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Conferences > OFC > 2020 > M2B > M2B.8

High-Speed-Operation of Compact All-Silicon Segmented Mach-Zehnder Modulator Integrated with Passive RC Equalizer for Optical DAC Transmitter

Yohei Sobu, Shinsuke Tanaka, Yu Tanaka, Yuichi Akiyama, and Takeshi Hoshida

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Abstract

We experimentally demonstrated 70Gbaud PAM4 and 90Gbaud NRZ operations of all-silicon segmented modulator for optical DAC transmitter. Monolithic integration of MIM capacitor enabled broad EO bandwidth of 43.9GHz and small footprint of 300×60μm2.

© 2020 The Author(s)

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