Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group
Conferences > IPRSN > 2018 > ITh3B > ITh3B.3

Manufacturing Aspects for All-nitride-core Ultra-Low Loss Silicon Nitride Photonics Platform

Michael Zervas

Not Accessible

Your library or personal account may give you access

Abstract

Thick film silicon nitride is a uniquely fit material for photonics, with low propagation losses, micron scale bends and efficient fiber coupling. Fabricating large scale circuits presents challenges in patterning, film stress control and uniformity.

© 2018 The Author(s)

PDF Article
More Like This
Exploiting Ultra-Low Loss Silicon Nitride Platform for Various Applications (Invited)

Xingchen Ji and Michal Lipson
Th1D.1 Optical Fiber Communication Conference (OFC) 2022

Ultra-Low Loss Silicon Nitride Waveguides on Monolithic Integrated Photonics Circuits for a Mature 300 mm Wafer Scale Silicon Photonics Platform

Yukta P. Timalsina, Gerald Leake, Tat Ngai, Alin Antohe, Siti K. Binti, Christopher Baiocco, Nicholas M. Fahrenkopf, and David Harame
AM4M.7 CLEO: Applications and Technology (CLEO:A&T) 2023

Ultra-Low Loss Silicon Oxynitride (SiOxNy) Quantum Photonic Platform

Soon Thor Lim, Alagappan Gandhi, Thomas Ang, Junrong Ong, Ching Eng Png, Ding Lu, Norman Soo Seng Ang, Ee Jin Teo, and Jinghua Teng
Tu3A.2 Optical Fiber Communication Conference (OFC) 2018

View More...
Select as filters
Select Topics Cancel
Top
       
© Copyright 2024 | Optica Publishing Group. All rights reserved, including rights for text and data mining and training of artificial technologies or similar technologies.
Privacy | Terms of Use