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Optica Publishing Group
  • Frontiers in Optics 2008/Laser Science XXIV/Plasmonics and Metamaterials/Optical Fabrication and Testing
  • OSA Technical Digest (CD) (Optica Publishing Group, 2008),
  • paper FThW4
  • https://doi.org/10.1364/FIO.2008.FThW4

A Novel Micromachining Techniques for Achieving Optical Structures with Arbitrary Sidewall Profiles

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Abstract

We present a micromachining technique using a fluorocarbon inductively coupled plasma for achieving arbitrary sidewall profiles in silicon, silicon dioxide and lithium niobate that are independent of the substrate crystal orientation.

© 2008 Optical Society of America

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