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Macro-Conformality of Coatings Deposited using High Speed Spatial PEALD

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Abstract

Rotational Spatial PEALD has been used to deposit thin films on half-sphere lenses. Non-uniformity of less than ± 1% has been demonstrated for Nb2O5 deposited at 1.4 Å/second, and for SiO2 deposited at 6 A/second.

© 2019 The Author(s)

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