Abstract

A semi-analytical method is presented to unambiguously perform the wavelength-by-wavelength extraction of the optical constants (refractive index n and extinction coefficient k) in a thin film from the ellipsometry measurement. It works by recasting the ellipsometric equations under a parametric polynomial form and drawing parametric curves from the polynomial solutions, whose intersections at zero define solutions of the ellipsometry problem. The interest of the method is the possibility to extract all the solutions of the considered ellipsometric problem in a given range of n and k values, in contrast to the standard least-squares fitting, which provides a single unsure solution conditioned by initial guess values.

© 2019 Optical Society of America

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