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CMOS Compatible, High Efficiency Subwavelength Grating Couplers for Silicon Integrated Photonics

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Abstract

We demonstrate a through etched subwavelength grating coupler, which can be patterned together with other photonic components. It achieves a very high coupling efficiency of 59%with a 3dB bandwidth of 60 nm.

© 2012 Optical Society of America

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