Abstract

We have constructed and evaluated a video microscope with a 150- × 150-μm field of view for performing measurements of optical fiber geometry. The microscope consists of a frame transfer video camera, condensing and filtering optics, a 40×, 0.65 N.A. microscope objective, and frame digitizing electronics. Using simple digital algorithms, we measure distance with a random uncertainty of ~40 nm across the full field of view, but width measurements suffer from a systematic error between 0.1 and 0.2 μm.

© 1991 Optical Society of America

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