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How thin an optical coating? The case of atomic layer deposited TiO2 on native oxide/Si

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Abstract

A spectrally-extended Abelès method was used for probing ALD deposited TiO2 films on native oxide/Si, whose AFM imaged nanotopology was approximately followed. Cauchy fitting to the experimental data was possible until ~1/10 quarterwave optical thickness.

© 2019 The Author(s)

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