Status and challenges of three-dimensional optical laser lithography

Martin Wegener; Martin Wegener

doi:10.1364/FIO.2013.FW1F.1

Frontiers in Optics 2013
OSA Technical Digest (online) (Optica Publishing Group, 2013),
paper FW1F.1
•https://doi.org/10.1364/FIO.2013.FW1F.1

Status and challenges of three-dimensional optical laser lithography

Martin Wegener

Frontiers in Optics 2013

Orlando, Florida United States
6–10 October 2013
ISBN: 978-1-55752-987-9

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Three-Dimensional Optical Structure I (FW1F)

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M. Wegener, "Status and challenges of three-dimensional optical laser lithography," in Frontiers in Optics 2013, I. Kang, D. Reitze, N. Alic, and D. Hagan, eds., OSA Technical Digest (online) (Optica Publishing Group, 2013), paper FW1F.1.

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Abstract

We review our work on stimulated-emission-depletion and dip-in direct laser writing, discuss underlying mechanisms, and give examples like visible-frequency three-dimensional titania complete-photonic-band-gap and gold quadruple-helix structures.

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