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Conferences > OIC > 2019 > MD > MD.5

Fluorinated Hybrid Coatings Deposited by IBACVD

Oleg Zabeida, William Trottier-Lapointe, Erwens Broustet, and Ludvik Martinu

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Abstract

SiOCHF films deposited in a standard box coater fitted with a broad beam ion source demonstrate low refractive index combined with a relatively high hardness and elastic recovery values, making them attractive for use in ophthalmic applications.

© 2019 The Author(s)

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