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Ultra-Compact All-Metamaterial NDIR CO2 Sensor

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Abstract

We demonstrate an ultra-compact optical CO2 sensor by combining metamaterial-enhanced MEMS components with an efficient multi-reflection cell (5.7×5.7×4.5 mm3). We measure a CO2 sensitivity of 23.3 ppmCO2/√Hz at an energy consumption of 58.6 mJ.

© 2019 The Author(s)

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