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Precisely Stress Compensated Dielectric Laser Mirrors Deposited by PARMS on Thin Deformable Substrates

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Abstract

Coated optical components with low surface form deviations require particular knowledge on thin-film stress. Contributing factors to stress in PARMS coatings are evaluated and results of laser mirrors, deposited on thin substrates, are presented.

© 2019 The Author(s)

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