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Glancing-Angle–Deposited Silica Films for Ultraviolet Wave Plates

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Abstract

Birefringent silica films are formed by glancing-angle deposition to fabricate quarter- and half-wave plates at a wavelength of 351 nm. A multilayer design is implemented to achieve low-loss transmittance with a high 351-nm laser-damage threshold.

© 2019 The Author(s)

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