermann, R. Merk, H. Hofsäss, P. Reinke, and J.-U. Thiele, “Carbon nitride deposited using energetic species: a review on XPS studies,” Phys. Rev. B 58(4), 2207–2215 (1998).
[Crossref]

Salashchenko, N. N.

F. Schäfers, M. Mertin, D. Abramsohn, A. Gaupp, H. Ch. Mertins, and N. N. Salashchenko, ““Cr/Sc nanolayers for the water window: improved performance,” Nucl. Instrum. Methods Phys. Res,” Sect. A 467, 349–353 (2001).

Salmaso, B.

R. She, H. Feng, F. Muleri, P. Soffitta, R. Xu, H. Li, R. Bellazzini, Z. Wang, D. Spiga, M. Minuti, A. Brez, G. Spandre, M. Pinchera, C. Sgrò, L. Baldini, M. Wen, Z. Shen, G. Pareschi, G. Tagliaferri, K. Tayabaly, B. Salmaso, and Y. Zhan, “LAMP: a micro-satellite based soft X-ray polarimeter for astrophysics,” Proc. SPIE 9601, 96010I (2015).
[Crossref]

Schäfers, F.

Z. Wang, H. Wang, J. Zhu, Y. Xu, S. Zhang, C. Li, F. Wang, Z. Zhang, Y. Wu, X. Cheng, L. Chen, A. G. Michette, S. J. Pfauntsch, A. K. Powell, F. Schäfers, A. Gaupp, and M. MacDonald, “Extreme ultraviolet broadband Mo/Y multilayer analyzers,” Appl. Phys. Lett. 89(24), 241120 (2006).
[Crossref]

F. Schäfers, M. Mertin, D. Abramsohn, A. Gaupp, H. Ch. Mertins, and N. N. Salashchenko, ““Cr/Sc nanolayers for the water window: improved performance,” Nucl. Instrum. Methods Phys. Res,” Sect. A 467, 349–353 (2001).

Seely, J. F.

B. Kjornrattanawanich, S. Bajt, and J. F. Seely, “Multilayer-coated photodiodes with polarization sensitivity at EUV wavelength,” Proc. SPIE 5168, 31–34 (2004).
[Crossref]

Selvaggi, G.

S. Nannarone, F. Borgatti, A. DeLuisa, B. P. Doyle, G. C. Gazzadi, A. Giglia, P. Finetti, N. Mahne, L. Pasquali, M. Pedio, G. Selvaggi, G. Naletto, M. G. Pelizzo, and G. Tondello, “The BEAR beamline at Elettra,” AIP Conf. Proc. 705, 450–453 (2004).
[Crossref]

Senkevich, J. J.

D. X. Ye, S. Pimanpang, C. Jezewski, F. Tang, J. J. Senkevich, G. C. Wang, and T. M. Lu, “Low temperature chemical vapor deposition of Co thin films from Co2(CO)8,” Thin Solid Films 485(1-2), 95–100 (2005).
[Crossref]

Sgrò, C.

R. She, H. Feng, F. Muleri, P. Soffitta, R. Xu, H. Li, R. Bellazzini, Z. Wang, D. Spiga, M. Minuti, A. Brez, G. Spandre, M. Pinchera, C. Sgrò, L. Baldini, M. Wen, Z. Shen, G. Pareschi, G. Tagliaferri, K. Tayabaly, B. Salmaso, and Y. Zhan, “LAMP: a micro-satellite based soft X-ray polarimeter for astrophysics,” Proc. SPIE 9601, 96010I (2015).
[Crossref]

She, R.

M. Wen, L. Jiang, Z. Zhang, Q. Huang, Z. Wang, R. She, H. Feng, and H. Wang, “High reflectance Cr/C multilayer at 250 eV for soft X-ray polarimetry,” Thin Solid Films 592, 262–265 (2015).
[Crossref]

R. She, H. Feng, F. Muleri, P. Soffitta, R. Xu, H. Li, R. Bellazzini, Z. Wang, D. Spiga, M. Minuti, A. Brez, G. Spandre, M. Pinchera, C. Sgrò, L. Baldini, M. Wen, Z. Shen, G. Pareschi, G. Tagliaferri, K. Tayabaly, B. Salmaso, and Y. Zhan, “LAMP: a micro-satellite based soft X-ray polarimeter for astrophysics,” Proc. SPIE 9601, 96010I (2015).
[Crossref]

Shen, Z.

