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Conferences > MICS > 2018 > MW4C > MW4C.2

In-bulk silicon processing with ultrashort pulsed lasers: three-photon-absorption versus two-photon-absorption

Roland Richter, Nikolai Tolstik, and Irina T. Sorokina

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Abstract

We report the results of the numerical study of three-photon-absorption versus two-photon-absorption for in-bulk modification of silicon and show benefits of using longer wavelengths (>2.1 microns) for efficient and kerfless silicon processing with femtosecond lasers.

© 2018 The Author(s)

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