Micro attenuated total reflection (micro-ATR) spectra of bulk silica glass were investigated for a variety of samples, including fused quartz slides, an optical fiber preform, and a series of optical fiber claddings. The experiments were performed at varied distances between the internal reflection element (IRE) and the sample. At certain conditions, a surface polariton peak is observed in the region 1100–1160 cm<sup>−1</sup>. The position of this peak is affected by the type of IRE (Ge, Si, ZnSe, or diamond), IRE–sample distance, and the material used as an interlayer between the IRE and the sample (air or Nujol). From the experimental data, the dielectric constant of silica is determined in the region between 1100 and 1160 cm<sup>−1</sup>. The polariton peak is also observed when glass is coated with a thin (40 nm) layer of carbon. It has also been found that the polariton peak position is affected by the thermal history of the glass, and an attempt is made to correlate the observed changes with the glass fictive temperature.
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