R. She, H. Feng, F. Muleri, P. Soffitta, R. Xu, H. Li, R. Bellazzini, Z. Wang, D. Spiga, M. Minuti, A. Brez, G. Spandre, M. Pinchera, C. Sgrò, L. Baldini, M. Wen, Z. Shen, G. Pareschi, G. Tagliaferri, K. Tayabaly, B. Salmaso, and Y. Zhan, “LAMP: a micro-satellite based soft X-ray polarimeter for astrophysics,” Proc. SPIE 9601, 96010I (2015).
[Crossref]

Soffitta, P.

R. She, H. Feng, F. Muleri, P. Soffitta, R. Xu, H. Li, R. Bellazzini, Z. Wang, D. Spiga, M. Minuti, A. Brez, G. Spandre, M. Pinchera, C. Sgrò, L. Baldini, M. Wen, Z. Shen, G. Pareschi, G. Tagliaferri, K. Tayabaly, B. Salmaso, and Y. Zhan, “LAMP: a micro-satellite based soft X-ray polarimeter for astrophysics,” Proc. SPIE 9601, 96010I (2015).
[Crossref]

Spandre, G.

R. She, H. Feng, F. Muleri, P. Soffitta, R. Xu, H. Li, R. Bellazzini, Z. Wang, D. Spiga, M. Minuti, A. Brez, G. Spandre, M. Pinchera, C. Sgrò, L. Baldini, M. Wen, Z. Shen, G. Pareschi, G. Tagliaferri, K. Tayabaly, B. Salmaso, and Y. Zhan, “LAMP: a micro-satellite based soft X-ray polarimeter for astrophysics,” Proc. SPIE 9601, 96010I (2015).
[Crossref]

Spiga, D.

R. She, H. Feng, F. Muleri, P. Soffitta, R. Xu, H. Li, R. Bellazzini, Z. Wang, D. Spiga, M. Minuti, A. Brez, G. Spandre, M. Pinchera, C. Sgrò, L. Baldini, M. Wen, Z. Shen, G. Pareschi, G. Tagliaferri, K. Tayabaly, B. Salmaso, and Y. Zhan, “LAMP: a micro-satellite based soft X-ray polarimeter for astrophysics,” Proc. SPIE 9601, 96010I (2015).
[Crossref]

Sturm, J. M.

Sundgren, J. E.

N. Hellgren, M. P. Johansson, E. Broitman, L. Hultman, and J. E. Sundgren, “Role of nitrogen in the formation of hard and elastic CNx thin films by reactive magnetron sputtering,” Phys. Rev. B 59(7), 5162–5169 (1999).
[Crossref]

Szörényi, T.

F. L. Normand, J. Hommet, T. Szörényi, C. Fuchs, and E. Fogarassy, “XPS study of pulsed laser deposited CNx films,” Phys. Rev. B 64(23), 235416 (2001).
[Crossref]

Tagliaferri, G.

R. She, H. Feng, F. Muleri, P. Soffitta, R. Xu, H. Li, R. Bellazzini, Z. Wang, D. Spiga, M. Minuti, A. Brez, G. Spandre, M. Pinchera, C. Sgrò, L. Baldini, M. Wen, Z. Shen, G. Pareschi, G. Tagliaferri, K. Tayabaly, B. Salmaso, and Y. Zhan, “LAMP: a micro-satellite based soft X-ray polarimeter for astrophysics,” Proc. SPIE 9601, 96010I (2015).
[Crossref]

Tang, F.

D. X. Ye, S. Pimanpang, C. Jezewski, F. Tang, J. J. Senkevich, G. C. Wang, and T. M. Lu, “Low temperature chemical vapor deposition of Co thin films from Co2(CO)8,” Thin Solid Films 485(1-2), 95–100 (2005).
[Crossref]

Tayabaly, K.

R. She, H. Feng, F. Muleri, P. Soffitta, R. Xu, H. Li, R. Bellazzini, Z. Wang, D. Spiga, M. Minuti, A. Brez, G. Spandre, M. Pinchera, C. Sgrò, L. Baldini, M. Wen, Z. Shen, G. Pareschi, G. Tagliaferri, K. Tayabaly, B. Salmaso, and Y. Zhan, “LAMP: a micro-satellite based soft X-ray polarimeter for astrophysics,” Proc. SPIE 9601, 96010I (2015).
[Crossref]

Thiele, J.-U.

