Abstract

Error equations for angles of polarizers and analyzers are formulated for null ellipsometry with a seriously imperfect compensator. Analytic solutions of ellipsometric errors δψ and δΔ for metallic samples show dependence on sin2(δτ/2)/cos δτ, where δτ is the retardation deviation from a quarter-wave. The analytic solutions agree with results both from the direct computer simulation of null ellipsometry and from the numerical solutions for the error equations. Errors for data for a metallic sample agree with those predicted from the analytic solutions, and data after error reductions give accurate estimates for the complex refractive index and the surface roughness.

© 1991 Optical Society of America

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