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Waveguide Grating Couplers in Overlaid Chips: Efficiency Optimization and Angular Misalignment Simulation

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Abstract

Applying reflectors adds 30%~40% to the diffraction efficiencies of binary waveguide gratings. The greatest angular misalignment sensitivity occurs for rotations about the grating groove axis and rotation should be limited to ±3°.

© 2017 Optical Society of America

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