C. Ronning, H. Feldermann, R. Merk, H. Hofsäss, P. Reinke, and J.-U. Thiele, “Carbon nitride deposited using energetic species: a review on XPS studies,” Phys. Rev. B 58(4), 2207–2215 (1998).
[Crossref]

Todorov, S. S.

D. Marton, K. J. Boyd, A. H. Al-Bayati, S. S. Todorov, and J. W. Rabalais, “Carbon nitride deposited using energetic species: A two-phase system,” Phys. Rev. Lett. 73(1), 118–121 (1994).
[Crossref] [PubMed]

Tondello, G.

S. Nannarone, F. Borgatti, A. DeLuisa, B. P. Doyle, G. C. Gazzadi, A. Giglia, P. Finetti, N. Mahne, L. Pasquali, M. Pedio, G. Selvaggi, G. Naletto, M. G. Pelizzo, and G. Tondello, “The BEAR beamline at Elettra,” AIP Conf. Proc. 705, 450–453 (2004).
[Crossref]

Tsarfati, T.

T. Tsarfati, R. W. E. van de Kruijs, E. Zoethout, E. Louis, and F. Bijkerk, “Nitridation and contrast of B4C/La interfaces and X-ray multilayer optics,” Thin Solid Films 518(24), 7249–7252 (2010).
[Crossref]

van de Kruijs, R. W. E.

D. S. Kuznetsov, A. E. Yakshin, J. M. Sturm, R. W. E. van de Kruijs, E. Louis, and F. Bijkerk, “High-reflectance La/B-based multilayer mirror for 6.x nm wavelength,” Opt. Lett. 40(16), 3778–3781 (2015).
[Crossref] [PubMed]

T. Tsarfati, R. W. E. van de Kruijs, E. Zoethout, E. Louis, and F. Bijkerk, “Nitridation and contrast of B4C/La interfaces and X-ray multilayer optics,” Thin Solid Films 518(24), 7249–7252 (2010).
[Crossref]

Wang, C. D.

H. L. Bai, E. Y. Jiang, and C. D. Wang, “Interdiffusion in CoN/CN soft X-ray multilayer mirrors,” Thin Solid Films 304(1-2), 278–285 (1997).
[Crossref]

H. L. Bai, E. Y. Jiang, and C. D. Wang, “Structural stability of heat-treated Co/C soft X-ray multilayers fabricated by dual-facing-target sputtering,” Appl. Phys., A Mater. Sci. Process. 63(1), 57–65 (1996).
[Crossref]

Wang, F.

Z. Wang, H. Wang, J. Zhu, Y. Xu, S. Zhang, C. Li, F. Wang, Z. Zhang, Y. Wu, X. Cheng, L. Chen, A. G. Michette, S. J. Pfauntsch, A. K. Powell, F. Schäfers, A. Gaupp, and M. MacDonald, “Extreme ultraviolet broadband Mo/Y multilayer analyzers,” Appl. Phys. Lett. 89(24), 241120 (2006).
[Crossref]

Wang, G. C.

D. X. Ye, S. Pimanpang, C. Jezewski, F. Tang, J. J. Senkevich, G. C. Wang, and T. M. Lu, “Low temperature chemical vapor deposition of Co thin films from Co2(CO)8,” Thin Solid Films 485(1-2), 95–100 (2005).
[Crossref]

Wang, H.

M. Wen, L. Jiang, Z. Zhang, Q. Huang, Z. Wang, R. She, H. Feng, and H. Wang, “High reflectance Cr/C multilayer at 250 eV for soft X-ray polarimetry,” Thin Solid Films 592, 262–265 (2015).
[Crossref]

Z. Wang, H. Wang, J. Zhu, Y. Xu, S. Zhang, C. Li, F. Wang, Z. Zhang, Y. Wu, X. Cheng, L. Chen, A. G. Michette, S. J. Pfauntsch, A. K. Powell, F. Schäfers, A. Gaupp, and M. MacDonald, “Extreme ultraviolet broadband Mo/Y multilayer analyzers,” Appl. Phys. Lett. 89(24), 241120 (2006).
[Crossref]

H. Wang, S. P. Wong, W. Y. Cheung, N. Ke, G. H. Wen, X. X. Zhang, and R. W. M. Kwok, “Magnetic properties and structure evolution of amorphous Co–C nanocomposite films prepared by pulsed filtered vacuum arc deposition,” J. Appl. Phys. 88(8), 4919–4921 (2000).
[Crossref]

Wang, K.

