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Efficient Third Harmonic Generation in Integrated Composite Aluminum Nitride / Silicon Nitride Microrings

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Abstract

In this work we demonstrate high-efficiency third harmonic generation in a high Q composite aluminum nitride / silicon nitide ring cavity. By engineering the microring resonator geometry of the bilayer structure to optimize visible light coupling, mode volume and modal overlap of the optical fields, we report a maximum conversion efficiency of 180%W2. This composite photonic chip design provides a solution for efficient frequency conversion over a large wavelength span, broadband comb generation and even self-referenced frequency combs.

© 2017 Optical Society of America

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