Abstract
Nealy thirty years have passed since the first observation of high-order harmonic generation (HHG). Although there has been strong interest in related physical phenomena, many researchers expected that HHG would not be useful as a practical source at that time because of its small photon number associated with low conversion efficiency. Contrary to their expectations, however, HHG is now established as a high-output coherent light source in the XUV region and the sole source of attosecond pulses. Here, I review our recent efforts on generation of high harmonics and applications including ultrafast XUV science and EUV optics/mask inspection.
© 2017 Optical Society of America
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