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Glass Substrate Inspection Using Swept-Source Optical Coherence Tomography

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Abstract

We demonstrate a novel industrial application of optical coherence tomography (OCT) for glass substrate inspection. For high resolution and high speed OCT measurements, we developed an all-fiberized Fourier-domain mode locking swept source with broad bandwidth and high sweeping speed as the light source for the OCT system. With this, we successfully measured multiple layers of glass substrate.

© 2019 The Author(s)

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