Several factors influence the precision of laser-induced breakdown spectroscopy (LIBS) measurements. This paper reports on the effect of emission signal temporal development, sample translational velocity, number of spectra accumulated, laser pulse stability, detector gate delay, surface roughness, and use of background correction on LIBS precision. The results are presented in two formats: within measurement/shot-to-shot precision (intra-measurement) and between measurement precision (inter-measurement). The data indicate that intra- and inter-measurement precision are optimized under different conditions. The best precision obtained was 0.03% .
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