Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group
Conferences > FiO > 2014 > FTu1G > FTu1G.2

Effect of forbidden light on subsurface IC imaging

Aydan Uyar, Abdulkadir Yurt, T. Berkin Cilingiroglu, Bennett B Goldberg, and M. Selim Ünlü

Not Accessible

Your library or personal account may give you access

Abstract

Forbidden light, the cone of high-angle light formed above critical angle, plays a critical role in near-interface high numerical aperture imaging. We investigate its effect in subsurface imaging in aplanatic solid immersion microscopy on ICs.

© 2014 Optical Society of America

PDF Article
More Like This
High NA Pupil Plane Image Polarimetry for Detection of Surface and Subsurface Damage in Optical Materials

Victor Densmore, Youngsik Kim, Geon-Hee Kim, and Tom D. Milster
FTh3G.8 Frontiers in Optics (FiO) 2014

Effect of Polarization Memory in Subsurface Polarization Imaging

Ralph Nothdurft and Gang Yao
ME48 Biomedical Topical Meeting (BIOMED) 2006

Seeing inside chips and cells: High-resolution subsurface imaging of integrated circuits, quantum dots and subcellular structures

Bennett B. Goldberg, A. K. Swan, L. Moiseev, M. Dogan, W. C. Karl, B. Davis, C. R. Cantor, S. B. Ippolito, S. A. Thorne, M. G. Eraslan, Z. Liu, M. B. Goldberg, M. S. Ünlü, and Y. Leblebici
IWD1 International Quantum Electronics Conference (IQEC) 2004

View More...
Select as filters
Select Topics Cancel
Top
       
© Copyright 2024 | Optica Publishing Group. All rights reserved, including rights for text and data mining and training of artificial technologies or similar technologies.
Privacy | Terms of Use