Abstract

HfO2 is a well-known high-refractive-index material for optical interference coatings from the infrared down to the ultraviolet (UV). Dense, homogeneous, and stoichiometric HfO2 film is critical for low-loss UV optics where the spectral region is close to its fundamental absorption edge. We prepare HfO2 films by plasma-ion-assisted deposition with various amounts of plasma-ion momentum transfer. The correlation between the HfO2 film structure and the optical properties are evaluated by a variable-angle spectroscopic ellipsometry, indicating inhomogeneous to homogeneous to inhomogeneous film structural evolution with increasing momentum transfer during deposition. The HfO2 film inhomogeneity, surface roughness, and crystal phase are confirmed by scanning electron microscopy cross-sectional, atomic force microscopy, and x-ray diffraction measurements. The results suggest that the HfO2 film structural evolution corresponds to crystal phase transition from weak monocline amorphous to strong monocline depending on the amount of plasma-ion momentum transfer during film deposition.

© 2008 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Optical inhomogeneity and microstructure of ZrO2 thin films prepared by ion-assisted deposition

Hyun Ju Cho and Chang Kwon Hwangbo
Appl. Opt. 35(28) 5545-5552 (1996)

Wavefront control of SiO2-based ultraviolet narrow-bandpass filters prepared by plasma ion-assisted deposition

Jue Wang, Robert L. Maier, and Horst Schreiber
Appl. Opt. 46(2) 175-179 (2007)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (5)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (1)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (1)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription