In the surface-plasma CVD process,1 the plasma Is sustained by a propagating surface wave generated by a Surfaguide coupler at 2.45 GHz, The length of the plasma column and, therefore, the location of the reaction zone are determined by the microwave input power, which can be easily controlled and monitored. There are no mechanical devices.

© 1987 Optical Society of America

PDF Article


You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
Login to access OSA Member Subscription