A new type of computer-controlled optical scanning, high-magnification imaging system with a large field of view is described that overcomes the commonly believed incompatibility of achieving both high magnification and a large field of view. The new system incorporates galvanometer scanners, a CCD camera, and a high-brightness LED source for the fast acquisition of a large number of a high-resolution segmented tile images with a magnification of for each tile. The captured segmented tile images are combined to create an effective enlarged view of a target totaling in area. The speed and sensitivity of the system make it suitable for high-resolution imaging and monitoring of a small segmented area of with resolution. Each tile segment of the target can be zoomed up without loss of the high resolution. This new microscope imaging system gives both high magnification and a large field of view. This microscope can be utilized in medicine, biology, semiconductor inspection, device analysis, and quality control.
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