Wang, T.

J. Xiong, Y. Ding, T. Wang, L. Yan, W. Chen, H. Zhu, and Y. Lu, “The formation of Co2C species in activated carbon supported cobalt-based catalysts and its impact on Fischer-Tropsch reaction,” Catal. Lett. 102(3-4), 265–269 (2005).
[Crossref]

Wang, Y.

Wang, Z.

D. Xu, Q. Huang, Y. Wang, P. Li, M. Wen, P. Jonnard, A. Giglia, I. V. Kozhevnikov, K. Wang, Z. Zhang, and Z. Wang, “Enhancement of soft X-ray reflectivity and interface stability in nitridated Pd/Y multilayer mirrors,” Opt. Express 23(26), 33018–33026 (2015).
[Crossref] [PubMed]

M. Wen, L. Jiang, Z. Zhang, Q. Huang, Z. Wang, R. She, H. Feng, and H. Wang, “High reflectance Cr/C multilayer at 250 eV for soft X-ray polarimetry,” Thin Solid Films 592, 262–265 (2015).
[Crossref]

R. She, H. Feng, F. Muleri, P. Soffitta, R. Xu, H. Li, R. Bellazzini, Z. Wang, D. Spiga, M. Minuti, A. Brez, G. Spandre, M. Pinchera, C. Sgrò, L. Baldini, M. Wen, Z. Shen, G. Pareschi, G. Tagliaferri, K. Tayabaly, B. Salmaso, and Y. Zhan, “LAMP: a micro-satellite based soft X-ray polarimeter for astrophysics,” Proc. SPIE 9601, 96010I (2015).
[Crossref]

H. Jiang, A. Michette, S. Pfauntsch, Z. Wang, J. Zhu, and D. Li, “Determination of the evolution of layer thickness errors and interfacial imperfections in ultrathin sputtered Cr/C multilayers using high-resolution transmission electron microscopy,” Opt. Express 19(12), 11815–11824 (2011).
[Crossref] [PubMed]

Z. Wang, H. Wang, J. Zhu, Y. Xu, S. Zhang, C. Li, F. Wang, Z. Zhang, Y. Wu, X. Cheng, L. Chen, A. G. Michette, S. J. Pfauntsch, A. K. Powell, F. Schäfers, A. Gaupp, and M. MacDonald, “Extreme ultraviolet broadband Mo/Y multilayer analyzers,” Appl. Phys. Lett. 89(24), 241120 (2006).
[Crossref]

Wen, G. H.

H. Wang, S. P. Wong, W. Y. Cheung, N. Ke, G. H. Wen, X. X. Zhang, and R. W. M. Kwok, “Magnetic properties and structure evolution of amorphous Co–C nanocomposite films prepared by pulsed filtered vacuum arc deposition,” J. Appl. Phys. 88(8), 4919–4921 (2000).
[Crossref]

Wen, M.

D. Xu, Q. Huang, Y. Wang, P. Li, M. Wen, P. Jonnard, A. Giglia, I. V. Kozhevnikov, K. Wang, Z. Zhang, and Z. Wang, “Enhancement of soft X-ray reflectivity and interface stability in nitridated Pd/Y multilayer mirrors,” Opt. Express 23(26), 33018–33026 (2015).
[Crossref] [PubMed]

R. She, H. Feng, F. Muleri, P. Soffitta, R. Xu, H. Li, R. Bellazzini, Z. Wang, D. Spiga, M. Minuti, A. Brez, G. Spandre, M. Pinchera, C. Sgrò, L. Baldini, M. Wen, Z. Shen, G. Pareschi, G. Tagliaferri, K. Tayabaly, B. Salmaso, and Y. Zhan, “LAMP: a micro-satellite based soft X-ray polarimeter for astrophysics,” Proc. SPIE 9601, 96010I (2015).
[Crossref]

M. Wen, L. Jiang, Z. Zhang, Q. Huang, Z. Wang, R. She, H. Feng, and H. Wang, “High reflectance Cr/C multilayer at 250 eV for soft X-ray polarimetry,” Thin Solid Films 592, 262–265 (2015).
[Crossref]

Wiesmann, J.

J. M. André, P. Jonnard, C. Michaelsen, J. Wiesmann, F. Bridou, M. F. Ravet, A. Jérome, F. Delmotte, and E. O. Filatova, “La/B4C small period multilayer interferential mirror for the analysis of boron,” XRay Spectrom. 34(3), 203–206 (2005).
[Crossref]

Windt, D. L.

J. A. Bellotti and D. L. Windt, “Depth-graded Co/C multilayers prepared by reactive sputtering,” Proc. SPIE 7437, 743715 (2009).
[Crossref]

D. L. Windt, “Reduction of stress and roughness by reactive sputtering in W/B4C X-ray multilayer films,” Proc. SPIE 6688, 66880R (2007).
[Crossref]

Wong, S. P.

H. Wang, S. P. Wong, W. Y. Cheung, N. Ke, G. H. Wen, X. X. Zhang, and R. W. M. Kwok, “Magnetic properties and structure evolution of amorphous Co–C nanocomposite films prepared by pulsed filtered vacuum arc deposition,” J. Appl. Phys. 88(8), 4919–4921 (2000).
[Crossref]

Wu, Y.

Z. Wang, H. Wang, J. Zhu, Y. Xu, S. Zhang, C. Li, F. Wang, Z. Zhang, Y. Wu, X. Cheng, L. Chen, A. G. Michette, S. J. Pfauntsch, A. K. Powell, F. Schäfers, A. Gaupp, and M. MacDonald, “Extreme ultraviolet broadband Mo/Y multilayer analyzers,” Appl. Phys. Lett. 89(24), 241120 (2006).
[Crossref]

Xiong, J.

J. Xiong, Y. Ding, T. Wang, L. Yan, W. Chen, H. Zhu, and Y. Lu, “The formation of Co2C species in activated carbon supported cobalt-based catalysts and its impact on Fischer-Tropsch reaction,” Catal. Lett. 102(3-4), 265–269 (2005).
[Crossref]

Xu, D.

Xu, R.

R. She, H. Feng, F. Muleri, P. Soffitta, R. Xu, H. Li, R. Bellazzini, Z. Wang, D. Spiga, M. Minuti, A. Brez, G. Spandre, M. Pinchera, C. Sgrò, L. Baldini, M. Wen, Z. Shen, G. Pareschi, G. Tagliaferri, K. Tayabaly, B. Salmaso, and Y. Zhan, “LAMP: a micro-satellite based soft X-ray polarimeter for astrophysics,” Proc. SPIE 9601, 96010I (2015).
[Crossref]

Xu, Y.

Z. Wang, H. Wang, J. Zhu, Y. Xu, S. Zhang, C. Li, F. Wang, Z. Zhang, Y. Wu, X. Cheng, L. Chen, A. G. Michette, S. J. Pfauntsch, A. K. Powell, F. Schäfers, A. Gaupp, and M. MacDonald, “Extreme ultraviolet broadband Mo/Y multilayer analyzers,” Appl. Phys. Lett. 89(24), 241120 (2006).
[Crossref]

Yakshin, A. E.

Yan, L.

J. Xiong, Y. Ding, T. Wang, L. Yan, W. Chen, H. Zhu, and Y. Lu, “The formation of Co2C species in activated carbon supported cobalt-based catalysts and its impact on Fischer-Tropsch reaction,” Catal. Lett. 102(3-4), 265–269 (2005).
[Crossref]

Ye, D. X.

D. X. Ye, S. Pimanpang, C. Jezewski, F. Tang, J. J. Senkevich, G. C. Wang, and T. M. Lu, “Low temperature chemical vapor deposition of Co thin films from Co2(CO)8,” Thin Solid Films 485(1-2), 95–100 (2005).
[Crossref]

Zhan, Y.

