Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Stress-Less Hard Film with High Hardness, Small Surface Roughness and Low Stress

Not Accessible

Your library or personal account may give you access

Abstract

Here we report newly developed stress-less hard (SLH) coating prepared with radical-assisted sputtering (RAS). Multilayered film stack shows comparable hardness and better balance of stress and roughness with SLH replacing conventional Si3N4 as high-index layers.

© 2019 The Author(s)

PDF Article
More Like This
Improving film stress and surface roughness by using a plasma source in magnetron sputtering

S. Schwyn Thöny, S. Gees, and E. Schüngel
WC.4 Optical Interference Coatings (OIC) 2019

Low Residual Stress in Si3N4/SiO2 Multilayer Coatings by Reactive Pulsed Magnetron Sputtering Technique

Chuen-Lin Tien, Po-Chih Chen, Kuei-Luen Chen, Chien-Jen Tang, Sheng-Hua Lu, and Shih-Chin Lin
ThD.12 Optical Interference Coatings (OIC) 2016

Optical, Structural and Mechanical Properties of Silicon-Oxynitride Films Prepared by Pulsed Magnetron Sputtering

Chien-Jen Tang, Cheng-Chung Jaing, Chuen-Lin Tien, Wei-Chiang Sun, and Shih-Chin Lin
ThD.4 Optical Interference Coatings (OIC) 2016

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved