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Conferences > OFT > 2019 > OM3A > OM3A.2

Suppressing surface low and mid-spatial frequency errors of large optics during full-aperture rapid polishing

Ruiqing Xie, Shijie Zhao, Defeng Liao, Xianhua Chen, Jian Wang, Qiao Xu, Xinxing Ban, Huiying Zhao, and Zhuangde Jiang

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Abstract

A full-aperture rapid polishing process (RPP) for efficiently manufacturing of large optics is introduced. The low and mid-spatial frequency errors were suppressed by deterministically conditioning polishing pad and optimizing process parameters.

© 2019 The Author(s)

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