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Optica Publishing Group
  • Frontiers in Optics 2008/Laser Science XXIV/Plasmonics and Metamaterials/Optical Fabrication and Testing
  • OSA Technical Digest (CD) (Optica Publishing Group, 2008),
  • paper FTuZ1
  • https://doi.org/10.1364/FIO.2008.FTuZ1

Optical Coherence Effects That Limit Ultrafast-Laser Channel Etching

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Abstract

When etching channels with ultrafast laser pulses, the etch-rate is known to decrease with increasing depth. We show that this depth-saturation is partly due to loss of spatial coherence incurred during propagation through the channel.

© 2008 Optical Society of America

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