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Investigation of the Anisotropic Stress and Optoelectronic Properties of MZO Film deposited on flexible substrate with RF Magnetron Sputtering

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Abstract

The Mo-doped ZnO (MZO) thin films were deposited with RF magnetron sputtering on PET and PC flexible substrates with different substrate temperature and oxygen pressure. The anisotropic stress and optoelectronic properties were investigated.

© 2019 The Author(s)

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