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Three-Dimensional Optical Structure Design and Fabrication by Laser Means

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Abstract

Three-dimensional optical micro/nanostructures are designed and fabricated by laser means. The fabricated structures built on the Si surfaces have shown their abilities to enhance broadband optical antireflection. An extensive research by coating metallic nanoparticles into the structures is carried out to reduce the average reflectance down to 1.8%.

© 2013 Optical Society of America

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