Large-area Metalens Directly Patterned on a 12-inch Glass Wafer using Immersion Lithography for Mass Production

Qize Zhong; Yuan Dong; Dongdong Li; Nanxi Li; Ting Hu; Zhengji Xu; Yanyan Zhou; Keng Heng Lai; Yuan Hsing Fu; Vladimir Bliznetsov; Hou-Jang Lee; Wei Loong Loh; Shiyang Zhu; Qunying Lin; Navab Singh

doi:10.1364/OFC.2020.Th2A.8

Optical Fiber Communication Conference (OFC) 2020
OSA Technical Digest (Optica Publishing Group, 2020),
paper Th2A.8
•https://doi.org/10.1364/OFC.2020.Th2A.8

Large-area Metalens Directly Patterned on a 12-inch Glass Wafer using Immersion Lithography for Mass Production

Qize Zhong, Yuan Dong, Dongdong Li, Nanxi Li, Ting Hu, Zhengji Xu, Yanyan Zhou, Keng Heng Lai, Yuan Hsing Fu, Vladimir Bliznetsov, Hou-Jang Lee, Wei Loong Loh, Shiyang Zhu, Qunying Lin, and Navab Singh

Optical Fiber Communication Conference 2020

San Diego, California United States
8–12 March 2020
ISBN: 978-1-943580-71-2

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Poster Session II (Th2A)

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Q. Zhong, Y. Dong, D. Li, N. Li, T. Hu, Z. Xu, Y. Zhou, K. H. Lai, Y. H. Fu, V. Bliznetsov, H. Lee, W. L. Loh, S. Zhu, Q. Lin, and N. Singh, "Large-area Metalens Directly Patterned on a 12-inch Glass Wafer using Immersion Lithography for Mass Production," in Optical Fiber Communication Conference (OFC) 2020, OSA Technical Digest (Optica Publishing Group, 2020), paper Th2A.8.

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Abstract

We developed a technology to directly process 12-inch glass wafers using 193 nm immersion lithography for metasurface devices fabrication. An 8-mm-dimeter metalens working at 940 nm wavelength has been demonstrated as a proof-of-concept functional device.

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