Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Roughness Evolution and Light Scattering Simulation in Multilayer Coatings Deposited with Plasma Ion-Assistance

Not Accessible

Your library or personal account may give you access

Abstract

The roughness evolution of Nb2O5 and SiO2 thin films and multilayers, deposited with low energy Plasma Ion-Assistance, is investigated and modelled. The models are used to predict the light scattering of a longwave pass filter.

© 2019 The Author(s)

PDF Article
More Like This
Roughness evolution of multilayer coatings for 6.7 nm and its impact on light scattering

Marcus Trost, Sven Schröder, Sergiy Yulin, and Angela Duparré
TA.2 Optical Interference Coatings (OIC) 2016

Plasma ion-assisted deposition of TiO2 and MgF2 thin films

S. H. WOO, C. K. HWANGBO, Y. B. SON, I. C. MOON, and G. M. KANG
MB8 Optical Interference Coatings (OIC) 2004

Roughness Evolution and Scatter Losses of Multilayers for 193 nm

S. Schröder, A. Duparré, and A. Tünnermann
FA5 Optical Interference Coatings (OIC) 2007

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved