The effect of phase distortion on interferometric measurements of thin film coated optical surfaces

Jon Watson; Daniel Savage

doi:10.1364/FIO.2010.FThX8

Frontiers in Optics 2010/Laser Science XXVI
OSA Technical Digest (CD) (Optica Publishing Group, 2010),
paper FThX8
•https://doi.org/10.1364/FIO.2010.FThX8

The effect of phase distortion on interferometric measurements of thin film coated optical surfaces

Jon Watson and Daniel Savage

Frontiers in Optics 2010

Rochester, New York United States
24–28 October 2010
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J. Watson and D. Savage, "The effect of phase distortion on interferometric measurements of thin film coated optical surfaces," in Frontiers in Optics 2010/Laser Science XXVI, OSA Technical Digest (CD) (Optica Publishing Group, 2010), paper FThX8.

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Abstract

This paper discusses difficulty in accurately interpreting surface form data from a phase shifting interferometer measurement of a thin film interference coated surfaces.

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