It is shown that the use of analytical lines in the spectral range between 125 and 195 nm opens new analytical possibilities for inductively coupled plasma optical emission spectrometry (ICP-OES). Prominent emission lines in the vacuum ultraviolet (VUV) spectral region were used for different analytical applications with a new ICP optical emission spectrometer with charge-coupled device detectors (CCDs). These applications include the determination of Cl and S in organic samples (oil and gasoline), the determination of Al, Br, I, and P in high-saline 200 g/L NaCl solutions, and the determination of Pb, Sn, and In in highly pure 99.9% (m/m) Pd and Pt. The superiority of the VUV emission lines of Al 167, Br 148, Cl 134, Cl 135, Ga 141, I 161, In 158, P 177, Pb 168, Sn 140, and Sn 147 nm in these applications with respect to power of detection and freedom from spectral interferences is shown. The limits of detection (LODs) are tabulated for a series of further elements with prominent spectral lines in the 125-195 nm range using pneumatic nebulization of aqueous solutions for sample introduction. These results are compared with those for lines above 195 nm. In some cases VUV lines are superior to commonly used lines; for example, calculated LODs for Al(II) 167.080 nm, In(II) 158.637 nm, and Ga(II) 141.444 nm are 0.07, 0.2, and 0.8 μg/L, respectively, compared to 1.1, 7.1, and 5.9 μg/L for Al(I) 396.152, In(I) 230.606, and Ga I 417.204 nm, respectively. In other cases LODs in the μg/L range are possible only with VUV lines, such as for Cl(I) 134.724 or Br(I) 154.065 nm.

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