R. She, H. Feng, F. Muleri, P. Soffitta, R. Xu, H. Li, R. Bellazzini, Z. Wang, D. Spiga, M. Minuti, A. Brez, G. Spandre, M. Pinchera, C. Sgrò, L. Baldini, M. Wen, Z. Shen, G. Pareschi, G. Tagliaferri, K. Tayabaly, B. Salmaso, and Y. Zhan, “LAMP: a micro-satellite based soft X-ray polarimeter for astrophysics,” Proc. SPIE 9601, 96010I (2015).
[Crossref]

Zhang, S.

Z. Wang, H. Wang, J. Zhu, Y. Xu, S. Zhang, C. Li, F. Wang, Z. Zhang, Y. Wu, X. Cheng, L. Chen, A. G. Michette, S. J. Pfauntsch, A. K. Powell, F. Schäfers, A. Gaupp, and M. MacDonald, “Extreme ultraviolet broadband Mo/Y multilayer analyzers,” Appl. Phys. Lett. 89(24), 241120 (2006).
[Crossref]

Zhang, X. X.

H. Wang, S. P. Wong, W. Y. Cheung, N. Ke, G. H. Wen, X. X. Zhang, and R. W. M. Kwok, “Magnetic properties and structure evolution of amorphous Co–C nanocomposite films prepared by pulsed filtered vacuum arc deposition,” J. Appl. Phys. 88(8), 4919–4921 (2000).
[Crossref]

Zhang, Z.

D. Xu, Q. Huang, Y. Wang, P. Li, M. Wen, P. Jonnard, A. Giglia, I. V. Kozhevnikov, K. Wang, Z. Zhang, and Z. Wang, “Enhancement of soft X-ray reflectivity and interface stability in nitridated Pd/Y multilayer mirrors,” Opt. Express 23(26), 33018–33026 (2015).
[Crossref] [PubMed]

M. Wen, L. Jiang, Z. Zhang, Q. Huang, Z. Wang, R. She, H. Feng, and H. Wang, “High reflectance Cr/C multilayer at 250 eV for soft X-ray polarimetry,” Thin Solid Films 592, 262–265 (2015).
[Crossref]

Z. Wang, H. Wang, J. Zhu, Y. Xu, S. Zhang, C. Li, F. Wang, Z. Zhang, Y. Wu, X. Cheng, L. Chen, A. G. Michette, S. J. Pfauntsch, A. K. Powell, F. Schäfers, A. Gaupp, and M. MacDonald, “Extreme ultraviolet broadband Mo/Y multilayer analyzers,” Appl. Phys. Lett. 89(24), 241120 (2006).
[Crossref]

Zhu, H.

J. Xiong, Y. Ding, T. Wang, L. Yan, W. Chen, H. Zhu, and Y. Lu, “The formation of Co2C species in activated carbon supported cobalt-based catalysts and its impact on Fischer-Tropsch reaction,” Catal. Lett. 102(3-4), 265–269 (2005).
[Crossref]

Zhu, J.

H. Jiang, A. Michette, S. Pfauntsch, Z. Wang, J. Zhu, and D. Li, “Determination of the evolution of layer thickness errors and interfacial imperfections in ultrathin sputtered Cr/C multilayers using high-resolution transmission electron microscopy,” Opt. Express 19(12), 11815–11824 (2011).
[Crossref] [PubMed]

Z. Wang, H. Wang, J. Zhu, Y. Xu, S. Zhang, C. Li, F. Wang, Z. Zhang, Y. Wu, X. Cheng, L. Chen, A. G. Michette, S. J. Pfauntsch, A. K. Powell, F. Schäfers, A. Gaupp, and M. MacDonald, “Extreme ultraviolet broadband Mo/Y multilayer analyzers,” Appl. Phys. Lett. 89(24), 241120 (2006).
[Crossref]

Zoethout, E.

T. Tsarfati, R. W. E. van de Kruijs, E. Zoethout, E. Louis, and F. Bijkerk, “Nitridation and contrast of B4C/La interfaces and X-ray multilayer optics,” Thin Solid Films 518(24), 7249–7252 (2010).
[Crossref]

AIP Conf. Proc. (1)

S. Nannarone, F. Borgatti, A. DeLuisa, B. P. Doyle, G. C. Gazzadi, A. Giglia, P. Finetti, N. Mahne, L. Pasquali, M. Pedio, G. Selvaggi, G. Naletto, M. G. Pelizzo, and G. Tondello, “The BEAR beamline at Elettra,” AIP Conf. Proc. 705, 450–453 (2004).
[Crossref]

