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Conferences > IPRSN > 2019 > ITh3A > ITh3A.2
  • OSA Advanced Photonics Congress (AP) 2019 (IPR, Networks, NOMA, SPPCom, PVLED)
  • OSA Technical Digest (Optica Publishing Group, 2019),
  • paper ITh3A.2

Integrated Photonic Inertial Sensors

Suraj Bramhavar, Dave Kharas, and Paul Juodawlkis

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Abstract

We demonstrate a chip-scale photonic platform that integrates photonic circuits with large mechanical structures at the wafer-scale. The platform can be used to realize chip-scale accelerometers and gyroscopes with performance exceeding traditional MEMS devices.

© 2019 The Author(s)

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