Abstract
We present air-cladded silicon nitride microresonators at visible wavelengths compatible with 2D material transfer, fabricated using the photonic Damascene reflow process. Quality factors of 1 million have been measured at 765 nm.
© 2018 The Author(s)
PDF ArticleMore Like This
Martin H. P. Pfeiffer, Junqiu Liu, Tiago Morais, Bahareh Ghadiani, and Tobias J. Kippenberg
STh1I.1 CLEO: Science and Innovations (CLEO:S&I) 2018
A. N. Kamel, H. E. Dirani, M. Casale, S. Kerdiles, C. Socquet-Clerc, M. Pu, L. K. Oxenløwe, K. Yvind, and C. Sciancalepore
JTu2A.120 CLEO: Applications and Technology (CLEO:A&T) 2018
Jinfeng Mu, Michiel de Goede, Meindert Dijkstra, and Sonia M. García-Blanco
ITh1I.1 Integrated Photonics Research, Silicon and Nanophotonics (IPR) 2018