Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group
Conferences > OIC > 2019 > WA > WA.7

High-Resolution Optical Broadband Monitoring for the Production of Miniaturized Thin-Film Filters

F. Carstens, H. Ehlers, S. Schlichting, L. Jensen, and D. Ristau

Not Accessible

Your library or personal account may give you access

Abstract

To increase the accuracy of layer thicknesses in the production of miniaturized thin-film filters controlled by optical broadband monitoring, a high-resolution monitoring system was developed and evaluated by coating simulations and experiments.

© 2019 The Author(s)

PDF Article
More Like This
Application of Indirect Broadband Optical Monitoring for the Production of Three-Line Minus Filters

Valery G. Zhupanov, Evgeny V. Klyuev, Pavel A. Konotopov, Alexander V. Tikhonravov, Michael K. Trubetskov, Ivan V. Kozlov, and Michael A. Kokarev
TuD5 Optical Interference Coatings (OIC) 2010

Dielectric Filter Production with in-situ Broadband Optical Monitoring

Othmar Zueger
TuC4 Optical Interference Coatings (OIC) 2010

Integrated Method for Control and Broadband Monitoring of Multilayer Thin Films

S. Atarah, A. Voronov, S. Song, and F. Placido
TuC9 Optical Interference Coatings (OIC) 2010

View More...
Select as filters
Select Topics Cancel
Top
       
© Copyright 2024 | Optica Publishing Group. All rights reserved, including rights for text and data mining and training of artificial technologies or similar technologies.
Privacy | Terms of Use