Appl. Phys. Lett. (2)

Z. Wang, H. Wang, J. Zhu, Y. Xu, S. Zhang, C. Li, F. Wang, Z. Zhang, Y. Wu, X. Cheng, L. Chen, A. G. Michette, S. J. Pfauntsch, A. K. Powell, F. Schäfers, A. Gaupp, and M. MacDonald, “Extreme ultraviolet broadband Mo/Y multilayer analyzers,” Appl. Phys. Lett. 89(24), 241120 (2006).
[Crossref]

N. Ghafoor, F. Eriksson, E. Gullikson, L. Hultman, and J. Birch, “Incorporation of nitrogen in Cr/Sc multilayers giving improved soft X-ray reflectivity,” Appl. Phys. Lett. 92(9), 091913 (2008).
[Crossref]

Appl. Phys., A Mater. Sci. Process. (1)

H. L. Bai, E. Y. Jiang, and C. D. Wang, “Structural stability of heat-treated Co/C soft X-ray multilayers fabricated by dual-facing-target sputtering,” Appl. Phys., A Mater. Sci. Process. 63(1), 57–65 (1996).
[Crossref]

Catal. Lett. (1)

J. Xiong, Y. Ding, T. Wang, L. Yan, W. Chen, H. Zhu, and Y. Lu, “The formation of Co2C species in activated carbon supported cobalt-based catalysts and its impact on Fischer-Tropsch reaction,” Catal. Lett. 102(3-4), 265–269 (2005).
[Crossref]

J. Appl. Phys. (1)

H. Wang, S. P. Wong, W. Y. Cheung, N. Ke, G. H. Wen, X. X. Zhang, and R. W. M. Kwok, “Magnetic properties and structure evolution of amorphous Co–C nanocomposite films prepared by pulsed filtered vacuum arc deposition,” J. Appl. Phys. 88(8), 4919–4921 (2000).
[Crossref]

Opt. Express (2)

Opt. Lett. (1)

Phys. Rev. B (4)

F. L. Normand, J. Hommet, T. Szörényi, C. Fuchs, and E. Fogarassy, “XPS study of pulsed laser deposited CNx films,” Phys. Rev. B 64(23), 235416 (2001).
[Crossref]

C. Ronning, H. Feldermann, R. Merk, H. Hofsäss, P. Reinke, and J.-U. Thiele, “Carbon nitride deposited using energetic species: a review on XPS studies,” Phys. Rev. B 58(4), 2207–2215 (1998).
[Crossref]

N. Hellgren, M. P. Johansson, E. Broitman, L. Hultman, and J. E. Sundgren, “Role of nitrogen in the formation of hard and elastic CNx thin films by reactive magnetron sputtering,” Phys. Rev. B 59(7), 5162–5169 (1999).
[Crossref]

R. Gupta and M. Gupta, “Nanocrystallization and amorphization induced by reactive nitrogen sputtering in iron and permalloy,” Phys. Rev. B 72(2), 024202 (2005).
[Crossref]

Phys. Rev. Lett. (1)

D. Marton, K. J. Boyd, A. H. Al-Bayati, S. S. Todorov, and J. W. Rabalais, “Carbon nitride deposited using energetic species: A two-phase system,” Phys. Rev. Lett. 73(1), 118–121 (1994).
[Crossref] [PubMed]

Proc. SPIE (4)

D. L. Windt, “Reduction of stress and roughness by reactive sputtering in W/B4C X-ray multilayer films,” Proc. SPIE 6688, 66880R (2007).
[Crossref]

R. She, H. Feng, F. Muleri, P. Soffitta, R. Xu, H. Li, R. Bellazzini, Z. Wang, D. Spiga, M. Minuti, A. Brez, G. Spandre, M. Pinchera, C. Sgrò, L. Baldini, M. Wen, Z. Shen, G. Pareschi, G. Tagliaferri, K. Tayabaly, B. Salmaso, and Y. Zhan, “LAMP: a micro-satellite based soft X-ray polarimeter for astrophysics,” Proc. SPIE 9601, 96010I (2015).
[Crossref]

B. Kjornrattanawanich, S. Bajt, and J. F. Seely, “Multilayer-coated photodiodes with polarization sensitivity at EUV wavelength,” Proc. SPIE 5168, 31–34 (2004).
[Crossref]

J. A. Bellotti and D. L. Windt, “Depth-graded Co/C multilayers prepared by reactive sputtering,” Proc. SPIE 7437, 743715 (2009).
[Crossref]

Sect. A (1)

F. Schäfers, M. Mertin, D. Abramsohn, A. Gaupp, H. Ch. Mertins, and N. N. Salashchenko, ““Cr/Sc nanolayers for the water window: improved performance,” Nucl. Instrum. Methods Phys. Res,” Sect. A 467, 349–353 (2001).

