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Arrays of High Reflectivity SiN Photonic Crystal Membranes for Cavity Optomechanics

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Abstract

We fabricate photonic crystal SiN membranes with reflectivity > 99.9% at 1550 nm. These form a platform for studying arrays of mechanical oscillators inside optical cavities, which can potentially reach strong single-photon optomechanical coupling.

© 2018 The Author(s)

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