Abstract

Corrections for component optical activity in rotating-analyzer ellipsometers are extended to include the relative reflectivities RR used in three-parameter (3P) ellipsometry. Both the polarizer-compensator-surface-analyzer (PCSA) and polarizer-surface-analyzer (PSA) configurations are discussed. Errors in RR of the order of 0.1% to 1.0% are predicted when optical activity corrections are neglected.

© 1981 Optical Society of America

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Equations (26)

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