Surf. Interface Anal. (1)

M. A. Baker and P. Hammer, “A study of the chemical bonding and microstructure of ion beam-deposited CNx films including an XPS C 1s peak simulation,” Surf. Interface Anal. 25(9), 629–642 (1997).
[Crossref]

Thin Solid Films (4)

H. L. Bai, E. Y. Jiang, and C. D. Wang, “Interdiffusion in CoN/CN soft X-ray multilayer mirrors,” Thin Solid Films 304(1-2), 278–285 (1997).
[Crossref]

M. Wen, L. Jiang, Z. Zhang, Q. Huang, Z. Wang, R. She, H. Feng, and H. Wang, “High reflectance Cr/C multilayer at 250 eV for soft X-ray polarimetry,” Thin Solid Films 592, 262–265 (2015).
[Crossref]

D. X. Ye, S. Pimanpang, C. Jezewski, F. Tang, J. J. Senkevich, G. C. Wang, and T. M. Lu, “Low temperature chemical vapor deposition of Co thin films from Co2(CO)8,” Thin Solid Films 485(1-2), 95–100 (2005).
[Crossref]

T. Tsarfati, R. W. E. van de Kruijs, E. Zoethout, E. Louis, and F. Bijkerk, “Nitridation and contrast of B4C/La interfaces and X-ray multilayer optics,” Thin Solid Films 518(24), 7249–7252 (2010).
[Crossref]

XRay Spectrom. (1)

J. M. André, P. Jonnard, C. Michaelsen, J. Wiesmann, F. Bridou, M. F. Ravet, A. Jérome, F. Delmotte, and E. O. Filatova, “La/B4C small period multilayer interferential mirror for the analysis of boron,” XRay Spectrom. 34(3), 203–206 (2005).
[Crossref]

Cited By

OSA participates in Crossref's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Figures (8)

Fig. 1
Fig. 1 GIXR measurements of Co/C multilayers at the 0.154 nm wavelength. The multilayers were deposited with the use of pure Ar and mixtures of Ar + 4% N2, Ar + 6% N2, Ar + 10% N2, and Ar + 15% N2 as the working gas.
Fig. 2
Fig. 2 Cross-sectional HRTEM images and SAED patterns (insets) of Co/C multilayers deposited with different working gases: (a) pure Ar; (b) Ar + 4% N2; (c) Ar + 6% N2; and (d) Ar + 15% N2.
Fig. 3
Fig. 3 EDX depth profiles of the relative atomic concentration of the dominant chemical elements composed of Co/C multilayers fabricated with (a) pure Ar and (b) a mixture Ar + 6% N2 as the working gas.
Fig. 4
Fig. 4 C 1s photoelectron spectra obtained at the excitation energy of 1486 eV from Co/C multilayers deposited (a) with pure Ar and (b) a mixture of Ar + 6% N2 as the working gas.
Fig. 5
Fig. 5 N 1s photoelectron spectra obtained at the excitation energy of 1486 eV from Co/C multilayers deposited with Ar + 6% N2 working gas.
Fig. 6
Fig. 6 Co 2p core-level spectra from Co/C multilayers deposited with (a) pure Ar and (b) mixture Ar + 6% N2 as the working gas.
Fig. 7
Fig. 7 (a) The soft X-ray reflectivity of the Co/C multilayer versus the photon energy for s-polarized beam at the 45° angle of incidence; (b) The peak value of the reflectivity Rs and the integrated reflectivity Rint versus the pressure ratio of nitrogen in the working gas.
Fig. 8
Fig. 8 The measured reflectivity (s-polarized radiation) of the Co/C multilayer fabricated with Ar + 6% N2 as the working gas dependent on the photon energy for different angles of incidence.

Metrics