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Flexible Mid-infrared Photonic Chips for Real-time and Label-Free Biomedical Compounds Detection

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Abstract

Chip-scale chemical sensors were demonstrated using mid-Infrared flexible aluminum nitride waveguides. Real-time detection of ethanol and water was conducted by measuring waveguide light at λ=2.7 μm corresponding to characteristic –OH absorption.

© 2018 The Author(s)

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