Characterization of silicon micro-optic structures with a near-infrared Near-field Scanning Optical Microscope

Webin Chen; Lirong Sun; Andrew Sarangan; Qiwen Zhan

doi:10.1364/FIO.2006.FTuT5

Frontiers in Optics
OSA Technical Digest (CD) (Optica Publishing Group, 2006),
paper FTuT5
•https://doi.org/10.1364/FIO.2006.FTuT5

Characterization of silicon micro-optic structures with a near-infrared Near-field Scanning Optical Microscope

Webin Chen, Lirong Sun, Andrew Sarangan, and Qiwen Zhan

Frontiers in Optics 2006

Rochester, New York United States
10–13 October 2006
ISBN: 1-55752-818-7

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Diffractive Micro- and Nanostructures for Sensing and Information Processing II (FTuT)

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W. Chen, L. Sun, A. Sarangan, and Q. Zhan, "Characterization of silicon micro-optic structures with a near-infrared Near-field Scanning Optical Microscope," in Frontiers in Optics, OSA Technical Digest (CD) (Optica Publishing Group, 2006), paper FTuT5.

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Abstract

We report the instrumentation of a near-infrared near-field scanning optical microscope (NSOM). This NSOM is applied for the characterization of a simple yet novel silicon micro-optic device.

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