Abstract

Pentaprism scanning technology (PPS) is an absolute testing method that has the advantages of a simple structure and absolute testing without an extra reference flat, as well as being able to provide in situ surface measurements, and more. It plays an important role in the manufacturing process of large flat mirrors. For calibrating the PPS’s uncertainty, this paper describes a multi-mode scanning method to implement the measurement of low-order aberrations and introduces the concept of an autocorrelation coefficient to evaluate the data processing progress. These improvements were applied to the measurement of a large flat mirror (1630 mm in diameter), which demonstrates that the measuring uncertainty of PPS can be about 20 nm rms. Furthermore, in regard to the special requirements of M3MP, the prototype mirror of M3M (the tertiary mirror) in the Thirty Meter Telescope project with a non-circular aperture, we analyzed the slope distribution of low-order aberrations, power, and astigmatism. The sample route lines of PPS are then reorganized and a new data process algorithm is implemented. This work was performed in order to improve the PPS’s performance in measuring low-order aberrations of large flat mirrors.

© 2019 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Analysis of a scanning pentaprism system for measurements of large flat mirrors

Julius Yellowhair and James H. Burge
Appl. Opt. 46(35) 8466-8474 (2007)

Wavefront control of the Large Optics Test and Integration Site (LOTIS) 6.5m Collimator

Steven C. West, Samuel H. Bailey, James H. Burge, Brian Cuerden, Jeff Hagen, Hubert M. Martin, and Michael T. Tuell
Appl. Opt. 49(18) 3522-3537 (2010)

Application of maximum likelihood reconstruction of subaperture data for measurement of large flat mirrors

Peng Su, James H. Burge, and Robert E. Parks
Appl. Opt. 49(1) 21-31 (2010)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (15)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (1)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (14)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription