Fitting Surface Metrology Data: Is it Alignment, Radius, or Irregularity Error?

Paul E. Murphy; Chris Supranowitz; Jacob Siegel

doi:10.1364/OFT.2019.OW4A.2

Optical Design and Fabrication 2019 (Freeform, OFT)
OSA Technical Digest (Optica Publishing Group, 2019),
paper OW4A.2
•https://doi.org/10.1364/OFT.2019.OW4A.2

Fitting Surface Metrology Data: Is it Alignment, Radius, or Irregularity Error?

Paul E. Murphy, Chris Supranowitz, and Jacob Siegel

Optical Fabrication and Testing 2019

Washington, DC United States
10–12 June 2019
ISBN: 978-1-943580-60-6

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Optical Metrology and Testing (OW4A)

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P. E. Murphy, C. Supranowitz, and J. Siegel, "Fitting Surface Metrology Data: Is it Alignment, Radius, or Irregularity Error?," in Optical Design and Fabrication 2019 (Freeform, OFT), OSA Technical Digest (Optica Publishing Group, 2019), paper OW4A.2.

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Abstract

Optical surface measurements include alignment error from rigid body position uncertainty. Extracting irregularity from the measurement is straightforward for spheres. We examine challenges when fitting alignment error on aspheres and freeforms.

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