In optical integrated circuits for communication and optical signal processing applications, it is desirable to have beam splitters or directional couplers in semiconductors to combine or split the optical signal. The two common approaches for implementing this are by the use of dual-channel waveguide couplers and V-couplers. These techniques, however, usually require 0.5-1cm device lengths which are prohibitively large for optical integration. Recently, totally reflecting waveguide mirrors have been fabricated In single- mode n/n+ GaAs rib waveguides to change the light propagation direction by 90°.1 Small size and low insertion loss have been demonstrated. Here we report a micron-size beam splitter in AlGaAs/GaAs ridge waveguides.

© 1987 Optical Society of America

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